Kestutis Grigoras

PhD

20122019
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Research Output 2012 2019

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Conference Abstract
2017

Thin film conformality analysis with microscopic all-silicon lateral high aspect ratio structures

Puurunen, R., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

2014

ALD modified porous silicon electrodes for supercapacitors

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.

Research output: Contribution to conferenceConference AbstractScientific

Porous silicon
Electrodes
Supercapacitor

Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

Feng, G., Grigoras, K., Arpiainen, S., Gorelick, S. & Puurunen, R., 2014.

Research output: Contribution to conferenceConference AbstractScientific

Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

Berdova, M., Grigoras, K., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., Kilpi, L., Ronkainen, H., Koskinen, J., Hæggström, E. & Franssila, S., 2014.

Research output: Contribution to conferenceConference AbstractScientific