Research output per year
Research output per year
Research output
Search results
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2017
Thin film conformality analysis with microscopic all-silicon lateral high aspect ratio structures
Puurunen, R., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.Research output: Contribution to conference › Conference Abstract › Scientific › peer-review
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2014
ALD modified porous silicon electrodes for supercapacitors
Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.Research output: Contribution to conference › Conference Abstract › Scientific
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Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures
Feng, G., Grigoras, K., Arpiainen, S., Gorelick, S. & Puurunen, R., 2014.Research output: Contribution to conference › Conference Abstract › Scientific
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Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques
Berdova, M., Grigoras, K., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., Kilpi, L., Ronkainen, H., Koskinen, J., Hæggström, E. & Franssila, S., 2014.Research output: Contribution to conference › Conference Abstract › Scientific