No photo of Jyrki Kiihamäki

Jyrki Kiihamäki

1991 …2019
If you made any changes in Pure these will be visible here soon.

Research Output 1991 2019

Filter
Dissertation
2005

Fabrication of SOI micromechanical devices: Dissertation

Kiihamäki, J., 2005, Espoo: VTT Technical Research Centre of Finland. 121 p.

Research output: ThesisDissertationCollection of Articles

Open Access
Fabrication
Silicon
Etching
Micromechanics
Integrated circuits