Kestutis Grigoras

PhD

20122019
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Research Output 2012 2019

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Conference abstract in proceedings
2018

Silicon nano-thermoelectric detectors for for sensing and instrumentation applications

Varpula, A., Renahy, D., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J., Gomès, S. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI : Eurotherm seminar No 111. 192

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

detectors
silicon
thermocouples
figure of merit
thermopiles

Thermal characterization of liquid and solid samples using a measurement platform for the bidirectional 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B. & Prunnila, M., 5 Dec 2018, Book of abstracts. Nanoscale and Microscale Heat Transfer VI: Eurotherm seminar No 111 . 197

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

platforms
liquids
thermal conductivity
passivity
chips
2016

Highly conformal TiN by atomic layer deposition: growth and characterization

Grigoras, K., Ylivaara, O., Gao, F., Heikkilä, M. J., Mizohata, K., Prunnila, M., Räisänen, J., Ritala, M., Leskelä, M., Ahopelto, J. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

atomic layer epitaxy
cycles
residual stress
wafers
electrical resistivity
2014

ALD coating of porous silicon

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014, BALD2014 Abstract book.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Porous silicon
Coatings
Atomic layer deposition
Capacitance
Electrodes

On the early history of ALD: molecular layering

Aarik, J., Akbashev, A., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., Molarius, J. & 16 others, Ozgit-Akgun, C., Pedersen, H., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Tallarida, M., van Ommen, J. R., Wächtler, T., Wiemer, C. & Ylivaara, O., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Overview of early publications on atomic layer deposition

Aarik, J., Akbashev, A. R., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., Molarius, J. & 16 others, Ozgit-Akgun, C., Pedersen, H., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Tallarida, M., van Ommen, J. R., Wächtler, T., Wiemer, C. & Ylivaara, O., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific