Jyrki Kiihamäki

Jyrki Kiihamäki

D. Sc., Co-Creation Manager

 https://orcid.org/0000-0002-1403-942X
  • Phone+358405069276
1991 …2019

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  • 2010

    Low-Temperature Processes for MEMS Device Fabrication

    Kiihamäki, J. (Corresponding author), Kattelus, H., Blomberg, M., Puurunen, R., Laamanen, M., Pekko, P., Saarilahti, J., Ritala, H. & Rissanen, A., 2010, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Gusev, E., Garfunkel, E. & Dideikin, A. (eds.). Springer, p. 167-178 (NATO Science for Peace and Security Series B: Physics and Biophysics).

    Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review

    7 Citations (Scopus)