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Jyrki Kiihamäki

1991 …2019
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Fingerprint Dive into the research topics where Jyrki Kiihamäki is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Physics & Astronomy

Chemistry and Materials

silicon
stiction
hydrofluoric acid
atomic layer epitaxy
oxides
aluminum
dioxides
titanium oxides

Engineering

microelectromechanical systems
etching
resonators
SOI (semiconductors)
plugs
wireless communication
CMOS

General

wafers
oscillators
insulators
single crystals
aspect ratio
high aspect ratio
reactors
passivity
pressure sensors
quartz crystals
profiles
time lag
readout
artifacts

Physics

vacuum
acoustics
deceleration

Aerospace Sciences

cavities

Engineering & Materials Science

Silicon
Etching
MEMS
Resonators
Micromechanical resonators
Single crystals
Aspect ratio
Vapors
Oxides
Inductively coupled plasma
Hydrofluoric acid
Stiction
Chemical vapor deposition
Low pressure chemical vapor deposition
Plasma enhanced chemical vapor deposition
Phase noise
Aluminum corrosion
Atomic layer deposition
Spurious signal noise
Wet etching
Vacuum
Silica
Fabrication
Reactive ion etching
Insulated gate bipolar transistors (IGBT)
Silicon oxides
Passivation
Deceleration
Electric delay lines
Plasmas
Silicon wafers
Encapsulation
Quartz

Chemical Compounds

Silicon
Etching
MEMS
Resonators
Single crystals
Aspect ratio
Micromechanical resonators
Inductively coupled plasma
Oxides
Hydrofluoric Acid
Stiction
Phase noise
Aluminum corrosion
Vapors
Spurious signal noise
Vacuum
Wet etching
Quartz
Atomic layer deposition
Reactive ion etching
Insulated gate bipolar transistors (IGBT)
Silicon oxides
Passivation
Deceleration
Electric delay lines
Aluminum
Low pressure chemical vapor deposition
Silicon wafers
Encapsulation