Kestutis Grigoras


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Personal profile

Research interests

Current fields of interest cover several areas of micro- and nanofabrication: atomic layer deposition, electron microscopy, energy storage (supercapacitors), thermal sensors, superconducting layers, formation and application of porous silicon.

Education/Academic qualification

Physical sciences, Doctorate, Semiconductor Physics Institute


  • QC Physics
  • ALD, porous silicon, supercapacitors

Fingerprint Dive into the research topics where Kestutis Grigoras is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 5 Similar Profiles
electrochemical capacitors Physics & Astronomy
Silicon Chemical Compounds
Porous silicon Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
porous silicon Physics & Astronomy
Atomic layer deposition Chemical Compounds
silicon Physics & Astronomy
microelectromechanical systems Physics & Astronomy

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Projects 2012 2017

Research Output 2012 2019

Fast and sensitive thermoelectric bolometers based on silicon nanomembranes

Varpula, A., Tappura, K., Tiira, J., Grigoras, K., Viherkanto, K., Ahopelto, J. & Prunnila, M., 2019.

Research output: Contribution to conferenceOther conference contributionScientific

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Electric Impedance

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers , 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Phonon scattering

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Open Access
2 Citations (Scopus)

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticleScientificpeer-review