Jyrki Kiihamäki

Kaajakari, V. (Corresponding Author), Kiihamäki, J., Oja, A., Pietikäinen, S., Kokkala, V. & Kuisma, H., 2006, In: Sensors and Actuators A: Physical. 130-131, p. 42-47 6 p.

Research output: Contribution to journal › Article › Scientific › peer-review

45 Citations (Scopus)

2005

Imaging of in- and out-of-plane vibrations in micromechanical resonator

Holmgren, O. (Corresponding Author), Kokkonen, K., Mattila, T., Kaajakari, V., Oja, A., Kiihamäki, J., Knuuttila, J. V. & Salomaa, M. M., 2005, In: Electronics Letters. 41, 3, p. 121 - 122 2 p.

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

2004

Electrical and mechanical properties of micromachined vacuum cavities

Kiihamäki, J. (Corresponding Author), Ronkainen, H., Häärä, A. & Mattila, T., 2004, In: Physica Scripta. T114, p. 195 - 198 4 p.

Research output: Contribution to journal › Article › Scientific › peer-review

5 Citations (Scopus)

HV NMOS transistor for IC/MEMS integration on SOI

Jansson, R. (Corresponding Author), Ronkainen, H., Kiihamäki, J. & Mellin, J., 2004, In: Physica Scripta. T114, p. 110 - 112 3 p.

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

Long-term stability of single-crystal silicon microresonators

Koskenvuori, M. (Corresponding Author), Mattila, T., Häärä, A., Kiihamäki, J., Tittonen, I., Oja, A. & Seppä, H., 2004, In: Sensors and Actuators A: Physical. 115, 1, p. 23 - 27 5 p.

Research output: Contribution to journal › Article › Scientific › peer-review

40 Citations (Scopus)

"Plug-up": A new concept for fabricating SOI MEMS devices

Kiihamäki, J. (Corresponding Author), Dekker, J., Pekko, P., Kattelus, H., Sillanpää, T. & Mattila, T., 2004, In: Microsystem Technologies. 10, 5, p. 346 - 350 5 p.

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (Scopus)

Silicon micromechanical resonators for RF-Applications

Mattila, T., Kaajakari, V., Kiihamäki, J., Oja, A., Kattelus, H., Seppä, H., Koskenvuori, M., Rantakari, P. & Tittonen, I., 2004, In: Physica Scripta. T114, p. 181 - 183 3 p.

Research output: Contribution to journal › Article › Scientific › peer-review

9 Citations (Scopus)

Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

Kaajakari, V., Mattila, T., Oja, A., Kiihamäki, J. & Seppä, H., 2004, In: IEEE Electron Device Letters. 25, 4, p. 173 - 175 3 p.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

168 Citations (Scopus)

2002

14 MHz micromechanical oscillator

Mattila, T. (Corresponding Author), Jaakkola, O., Kiihamäki, J., Karttunen, J., Lamminmäki, T., Rantakari, P., Oja, A., Seppä, H., Kattelus, H. & Tittonen, I., 2002, In: Sensors and Actuators A: Physical. 97-98, p. 497-502

Research output: Contribution to journal › Article › Scientific › peer-review

44 Citations (Scopus)

A 12 MHz micromechanical bulk acoustic mode oscillator

Mattila, T. (Corresponding Author), Kiihamäki, J., Lamminmäki, T., Jaakkola, O., Rantakari, P., Oja, A., Seppä, H., Kattelus, H. & Tittonen, I., 2002, In: Sensors and Actuators A: Physical. 101, 1-2, p. 1-9

Research output: Contribution to journal › Article › Scientific › peer-review

132 Citations (Scopus)

Measurement of oxide etch rate of SOI structure using near IR microscopy

Kiihamäki, J., 2002, In: Physica Scripta. 2002, T101, p. 185-187

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

Nanosåll nytt hjälpmedel inom mikromekaniken

Kattelus, H., Saarilahti, J., Kiihamäki, J. & Gyllenberg, U., 2002, In: Elektronik i Norden. 19, del 2/40.

Research output: Contribution to journal › Article › Professional

2000

Deceleration of silicon etch rate at high aspect ratios

Kiihamäki, J., 2000, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 18, 4, p. 1385 - 1389 5 p.

Research output: Contribution to journal › Article › Scientific › peer-review

32 Citations (Scopus)

Depth and profile control in plasma etched MEMS structures

Kiihamäki, J. (Corresponding Author), Kattelus, H., Karttunen, J. & Franssila, S., 2000, In: Sensors and Actuators A: Physical. 82, 1-3, p. 234 - 238 5 p.

Research output: Contribution to journal › Article › Scientific › peer-review