INIS
silicon
100%
layers
62%
supercapacitors
55%
porous materials
47%
devices
45%
electrodes
38%
deposition
37%
tin
26%
thermal conductivity
24%
performance
24%
applications
19%
sensors
19%
membranes
16%
titanium nitrides
16%
surfaces
16%
qubits
16%
liquids
15%
bolometers
15%
coatings
15%
fabrication
15%
volume
13%
capacitance
13%
solids
13%
nanostructures
13%
films
13%
glass
13%
substrates
12%
size
12%
dynamics
11%
operation
11%
noise
11%
comparative evaluations
10%
Keyphrases
Porous Silicon
45%
Atomic Layer Deposition
39%
Supercapacitor
30%
Omega-3
23%
Thermoelectric
20%
Thermal Characterization
19%
Thermal Conductivity
18%
Silicon Electrode
14%
High Performance
13%
Qubit
13%
Titanium Nitride
12%
Silicon Membrane
12%
Solid Samples
12%
Bolometer
11%
On-chip Supercapacitors
11%
Liquid Sample
11%
Energy Density
10%
Engineering
Thermal Conductivity
26%
Atomic Layer Deposition
24%
Thermal Characterization
23%
Thermoelectricity
19%
Microelectromechanical System
18%
Electrochemical Capacitor
17%
Porous Silicon
12%