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  • 2 Similar Profiles
electrochemical capacitors Physics & Astronomy
Porous silicon Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
Silicon Chemical Compounds
porous silicon Physics & Astronomy
Atomic layer deposition Chemical Compounds
microelectromechanical systems Physics & Astronomy
silicon Physics & Astronomy

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Projects 2012 2017

ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition

Ylivaara, O., Ahopelto, J., Puurunen, R. L. & Grigoras, K.


Project: ResearchFinnish Academy of Sciences Project

Research Output 2012 2018

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018, Front. Cell. Neurosci. Conference Abstract: MEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays. Frontiers Media, (Frontiers in Cellular Neuroscience ).

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Open Access
1 Citations

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticleResearchpeer-review


Porous silicon supercapacitors

Grigoras, K., Ahopelto, J. & Prunnila, M., 4 Jul 2018, Handbook of Porous Silicon: Second Edition. Canham, L. (ed.). 2 ed. Springer, p. 1517-1529 13 p.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleResearchpeer-review

Porous silicon
electrochemical capacitors
porous silicon

Rapid Thermal Characterization of Materials with Ultra-High Resolution of Droplet Size Specimens using the Three-Omega Method

Grosse, C., Ras, M. A., Grigoras, K., May, D., Varpula, A., Elabshihy, K., Wunderle, B. & Prunnila, M., 24 Jul 2018, Proceedings of the 17th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2018. Institute of Electrical and Electronic Engineers IEEE, p. 562-566 5 p. 8419617

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

Thermal conductivity
Hot Temperature
Atomic layer deposition
Thermal diffusivity

Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Grigoras, K., Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In : Proceedings. 2, 13, 5 p., 883.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
Porous silicon