Jyrki Kiihamäki

Jyrki Kiihamäki

D. Sc., Co-Creation Manager

 https://orcid.org/0000-0002-1403-942X
  • Phone+358405069276
1991 …2019

Research activity per year

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  • 2013

    Micromechanical resonator array and method for manufacturing thereof

    Jaakkola, A. (Inventor), Pensala, T. (Inventor) & Kiihamäki, J. (Inventor), 19 Jun 2013, IPC No. H03H 9/ 50 A I, Patent No. EP2603975, Priority date 11 Aug 2011, Priority No. WO2011FI50711

    Research output: Patent › Patent

  • Novel micromechanical device

    Kiihamäki, J. (Inventor), Pensala, T. (Inventor), Jaakkola, A. (Inventor), Ganchenkova, M. (Inventor) & Prunnila, M. (Inventor), 25 Dec 2013, IPC No. H03H 9/ 24 A N, Patent No. EP2676366, Priority date 17 Feb 2012, Priority No. WO2012FI50157

    Research output: Patent › Patent

  • 2012

    Microneedle

    Gao, F. (Inventor), Kiihamäki, J. (Inventor), Hokkanen, A. (Inventor) & Heimala, P. (Inventor), 8 Mar 2012, IPC No. C23F 1/02, Patent No. US2012058506 A1, 20 Apr 2010, Priority date 20 Apr 2010, Priority No. WO2010FI50318

    Research output: Patent › Patent application

  • Microneedle

    Gao, F. (Inventor), Hokkanen, A. (Inventor), Kiihamäki, J. (Inventor) & Heimala, P. (Inventor), 29 Feb 2012, IPC No. B81B 1/ 00 A I, Patent No. EP2421596, Priority date 20 Apr 2010, Priority No. WO2010FI50318

    Research output: Patent › Patent

  • 2009

    Method for manufacturing micromechanical components

    Kiihamaki, J. (Inventor) & Kattelus, H. (Inventor), 20 Aug 2009, IPC No. H01L 21/ 306 A I, Patent No. US2009206423, Priority date 2 Jun 2006, Priority No. WO2006FI00174

    Research output: Patent › Patent

  • 2004

    Method for forming a cavity structure on soi substrate and cavity structure formed on soi substrate

    Kiihamaeki, J. (Inventor), 30 Jun 2004, IPC No. H01L 27/ 12 A I, Patent No. EP1433199, Priority date 27 Sept 2002, Priority No. WO2002FI00772

    Research output: Patent › Patent