Kestutis Grigoras

PhD

  • Phone+358401733692
20122020

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

Filter
Conference Abstract
2014

ALD modified porous silicon electrodes for supercapacitors

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.

Research output: Contribution to conferenceConference AbstractScientific

Conformality evaluation of ALD thin films with microscopic lateral High-Aspect-Ratio (LHAR) test structures

Feng, G., Grigoras, K., Arpiainen, S., Gorelick, S. & Puurunen, R., 2014.

Research output: Contribution to conferenceConference AbstractScientific

Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

Berdova, M., Grigoras, K., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., Kilpi, L., Ronkainen, H., Koskinen, J., Hæggström, E. & Franssila, S., 2014.

Research output: Contribution to conferenceConference AbstractScientific

2017

Thin film conformality analysis with microscopic all-silicon lateral high aspect ratio structures

Puurunen, R., Ylivaara, O., Grigoras, K. & Ylilammi, M., 2017.

Research output: Contribution to conferenceConference AbstractScientificpeer-review