Jyrki Kiihamäki

Research output

Research output per year 1991 1999 2000 2002 2003 2004 2005 2019

• 33 Conference article in proceedings
• 23 Article
• 8 Conference abstract in proceedings
• 6 Patent
• 8 More
  • 3 Conference Poster
  • 2 Conference article
  • 1 Chapter or book article
  • 1 Conference Abstract
  • 1 Dissertation

Research output per year

Research output per year

Search results

• 2015

  Mechanical property mapping of ALD thin films

  Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., Julin, J., Kilpi, L., Laitinen, M., Liu, X., Lyytinen, J., Malm, J., Pyymaki-Perros, A., Rontu, V., Sintonen, S., Ylivaara, O., Sajavaara, T., Lipsanen, H., Franssila, S. & Koskinen, J. & 3 others, Ronkainen, H., Hannula, S.-P. & Kiihamäki, J., 2015, Technical Program & Abstracts. American Vacuum Society (AVS)

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
• 2012

  Stress in atomic layer deposited aluminium oxide and titanium dioxide thin films

  Ylivaara, O. (Corresponding author), Puurunen, R. L., Laitinen, M., Sintonen, S., Ali, S., Sajavaara, T., Lipsanen, H. & Kiihamäki, J., 2012, Technical Program and Abstracts. American Vacuum Society (AVS)

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

  • Aluminum Oxide 100%
  • Atomic Layer Deposited 100%
  • Titanium Aluminum Alloy 100%
  • Titanium Dioxide Thin Film 100%
  • layers 100%
• 2003

  Active post-processing method to increase the electro-mechanical coupling in microresonators

  Koskenvuori, M., Rantakari, P., Väisäsvaara, J., Tittonen, I., Mattila, T., Oja, A., Kaajakari, V., Seppä, H., Kattelus, H. & Kiihamäki, J., 2003, Eurosensors XVII Book of Abstracts. p. 675-676

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

  Open Access
• 2002

  Enhancing the electromechanical coupling in bulk acoustic mode microresonator

  Lamminmäki, T., Koskenvuori, M., Rantakari, P., Tittonen, I., Oja, A., Mattila, T., Seppä, H., Kiihamäki, J. & Kattelus, H., 2002, Eurosensors XVI Book of Abstracts. Czech Technical University, Vol. Part 2. p. 383-384

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

• Micromechanical acoustic emission sensor

  Sillanpää, T., Pekko, P., Oja, A., Heikkinen, M., Kiihamäki, J., Halme, J. & Seppä, H., 2002, Eurosensors XVI Book of Abstracts. Czech Technical University, Vol. Part 1. p. 205-206

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

• Nonlinerar effects in bulk acoustic mode microresonators

  Oja, A., Mattila, T., Seppä, H., Kiihamäki, J., Kattelus, H., Lamminmäki, T., Koskenvuori, M., Rantakari, P. & Tittonen, I., 2002, Eurosensors XVI Book of Abstracts. Czech Technical University, Vol. Part 2. p. 381-382

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
• 1999

  Sensors, components and miniaturized devices from single-crystal silicon

  Sillanpää, T., Seppä, H., Graeffe, J., Oja, A., Saari, H., Suhonen, M., Kiihamäki, J. & Lehto, A., 1999, Proceedings of the XXXIII Annual Conference of the Finnish Physical Society: Abstracts. Laine, E. & Lindberg, M. (eds.). University of Turku, p. 8.25 (University of Turku: Department of Physical Sciences. Report L; No. 28).

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
• 1994

  Fabrication of narrow aluminium patterns by i-line optical lithography

  Kiihamäki, J. & Leinonen, K., 1994, 16th Nordic Semiconductor Meeting: Abstracts. Gislason, H. P., Gudmundsson, V. & Xander, G. (eds.). Reykjavík: University of Iceland, p. 76

  Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific