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Jyrki Kiihamäki

1991 …2019
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Research Output 1991 2019

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Article
2012
9 Citations (Scopus)

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.

Research output: Contribution to journalArticleScientificpeer-review

stiction
Stiction
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems
2011
4 Citations (Scopus)

Correlation between film properties and anhydrous HF vapor etching behavior of silicon oxide deposited by CVD methods

Ritala, H., Kiihamäki, J. & Puukilainen, E., 2011, In : Journal of the Electrochemical Society. 158, 6, p. D399-D402 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Silicon oxides
Chemical vapor deposition
Etching
Vapors
Oxides
2010
8 Citations (Scopus)

Studies on aluminium corrosion during and after HF vapour treatment

Ritala, H., Kiihamäki, J. & Heikkilä, M., 2010, In : Microelectronic Engineering. 87, 3, p. 501-504 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Aluminum corrosion
Hydrofluoric Acid
Hydrofluoric acid
hydrofluoric acid
Oxides
2009
2 Citations (Scopus)

Etching of Sacrificial CVD Silicon Dioxide with Anhydrous HF Vapor

Ritala, H. & Kiihamäki, J., 2009, In : ECS Transactions. 25, 5, p. 351-358 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Chemical vapor deposition
Etching
Vapors
Silica
Low pressure chemical vapor deposition
2006
6 Citations (Scopus)

Microelectromechanical delay lines with slow signal propagation

Alastalo, A. T., Kiihamäki, J. & Seppä, H., 4 Aug 2006, In : Journal of Micromechanics and Microengineering. 16, 9, p. 1854-1860

Research output: Contribution to journalArticleScientificpeer-review

Electric delay lines
Resonators
32 Citations (Scopus)

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Kaajakari, V., Kiihamäki, J., Oja, A., Pietikäinen, S., Kokkala, V. & Kuisma, H., 2006, In : Sensors and Actuators A: Physical. 130-131, p. 42-47 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Silicon
Resonators
resonators
Single crystals
wafers
2005
17 Citations (Scopus)

Imaging of in- and out-of-plane vibrations in micromechanical resonator

Holmgren, O., Kokkonen, K., Mattila, T., Kaajakari, V., Oja, A., Kiihamäki, J., Knuuttila, J. V. & Salomaa, M. M., 2005, In : Electronics Letters. 41, 3, p. 121 - 122 2 p.

Research output: Contribution to journalArticleScientificpeer-review

Micromechanical resonators
Resonators
Imaging techniques
Michelson interferometers
Interferometers
2004
4 Citations (Scopus)

Electrical and mechanical properties of micromachined vacuum cavities

Kiihamäki, J., Ronkainen, H., Häärä, A. & Mattila, T., 2004, In : Physica Scripta. T114, p. 195 - 198 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Electrical Properties
Silicon-on-insulator
Mechanical Properties
Vacuum
Cavity
1 Citation (Scopus)

HV NMOS transistor for IC/MEMS integration on SOI

Jansson, R., Ronkainen, H., Kiihamäki, J. & Mellin, J., 2004, In : Physica Scripta. T114, p. 110 - 112 3 p.

Research output: Contribution to journalArticleScientificpeer-review

SOI (semiconductors)
Micro-electro-mechanical Systems
microelectromechanical systems
transistors
Wafer
37 Citations (Scopus)

Long-term stability of single-crystal silicon microresonators

Koskenvuori, M., Mattila, T., Häärä, A., Kiihamäki, J., Tittonen, I., Oja, A. & Seppä, H., 2004, In : Sensors and Actuators A: Physical. 115, 1, p. 23 - 27 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Silicon
Single crystals
single crystals
silicon
humidity
10 Citations (Scopus)

"Plug-up": A new concept for fabricating SOI MEMS devices

Kiihamäki, J., Dekker, J., Pekko, P., Kattelus, H., Sillanpää, T. & Mattila, T., 2004, In : Microsystem Technologies. 10, 5, p. 346 - 350 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Silicon
plugs
microelectromechanical systems
MEMS
insulators
6 Citations (Scopus)

Silicon micromechanical resonators for RF-Applications

Mattila, T., Kaajakari, V., Kiihamäki, J., Oja, A., Kattelus, H., Seppä, H., Koskenvuori, M., Rantakari, P. & Tittonen, I., 2004, In : Physica Scripta. T114, p. 181 - 183 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Microresonators
Phase Noise
wireless communication
Resonator
quartz crystals
150 Citations (Scopus)

Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

Kaajakari, V., Mattila, T., Oja, A., Kiihamäki, J. & Seppä, H., 2004, In : IEEE Electron Device Letters. 25, 4, p. 173 - 175 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Micromechanical resonators
Silicon
Phase noise
Resonators
Single crystals
2002
41 Citations (Scopus)

14 MHz micromechanical oscillator

Mattila, T., Jaakkola, O., Kiihamäki, J., Karttunen, J., Lamminmäki, T., Rantakari, P., Oja, A., Seppä, H., Kattelus, H. & Tittonen, I., 2002, In : Sensors and Actuators A: Physical. 97-98, p. 497-502

Research output: Contribution to journalArticleScientificpeer-review

Spurious signal noise
Quartz
Silicon
Resonators
oscillators
123 Citations (Scopus)

A 12 MHz micromechanical bulk acoustic mode oscillator

Mattila, T., Kiihamäki, J., Lamminmäki, T., Jaakkola, O., Rantakari, P., Oja, A., Seppä, H., Kattelus, H. & Tittonen, I., 2002, In : Sensors and Actuators A: Physical. 101, 1-2, p. 1-9

Research output: Contribution to journalArticleScientificpeer-review

Silicon
Micromechanical resonators
oscillators
acoustics
Micromechanics
1 Citation (Scopus)

Measurement of oxide etch rate of SOI structure using near IR microscopy

Kiihamäki, J., 2002, In : Physica Scripta. 2002, T101, p. 185-187

Research output: Contribution to journalArticleScientificpeer-review

Silicon-on-insulator
Microscopy
Oxides
insulators
microscopy

Nanosåll nytt hjälpmedel inom mikromekaniken

Kattelus, H., Saarilahti, J., Kiihamäki, J. & Gyllenberg, U., 2002, In : Elektronik i Norden. 19, del 2/40.

Research output: Contribution to journalArticleProfessional

2000
28 Citations (Scopus)

Deceleration of silicon etch rate at high aspect ratios

Kiihamäki, J., 2000, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 18, 4, p. 1385 - 1389 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Deceleration
Silicon
deceleration
high aspect ratio
Aspect ratio
23 Citations (Scopus)

Depth and profile control in plasma etched MEMS structures

Kiihamäki, J., Kattelus, H., Karttunen, J. & Franssila, S., 2000, In : Sensors and Actuators A: Physical. 82, 1-3, p. 234 - 238 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Wet etching
microelectromechanical systems
MEMS
etching
Plasmas
21 Citations (Scopus)

Etching through silicon wafer in inductively coupled plasma

Franssila, S., Kiihamäki, J. & Karttunen, J., 2000, In : Microsystem Technologies. 6, 4, p. 141 - 144 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Inductively coupled plasma
Silicon wafers
Aspect ratio
Etching
etching
1999
8 Citations (Scopus)

Deep silicon etching in inductively coupled plasma reactor for mems

Kiihamäki, J. & Franssila, S., 1999, In : Physica Scripta. T79, p. 250-254 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Etching
Ratio-dependent
Reactor
Silicon
Plasma
79 Citations (Scopus)

Pattern shape effects and artefacts in deep silicon etching

Kiihamäki, J. & Franssila, S., 1999, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 17, 4, p. 2280-2285 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Silicon
artifacts
Aspect ratio
Etching
etching
1991
4 Citations (Scopus)

The Kirk effect in the LIGBT devices

Eränen, S., Grönlund, M., Blomberg, M. & Kiihamäki, J., 1991, In : IEEE Transactions on Electron Devices. 38, 8, p. 1919 - 1924 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Insulated gate bipolar transistors (IGBT)
Circuit simulation
Current voltage characteristics
Anodes
Cathodes