Kestutis Grigoras

2024

Ferroelectric Hf_0.5Zr_0.5O₂ for Analog Memory and In-Memory Computing Applications Down to Deep Cryogenic Temperatures

Bohuslavskyi, H., Grigoras, K., Ribeiro, M., Prunnila, M. & Majumdar, S., Jul 2024, In: Advanced Electronic Materials. 10, 7, 13 p., 2300879.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

5 Citations (Scopus)

2023

Author Correction: Transmon qubit readout fidelity at the threshold for quantum error correction without a quantum-limited amplifier (npj Quantum Information, (2023), 9, 1, (26), 10.1038/s41534-023-00689-6)

Chen, L., Li, H. X., Lu, Y., Warren, C. W., Križan, C. J., Kosen, S., Rommel, M., Ahmed, S., Osman, A., Biznárová, J., Fadavi Roudsari, A., Lienhard, B., Caputo, M., Grigoras, K., Grönberg, L., Govenius, J., Kockum, A. F., Delsing, P., Bylander, J. & Tancredi, G., 13 Apr 2023, In: NPJ Quantum Information. 9, 1, 1 p., 37.

Research output: Contribution to journal › Article › Scientific

Open Access

1 Citation (Scopus)

Experimentally Verified, Fast Analytic and Numerical Design of Superconducting Resonators in Flip-Chip Architectures

Li, H. X., Shiri, D., Kosen, S., Rommel, M., Chayanun, L., Nylander, A., Rehammar, R., Tancredi, G., Caputo, M., Grigoras, K., Gronberg, L., Govenius, J. & Bylander, J., 7 Aug 2023, In: IEEE Transactions on Quantum Engineering. 4, 12 p., 3101312.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

3 Citations (Scopus)

Thermal Transport in Nanoelectronic Devices Cooled by On-Chip Magnetic Refrigeration

Autti, S., Bettsworth, F. C., Grigoras, K., Gunnarsson, D., Haley, R. P., Jones, A. T., Pashkin, Y. A., Prance, J. R., Prunnila, M., Thompson, M. D. & Zmeev, D. E., 18 Aug 2023, In: Physical Review Letters. 131, 7, 077001.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

3 Citations (Scopus)

Transmon qubit readout fidelity at the threshold for quantum error correction without a quantum-limited amplifier

Chen, L., Li, H. X., Lu, Y., Warren, C. W., Križan, C. J., Kosen, S., Rommel, M., Ahmed, S., Osman, A., Biznárová, J., Fadavi Roudsari, A., Lienhard, B., Caputo, M., Grigoras, K., Grönberg, L., Govenius, J., Kockum, A. F., Delsing, P., Bylander, J. & Tancredi, G., Mar 2023, In: NPJ Quantum Information. 9, 1, 7 p., 26.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

38 Citations (Scopus)

2022

Building blocks of a flip-chip integrated superconducting quantum processor

Kosen, S. (Corresponding Author), Li, H. X., Rommel, M., Shiri, D., Warren, C., Grönberg, L., Salonen, J., Abad, T., Biznárová, J., Caputo, M., Chen, L., Grigoras, K., Johansson, G., Kockum, A. F., Križan, C., Lozano, D. P., Norris, G. J., Osman, A., Fernández-Pendás, J. & Ronzani, A. & 7 others, Roudsari, A. F., Simbierowicz, S., Tancredi, G., Wallraff, A., Eichler, C., Govenius, J. & Bylander, J., Jun 2022, In: Quantum Science and Technology. 7, 3, 035018.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

53 Citations (Scopus)

Microkelvin electronics on a pulse-tube cryostat with a gate Coulomb-blockade thermometer

Samani, M., Scheller, C. P., Sedeh, O. S., Zumbühl, D. M., Yurttagül, N., Grigoras, K., Gunnarsson, D., Prunnila, M., Jones, A. T., Prance, J. R. & Haley, R. P., Jul 2022, In: Physical review research. 4, 3, 033225.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

5 Citations (Scopus)

Qubit-Compatible Substrates With Superconducting Through-Silicon Vias

Grigoras, K., Yurttagul, N., Kaikkonen, J.-P., Mannila, E. T. (Corresponding Author), Eskelinen, P., Lozano, D. P., Li, H.-X., Rommel, M., Shiri, D., Tiencken, N., Simbierowicz, S., Ronzani, A., Hätinen, J., Datta, D., Vesterinen, V., Grönberg, L., Biznarova, J., Roudsari, A. F., Kosen, S. & Osman, A. & 4 others, Prunnila, M., Hassel, J., Bylander, J. & Govenius, J., 2022, In: IEEE Transactions on Quantum Engineering. 3, 11 p., 5100310.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

11 Citations (Scopus)

2021

Nano-thermoelectric infrared bolometers

Varpula, A. (Corresponding Author), Tappura, K., Tiira, J., Grigoras, K., Kilpi, O. P., Sovanto, K., Ahopelto, J. & Prunnila, M. (Corresponding Author), Mar 2021, In: APL Photonics. 6, 3, 036111.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

File

26 Citations (Scopus)

281 Downloads (Pure)

2020

High-performance infrared thermoelectric bolometers based on nanomembranes

Varpula, A., Tappura, K., Tiira, J., Grigoras, K., Viherkanto, K., Ahopelto, J. & Prunnila, M., 26 Feb 2020, Photonic and Phononic Properties of Engineered Nanostructures X. Adibi, A., Lin, S.-Y. & Scherer, A. (eds.). International Society for Optics and Photonics SPIE, 112891O. (Proceedings of SPIE, Vol. 11289).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Open Access

File

3 Citations (Scopus)

167 Downloads (Pure)

Properties of nanocrystalline silicon probed by optomechanics

Navarro-Urrios, D. (Corresponding Author), Colombano, M. F., Maire, J., Chávez-Ángel, E., Arregui, G., Capuj, N. E., Devos, A., Griol, A., Bellieres, L., Martínez, A., Grigoras, K., Häkkinen, T., Saarilahti, J., Makkonen, T., Sotomayor-Torres, C. M. & Ahopelto, J., Nov 2020, In: Nanophotonics. 9, 16, p. 4819-4829

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

File

4 Citations (Scopus)

103 Downloads (Pure)

2019

Fast and sensitive thermoelectric bolometers based on silicon nanomembranes

Varpula, A., Tappura, K., Tiira, J., Grigoras, K., Viherkanto, K., Ahopelto, J. & Prunnila, M., 2019.

Research output: Contribution to conference › Other conference contribution › Scientific

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T. (Corresponding Author), Pelkonen, A., Grigoras, K. (Corresponding Author), Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In: Frontiers in Neuroscience. 13, p. 226 226.

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

16 Citations (Scopus)

Superconducting TiN through-silicon-vias for quantum technology

Grigoras, K. (Corresponding author), Simbierowicz, S., Grönberg, L., Govenius, J., Vesterinen, V., Prunnila, M. & Hassel, J., Dec 2019, 2019 IEEE 21st Electronics Packaging Technology Conference, EPTC 2019. IEEE Institute of Electrical and Electronic Engineers, p. 81-82

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

7 Citations (Scopus)

Thermoelectric device

Prunnila, M. (Inventor), Ahopelto, J. (Inventor), Timofeev, A. (Inventor), Grigoras, K. (Inventor) & Shchepetov, A. (Inventor), 10 Jan 2019, IPC No. H01L 35/ 22 A I, Patent No. US2019013455, Priority date 3 Mar 2017, Priority No. WO2017FI50142

Research output: Patent › Patent

2018

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T. (Corresponding author), Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

Open Access

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C. (Corresponding Author), Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P.-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In: Sensors and Actuators A: Physical. 278, p. 33-42

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

Mirror plate for a fabry-perot interferometer and a fabry-perot interferometer

Varpula, A. (Inventor), Prunnila, M. (Inventor) & Grigoras, K. (Inventor), 17 Jan 2018, IPC No. G02B 26/ 00 A I, Patent No. EP3268708, Priority date 8 Mar 2016, Priority No. WO2016FI50139

Research output: Patent › Patent

Porous silicon supercapacitors

Grigoras, K., Ahopelto, J. & Prunnila, M., 4 Jul 2018, Handbook of Porous Silicon: Second Edition. Canham, L. (ed.). 2 ed. Springer, p. 1517-1529 13 p.

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

3 Citations (Scopus)

Rapid Thermal Characterization of Materials with Ultra-High Resolution of Droplet Size Specimens using the Three-Omega Method

Grosse, C., Ras, M. A., Grigoras, K., May, D., Varpula, A., Elabshihy, K., Wunderle, B. & Prunnila, M., 24 Jul 2018, Proceedings of the 17th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2018. IEEE Institute of Electrical and Electronic Engineers, p. 562-566 5 p. 8419617

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Grigoras, K. (Corresponding Author), Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In: Proceedings. 2, 13, 5 p., 883.

Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

Open Access

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Varpula, A. (Corresponding Author), Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J. & Prunnila, M., 6 Dec 2018, In: Proceedings. 2, 5 p.

Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

Open Access

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J. (Corresponding author), 2 Jul 2018, 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers, 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Silicon nano-thermoelectric detectors for for sensing and instrumentation applications

Varpula, A. (Corresponding author), Renahy, D., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J., Gomès, S. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI : Eurotherm seminar No 111. 192

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Thermal characterization of liquid and solid samples using a measurement platform for the bidirectional 3-omega method

Grosse, C. (Corresponding author), Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI: Eurotherm seminar No 111 . 197

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Thermal characterization of thermal interface materials using the three-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M. & Wunderle, B., 2018, 2018 7th Electronic System-Integration Technology Conference (ESTC). IEEE Institute of Electrical and Electronic Engineers, 8546370

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

2 Citations (Scopus)

2017

A blank suitable for use as a body of a supercapacitor, a supercapacitor, and a method of manufacturing a porous silicon volume

Ahopelto, J. (Inventor), Kestutis, G. (Inventor), Grönberg, L. (Inventor) & Prunnila, M. (Inventor), 23 Aug 2017, IPC No. H01G 11/ 74 A I, Patent No. EP3207553, Priority date 14 Oct 2015, Priority No. WO2015FI50692

Research output: Patent › Patent

Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M., Wunderle, B. & Gomès, S., 21 Dec 2017, THERMINIC 2017 - 23rd International Workshop on Thermal Investigations of ICs and Systems. IEEE Institute of Electrical and Electronic Engineers, p. 1-5 5 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

2 Citations (Scopus)

Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Grigoras, K., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Porous Silicon Supercapacitors

Grigoras, K. (Corresponding author), Ahopelto, J. & Prunnila, M., 2017, Handbook of Porous Silicon. Cham: Springer, p. 1-11

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

Review Article: Recommended reading list of early publications on atomic layer deposition: Outcome of the "Virtual Project on the History of ALD"

Ahvenniemi, E., Akbashev, A., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D., Hwang, C. S., Jen, S.-H., Kallio, T. & Kanervo, J. & 42 others, Khmelnitskiy, I., Kim, D. H., Klibanov, L., Koshtyal, Y., Krause, O., Kuhs, J., Kärkkänen, I., Kääriäinen, M.-L., Kääriäinen, T., Lamagna, L., Lapicki, A., Leskelä, M., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Mennad, A., Militzer, C., Molarius, J., Norek, M., Özgit-Akgün, Ç., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R., Rampelberg, G., Ras, R. H. A., Rauwel, E., Roozeboom, F., Sajavaara, T., Salami, H., Savin, H., Schneider, N., Seidel, T. E., Sundqvist, J., Suyatin, D., Törndahl, T., van Ommen, J. R., Wiemer, C., Ylivaara, O. & Yurkevich, O., 1 Jan 2017, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 1, 13 p., 010801.

Research output: Contribution to journal › Review Article › peer-review

Open Access

70 Citations (Scopus)

Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

Puurunen, R. L., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.

Research output: Contribution to conference › Conference article › Scientific › peer-review

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 26 Jul 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers, p. 1828-1831 7994425

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Ternary composite Si/TiN/MnO₂ taper nanorod array for on-chip supercapacitor

Lu, P., Halvorsen, E., Ohlckers, P., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X. (Corresponding Author), 10 Sept 2017, In: Electrochimica Acta. 248, p. 397-408

Research output: Contribution to journal › Article › Scientific › peer-review

34 Citations (Scopus)

Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 2017.

Research output: Contribution to conference › Conference article › Scientific

Thermoelectric bolometers based on silicon membranes

Varpula, A., Timofeev, A. V., Shchepetov, A., Grigoras, K., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, 102460L. (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 26 Jun 2017, In: Applied Physics Letters. 110, 26, 262101.

Research output: Contribution to journal › Article › Scientific › peer-review

32 Citations (Scopus)

Thin film conformality analysis with microscopic all-silicon lateral high aspect ratio structures

Puurunen, R., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.

Research output: Contribution to conference › Conference Abstract › Scientific › peer-review

2016

ALD enhanced on-chip supercapacitors

Prunnila, M., Ahopelto, J., Grönberg, L. & Grigoras, K., 2016.

Research output: Contribution to conference › Conference article › Scientific

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M. (Corresponding Author), 2016, In: Nano Energy. 26, p. 340-345

Research output: Contribution to journal › Article › Scientific › peer-review

Open Access

88 Citations (Scopus)

Highly conformal TiN by atomic layer deposition: growth and characterization

Grigoras, K. (Corresponding author), Ylivaara, O., Gao, F., Heikkilä, M. J., Mizohata, K., Prunnila, M., Räisänen, J., Ritala, M., Leskelä, M., Ahopelto, J. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society (AVS)

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Lu, P., Ohlckers, P. A., Müller, L., Leopold, S., Hoffmann, M. J. F., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 2016, In: Electrochemistry Communications. 70, p. 51-55

Research output: Contribution to journal › Article › Scientific › peer-review

49 Citations (Scopus)

On the early history of atomic layer deposition: most significant works and applications

Aarik, J., Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Chubarov, M., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Hwang, C. S., Junige, M., Kallio, T., Kanervo, J., Khmelnitskiy, I., Koshtyal, Y. & Krause, O. & 32 others, Kääriäinen, M.-L., Kääriäinen, T., Lamagna, L., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Molarius, J., Norek, M., Ozgit-Akgun, C., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Suyatin, D., Tallarida, M., Törndahl, T., Utriainen, M., van Ommen, J. R., Wächtler, T., Wiemer, C., Ylivaara, O. M. E. & Yurkevich, O., 2016.

Research output: Contribution to conference › Conference Poster › Scientific