Kestutis Grigoras

PhD

  • Phone+358401733692
20122020

Research output per year

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Research Output

2020

High-performance infrared thermoelectric bolometers based on nanomembranes

Varpula, A., Tappura, K., Tiira, J., Grigoras, K., Viherkanto, K., Ahopelto, J. & Prunnila, M., 26 Feb 2020, Photonic and Phononic Properties of Engineered Nanostructures X. Adibi, A., Lin, S-Y. & Scherer, A. (eds.). International Society for Optics and Photonics SPIE, 112891O. (Proceedings of SPIE, Vol. 11289).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Open Access
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2019

Fast and sensitive thermoelectric bolometers based on silicon nanomembranes

Varpula, A., Tappura, K., Tiira, J., Grigoras, K., Viherkanto, K., Ahopelto, J. & Prunnila, M., 2019.

Research output: Contribution to conferenceOther conference contributionScientific

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. IEEE Institute of Electrical and Electronic Engineers, 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2018

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Open Access

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Porous silicon supercapacitors

Grigoras, K., Ahopelto, J. & Prunnila, M., 4 Jul 2018, Handbook of Porous Silicon: Second Edition. Canham, L. (ed.). 2 ed. Springer, p. 1517-1529 13 p.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Rapid Thermal Characterization of Materials with Ultra-High Resolution of Droplet Size Specimens using the Three-Omega Method

Grosse, C., Ras, M. A., Grigoras, K., May, D., Varpula, A., Elabshihy, K., Wunderle, B. & Prunnila, M., 24 Jul 2018, Proceedings of the 17th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2018. IEEE Institute of Electrical and Electronic Engineers, p. 562-566 5 p. 8419617

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Grigoras, K., Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In : Proceedings. 2, 13, 5 p., 883.

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

Open Access

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Varpula, A., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J. & Prunnila, M., 6 Dec 2018, In : Proceedings. 2, 5 p.

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

Open Access

Silicon nano-thermoelectric detectors for for sensing and instrumentation applications

Varpula, A., Renahy, D., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J., Gomès, S. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI : Eurotherm seminar No 111. 192

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Thermal characterization of liquid and solid samples using a measurement platform for the bidirectional 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI: Eurotherm seminar No 111 . 197

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Thermal characterization of thermal interface materials using the three-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M. & Wunderle, B., 2018, 2018 7th Electronic System-Integration Technology Conference (ESTC). IEEE Institute of Electrical and Electronic Engineers, 8546370

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2017

Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M., Wunderle, B. & Gomès, S., 21 Dec 2017, THERMINIC 2017 - 23rd International Workshop on Thermal Investigations of ICs and Systems. IEEE Institute of Electrical and Electronic Engineers, p. 1-5 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Grigoras, K., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Porous Silicon Supercapacitors

Kestutis, G., Jouni, A. & Mika, P., 2017, Handbook of Porous Silicon: Live Reference - Constantly updated Springer.com/SpringerReference. Springer, p. 1-11

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Review Article: Recommended reading list of early publications on atomic layer deposition: Outcome of the "Virtual Project on the History of ALD"

Ahvenniemi, E., Akbashev, A., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D., Hwang, C. S., Jen, S-H., Kallio, T., Kanervo, J. & 42 others, Khmelnitskiy, I., Kim, D. H., Klibanov, L., Koshtyal, Y., Krause, O., Kuhs, J., Kärkkänen, I., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Lapicki, A., Leskelä, M., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Mennad, A., Militzer, C., Molarius, J., Norek, M., Özgit-Akgün, Ç., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R., Rampelberg, G., Ras, R. H. A., Rauwel, E., Roozeboom, F., Sajavaara, T., Salami, H., Savin, H., Schneider, N., Seidel, T. E., Sundqvist, J., Suyatin, D., Törndahl, T., van Ommen, J. R., Wiemer, C., Ylivaara, O. & Yurkevich, O., 1 Jan 2017, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 1, 010801.

Research output: Contribution to journalReview ArticleScientificpeer-review

Open Access
33 Citations (Scopus)

Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

Puurunen, R. L., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.

Research output: Contribution to conferenceConference articleScientificpeer-review

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 26 Jul 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). IEEE Institute of Electrical and Electronic Engineers, p. 1828-1831 4 p. 7994425

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Ternary composite Si/TiN/MnO2 taper nanorod array for on-chip supercapacitor

Lu, P., Halvorsen, E., Ohlckers, P., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 10 Sep 2017, In : Electrochimica Acta. 248, p. 397-408 12 p.

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)

Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 2017.

Research output: Contribution to conferenceConference articleScientific

Thermoelectric bolometers based on silicon membranes

Varpula, A., Timofeev, A. V., Shchepetov, A., Grigoras, K., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, Vol. 10246. 102460L. (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 26 Jun 2017, In : Applied Physics Letters. 110, 26, 262101.

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)

Thin film conformality analysis with microscopic all-silicon lateral high aspect ratio structures

Puurunen, R., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

2016

ALD enhanced on-chip supercapacitors

Prunnila, M., Ahopelto, J., Grönberg, L. & Grigoras, K., 2016.

Research output: Contribution to conferenceConference articleScientific

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2016, In : Nano Energy. 26, p. 340-345

Research output: Contribution to journalArticleScientificpeer-review

Open Access
51 Citations (Scopus)

Highly conformal TiN by atomic layer deposition: growth and characterization

Grigoras, K., Ylivaara, O., Gao, F., Heikkilä, M. J., Mizohata, K., Prunnila, M., Räisänen, J., Ritala, M., Leskelä, M., Ahopelto, J. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Lu, P., Ohlckers, P. A., Müller, L., Leopold, S., Hoffmann, M. J. F., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 2016, In : Electrochemistry Communications. 70, p. 51-55

Research output: Contribution to journalArticleScientificpeer-review

29 Citations (Scopus)

On the early history of atomic layer deposition: most significant works and applications

Aarik, J., Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Chubarov, M., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Hwang, C. S., Junige, M., Kallio, T., Kanervo, J., Khmelnitskiy, I., Koshtyal, Y., Krause, O. & 32 others, Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Molarius, J., Norek, M., Ozgit-Akgun, C., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Suyatin, D., Tallarida, M., Törndahl, T., Utriainen, M., van Ommen, J. R., Wächtler, T., Wiemer, C., Ylivaara, O. M. E. & Yurkevich, O., 2016.

Research output: Contribution to conferenceConference PosterScientific

Porous silicon based supercapacitors for integrated energy storages

Prunnila, M., Grönberg, L., Grigoras, K. & Ahopelto, J., 2016.

Research output: Contribution to conferenceOther conference contributionScientific

Porous silicon for energy storage at microscale: Supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2016, In : ECS Transactions. p. 97-104 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
5 Citations (Scopus)
2014

ALD coating of porous silicon

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014, BALD2014 Abstract book.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

ALD modified porous silicon electrodes for supercapacitors

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.

Research output: Contribution to conferenceConference AbstractScientific

Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Coated porous Si for high performance on-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 2014, In : Journal of Physics: Conference Series. 557, Conference 1, 4 p., 012058.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
16 Citations (Scopus)

Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

Feng, G., Grigoras, K., Arpiainen, S., Gorelick, S. & Puurunen, R., 2014.

Research output: Contribution to conferenceConference AbstractScientific

Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

Berdova, M., Grigoras, K., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., Kilpi, L., Ronkainen, H., Koskinen, J., Hæggström, E. & Franssila, S., 2014.

Research output: Contribution to conferenceConference AbstractScientific

On the early history of ALD: molecular layering

Aarik, J., Akbashev, A., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., Molarius, J. & 16 others, Ozgit-Akgun, C., Pedersen, H., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Tallarida, M., van Ommen, J. R., Wächtler, T., Wiemer, C. & Ylivaara, O., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Overview of early publications on atomic layer deposition

Aarik, J., Akbashev, A. R., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., Molarius, J. & 16 others, Ozgit-Akgun, C., Pedersen, H., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Tallarida, M., van Ommen, J. R., Wächtler, T., Wiemer, C. & Ylivaara, O., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Porous silicon electrodes for high performance integrated supercapacitors

Grigoras, K., Keskinen, J., Ahopelto, J. & Prunnila, M., 2014, Proceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014. IEEE Institute of Electrical and Electronic Engineers, 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)
2013

Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

Liu, Z., Iltanen, K., Chekurov, N., Grigoras, K. & Tittonen, I., 2013, In : Nanotechnology. 24, 17, 6 p., 175304.

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)

Characterization of thin film adhesion by MEMS shaft-loading blister testing

Berdova, M., Lyytinen, J., Grigoras, K., Baby, A., Kilpi, L., Ronkainen, H., Franssila, S. & Koskinen, J., 2013, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 31, 3, 5 p., 031102.

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)

Nanometer-thick textured ZnO films: Preparation, characterization and interaction with ethanol vapor

Naumenko, D., Snitka, V., Ulcinas, A., Naumenko, I. & Grigoras, K., 2013, In : Theoretical and Experimental Chemistry. 49, 2, p. 96-102 6 p.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Nondestructive inspection of buried channels and cavities in silicon

Kassamakov, I., Grigoras, K., Heikkinen, V., Hanhijärvi, K., Aaltonen, J., Franssila, S. & Haeggstrom, E., 2013, In : Journal of Microelectromechanical Systems. 22, 2, p. 438-442 5 p.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
2012

Non-destructive 3D measurement of microchannels

Heikkinen, V., Nolvi, A., Kassamakov, I., Grigoras, K., Franssila, S. & Hæggström, E., 2012, Proceedings of SPIE 8466: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI. Postek, M. T. (ed.). International Society for Optics and Photonics SPIE, 84660R. (Proceedings of SPIE, Vol. 8466).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

Heikkinen, V., Hanhijärvi, K., Aaltonen, J., Grigoras, K., Kassamakov, I., Franssilad, S. & Hæggströma, E., 2012, Proceedings of SPIE 8250 : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X. International Society for Optics and Photonics SPIE, 825008. (Proceedings of SPIE, Vol. 8250).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Single-walled carbon nanotube network field effect transistor as a humidity sensor

Mudimela Prasantha, R., Grigoras, K., Anoshkin, I. V., Varpula, A., Ermolov, V., Anisimov, A. S., Nasibulin, A. G., Novikov, S. & Kauppinen, E. I., 2012, In : Journal of Sensors. 2012, 7 p., 496546.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
6 Citations (Scopus)

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Hanhijärvi, H., Kassamakov, I., Heikkinen, V., Aaltonen, J., Sainiemi, L., Grigoras, K., Franssila, S. & Haeggström, E., 2012, In : Optics Letters. 37, 10, p. 1703-1705 3 p.

Research output: Contribution to journalArticleScientificpeer-review

19 Citations (Scopus)