20122019
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Personal profile

Research interests

Current fields of interest cover several areas of micro- and nanofabrication: atomic layer deposition, electron microscopy, energy storage (supercapacitors), thermal sensors, superconducting layers, formation and application of porous silicon.

Education/Academic qualification

Physical sciences, Doctorate, Semiconductor Physics Institute

Keywords

  • QC Physics
  • ALD, porous silicon, supercapacitors

Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 5 Similar Profiles
electrochemical capacitors Physics & Astronomy
Silicon Chemical Compounds
Porous silicon Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
porous silicon Physics & Astronomy
Atomic layer deposition Chemical Compounds
silicon Physics & Astronomy
microelectromechanical systems Physics & Astronomy

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Projects 2012 2017

Research Output 2012 2019

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
Microelectrodes
Electrodes
Electric Impedance
Noise
Neurons

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. Institute of Electrical and Electronic Engineers IEEE, 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

Silicon
membranes
Detectors
Membranes
Phonon scattering

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018, Front. Cell. Neurosci. Conference Abstract: MEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays. Frontiers Media, (Frontiers in Cellular Neuroscience ).

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Open Access
2 Citations (Scopus)

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticleResearchpeer-review

platforms
Glass
glass
sensors
Sensors

Porous silicon supercapacitors

Grigoras, K., Ahopelto, J. & Prunnila, M., 4 Jul 2018, Handbook of Porous Silicon: Second Edition. Canham, L. (ed.). 2 ed. Springer, p. 1517-1529 13 p.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleResearchpeer-review

Porous silicon
electrochemical capacitors
Silicon
porous silicon
Electrodes