Kestutis Grigoras

PhD

20122019
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Research Output 2012 2019

2019

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Microelectrodes
Electrodes
Electric Impedance
Noise
Neurons

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. Institute of Electrical and Electronic Engineers IEEE, 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Silicon
membranes
Detectors
Membranes
Phonon scattering
2018

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Open Access
2 Citations (Scopus)

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticleScientificpeer-review

platforms
Glass
glass
sensors
Sensors

Porous silicon supercapacitors

Grigoras, K., Ahopelto, J. & Prunnila, M., 4 Jul 2018, Handbook of Porous Silicon: Second Edition. Canham, L. (ed.). 2 ed. Springer, p. 1517-1529 13 p.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Porous silicon
electrochemical capacitors
Silicon
porous silicon
Electrodes

Rapid Thermal Characterization of Materials with Ultra-High Resolution of Droplet Size Specimens using the Three-Omega Method

Grosse, C., Ras, M. A., Grigoras, K., May, D., Varpula, A., Elabshihy, K., Wunderle, B. & Prunnila, M., 24 Jul 2018, Proceedings of the 17th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2018. Institute of Electrical and Electronic Engineers IEEE, p. 562-566 5 p. 8419617

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Thermal conductivity
Ointments
Hot Temperature
Atomic layer deposition
Thermal diffusivity

Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Grigoras, K., Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In : Proceedings. 2, 13, 5 p., 883.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Glass
Porous silicon
Sensors
Liquids
Silicon

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Varpula, A., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J. & Prunnila, M., 6 Dec 2018, In : Proceedings. 2, 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
bolometers
photometers
silicon
membranes
costs

Silicon nano-thermoelectric detectors for for sensing and instrumentation applications

Varpula, A., Renahy, D., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J., Gomès, S. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI : Eurotherm seminar No 111. 192

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

detectors
silicon
thermocouples
figure of merit
thermopiles

Thermal characterization of liquid and solid samples using a measurement platform for the bidirectional 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI: Eurotherm seminar No 111 . 197

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

platforms
liquids
thermal conductivity
passivity
chips

Thermal characterization of thermal interface materials using the three-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M. & Wunderle, B., 2018, 2018 7th Electronic System-Integration Technology Conference (ESTC). Institute of Electrical and Electronic Engineers IEEE, 8546370

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

thermal conductivity
fillers
2017

Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M., Wunderle, B. & Gomès, S., 21 Dec 2017, THERMINIC 2017 - 23rd International Workshop on Thermal Investigations of ICs and Systems. Institute of Electrical and Electronic Engineers IEEE, p. 1-5 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Material Characterization
Fabrication
Chip
Thermodynamic properties
Thermal Properties

Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Grigoras, K., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Porous Silicon
Porous silicon
electrochemical capacitors
Capacitance
porous silicon

Porous Silicon Supercapacitors

Kestutis, G., Jouni, A. & Mika, P., 2017, Handbook of Porous Silicon: Live Reference - Constantly updated Springer.com/SpringerReference. Springer, p. 1-11

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Porous silicon
Capacitors
Electrodes
Graphite
Atomic layer deposition
28 Citations (Scopus)

Review Article: Recommended reading list of early publications on atomic layer deposition: Outcome of the "Virtual Project on the History of ALD"

Ahvenniemi, E., Akbashev, A., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D., Hwang, C. S., Jen, S-H., Kallio, T., Kanervo, J. & 42 others, Khmelnitskiy, I., Kim, D. H., Klibanov, L., Koshtyal, Y., Krause, O., Kuhs, J., Kärkkänen, I., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Lapicki, A., Leskelä, M., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Mennad, A., Militzer, C., Molarius, J., Norek, M., Özgit-Akgün, Ç., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R., Rampelberg, G., Ras, R. H. A., Rauwel, E., Roozeboom, F., Sajavaara, T., Salami, H., Savin, H., Schneider, N., Seidel, T. E., Sundqvist, J., Suyatin, D., Törndahl, T., van Ommen, J. R., Wiemer, C., Ylivaara, O. & Yurkevich, O., 1 Jan 2017, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 1, 010801.

Research output: Contribution to journalReview ArticleScientificpeer-review

Open Access
Atomic layer deposition
atomic layer epitaxy
lists
histories
Atomic layer epitaxy

Silicon-based lateral-gap test structures to mimic macro- and mesoporous catalyst supports

Puurunen, R. L., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.

Research output: Contribution to conferenceConference articleScientificpeer-review

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 26 Jul 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Institute of Electrical and Electronic Engineers IEEE, p. 1828-1831 4 p. 7994425

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

grasses
electrochemical capacitors
Silicon
microelectromechanical systems
MEMS
9 Citations (Scopus)

Ternary composite Si/TiN/MnO2 taper nanorod array for on-chip supercapacitor

Lu, P., Halvorsen, E., Ohlckers, P., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 10 Sep 2017, In : Electrochimica Acta. 248, p. 397-408 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Nanorods
Silicon
Composite materials
Capacitance
Electrodes

Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 2017.

Research output: Contribution to conferenceConference articleScientific

Thermoelectric bolometers based on silicon membranes

Varpula, A., Timofeev, A. V., Shchepetov, A., Grigoras, K., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, Vol. 10246. 102460L. (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Bolometer
Bolometers
bolometers
Silicon
Membrane
13 Citations (Scopus)

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 26 Jun 2017, In : Applied Physics Letters. 110, 26, 262101.

Research output: Contribution to journalArticleScientificpeer-review

doped crystals
thermocouples
membranes
detectors
single crystals

Thin film conformality analysis with microscopic all-silicon lateral high aspect ratio structures

Puurunen, R., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

2016

ALD enhanced on-chip supercapacitors

Prunnila, M., Ahopelto, J., Grönberg, L. & Grigoras, K., 2016.

Research output: Contribution to conferenceConference articleScientific

47 Citations (Scopus)

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2016, In : Nano Energy. 26, p. 340-345

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Titanium nitride
Porous silicon
Nanostructured materials
Silicon
Energy storage

Highly conformal TiN by atomic layer deposition: growth and characterization

Grigoras, K., Ylivaara, O., Gao, F., Heikkilä, M. J., Mizohata, K., Prunnila, M., Räisänen, J., Ritala, M., Leskelä, M., Ahopelto, J. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

atomic layer epitaxy
cycles
residual stress
wafers
electrical resistivity
24 Citations (Scopus)

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Lu, P., Ohlckers, P. A., Müller, L., Leopold, S., Hoffmann, M. J. F., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 2016, In : Electrochemistry Communications. 70, p. 51-55

Research output: Contribution to journalArticleScientificpeer-review

Titanium nitride
Silicon
Nanorods
Coatings
Electrodes

On the early history of atomic layer deposition: most significant works and applications

Aarik, J., Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Chubarov, M., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Hwang, C. S., Junige, M., Kallio, T., Kanervo, J., Khmelnitskiy, I., Koshtyal, Y., Krause, O. & 32 others, Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Molarius, J., Norek, M., Ozgit-Akgun, C., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Suyatin, D., Tallarida, M., Törndahl, T., Utriainen, M., van Ommen, J. R., Wächtler, T., Wiemer, C., Ylivaara, O. M. E. & Yurkevich, O., 2016.

Research output: Contribution to conferenceConference PosterScientific

Porous silicon based supercapacitors for integrated energy storages

Prunnila, M., Grönberg, L., Grigoras, K. & Ahopelto, J., 2016.

Research output: Contribution to conferenceOther conference contributionScientific

3 Citations (Scopus)

Porous silicon for energy storage at microscale: Supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2016, In : ECS Transactions. p. 97-104 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Porous silicon
Energy storage
Capacitors
Electrodes
Supercapacitor
2014

ALD coating of porous silicon

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014, BALD2014 Abstract book.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Porous silicon
Coatings
Atomic layer deposition
Capacitance
Electrodes

ALD modified porous silicon electrodes for supercapacitors

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.

Research output: Contribution to conferenceConference AbstractScientific

Porous silicon
Electrodes
Supercapacitor

Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.

Research output: Contribution to conferenceConference PosterScientificpeer-review

titanium nitrides
electrochemical capacitors
atomic layer epitaxy
porous silicon
electrodes
15 Citations (Scopus)

Coated porous Si for high performance on-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 2014, In : Journal of Physics: Conference Series. 557, Conference 1, 4 p., 012058.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
electrochemical capacitors
chips
electrodes
radiant flux density
atomic layer epitaxy

Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

Feng, G., Grigoras, K., Arpiainen, S., Gorelick, S. & Puurunen, R., 2014.

Research output: Contribution to conferenceConference AbstractScientific

Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

Berdova, M., Grigoras, K., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., Kilpi, L., Ronkainen, H., Koskinen, J., Hæggström, E. & Franssila, S., 2014.

Research output: Contribution to conferenceConference AbstractScientific

On the early history of ALD: molecular layering

Aarik, J., Akbashev, A., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., Molarius, J. & 16 others, Ozgit-Akgun, C., Pedersen, H., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Tallarida, M., van Ommen, J. R., Wächtler, T., Wiemer, C. & Ylivaara, O., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Overview of early publications on atomic layer deposition

Aarik, J., Akbashev, A. R., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., Molarius, J. & 16 others, Ozgit-Akgun, C., Pedersen, H., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Tallarida, M., van Ommen, J. R., Wächtler, T., Wiemer, C. & Ylivaara, O., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

2 Citations (Scopus)

Porous silicon electrodes for high performance integrated supercapacitors

Grigoras, K., Keskinen, J., Ahopelto, J. & Prunnila, M., 2014, Proceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014. Institute of Electrical and Electronic Engineers IEEE, 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

electrochemical capacitors
porous silicon
electrodes
atomic layer epitaxy
high aspect ratio
2013
7 Citations (Scopus)

Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

Liu, Z., Iltanen, K., Chekurov, N., Grigoras, K. & Tittonen, I., 2013, In : Nanotechnology. 24, 17, 6 p., 175304.

Research output: Contribution to journalArticleScientificpeer-review

Wet etching
Aluminum Oxide
Focused ion beams
Masks
Silicon
12 Citations (Scopus)

Characterization of thin film adhesion by MEMS shaft-loading blister testing

Berdova, M., Lyytinen, J., Grigoras, K., Baby, A., Kilpi, L., Ronkainen, H., Franssila, S. & Koskinen, J., 2013, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 31, 3, 5 p., 031102.

Research output: Contribution to journalArticleScientificpeer-review

blisters
microelectromechanical systems
MEMS
Copper
adhesion
1 Citation (Scopus)

Nanometer-thick textured ZnO films: Preparation, characterization and interaction with ethanol vapor

Naumenko, D., Snitka, V., Ulcinas, A., Naumenko, I. & Grigoras, K., 2013, In : Theoretical and Experimental Chemistry. 49, 2, p. 96-102 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Film preparation
Surface waves
Ethanol
Vapors
Acoustic waves
4 Citations (Scopus)

Nondestructive inspection of buried channels and cavities in silicon

Kassamakov, I., Grigoras, K., Heikkinen, V., Hanhijärvi, K., Aaltonen, J., Franssila, S. & Haeggstrom, E., 2013, In : Journal of Microelectromechanical Systems. 22, 2, p. 438-442 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Microchannels
Inspection
Silicon
Microfluidics
Interferometry
2012

Non-destructive 3D measurement of microchannels

Heikkinen, V., Nolvi, A., Kassamakov, I., Grigoras, K., Franssila, S. & Hæggström, E., 2012, Proceedings of SPIE 8466: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI. Postek, M. T. (ed.). International Society for Optics and Photonics SPIE, 84660R. (Proceedings of SPIE, Vol. 8466).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microchannels
interferometers
wafers
scanning
glass
2 Citations (Scopus)

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

Heikkinen, V., Hanhijärvi, K., Aaltonen, J., Grigoras, K., Kassamakov, I., Franssilad, S. & Hæggströma, E., 2012, Proceedings of SPIE 8250 : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X. International Society for Optics and Photonics SPIE, 825008. (Proceedings of SPIE, Vol. 8250).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
interferometry
scanning
light sources
halogens
6 Citations (Scopus)

Single-walled carbon nanotube network field effect transistor as a humidity sensor

Mudimela Prasantha, R., Grigoras, K., Anoshkin, I. V., Varpula, A., Ermolov, V., Anisimov, A. S., Nasibulin, A. G., Novikov, S. & Kauppinen, E. I., 2012, In : Journal of Sensors. 2012, 7 p., 496546.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Humidity sensors
Single-walled carbon nanotubes (SWCN)
Field effect transistors
humidity
field effect transistors
18 Citations (Scopus)

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Hanhijärvi, H., Kassamakov, I., Heikkinen, V., Aaltonen, J., Sainiemi, L., Grigoras, K., Franssila, S. & Haeggström, E., 2012, In : Optics Letters. 37, 10, p. 1703-1705 3 p.

Research output: Contribution to journalArticleScientificpeer-review

microelectromechanical systems
light emitting diodes
interferometers
oscillations
frequency modulation