Kestutis Grigoras

View Scopus Profile

Phone+358401733692

Research activity per year

24 Article
12 Conference article in proceedings
6 Conference abstract in proceedings
4 Conference Abstract
More

3 results

Filter

2018

(Semi-)transparent ALD TiN microelectrodes
Ryynänen, T. (Corresponding author), Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.
Research output: Contribution to conference › Conference Poster › Scientific › peer-review

Open Access
2016

On the early history of atomic layer deposition: most significant works and applications
Aarik, J., Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Chubarov, M., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Hwang, C. S., Junige, M., Kallio, T., Kanervo, J., Khmelnitskiy, I., Koshtyal, Y. & Krause, O. & 32 others, Kääriäinen, M.-L., Kääriäinen, T., Lamagna, L., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Molarius, J., Norek, M., Ozgit-Akgun, C., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Suyatin, D., Tallarida, M., Törndahl, T., Utriainen, M., van Ommen, J. R., Wächtler, T., Wiemer, C., Ylivaara, O. M. E. & Yurkevich, O., 2016.
Research output: Contribution to conference › Conference Poster › Scientific
2014
Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes
Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.
Research output: Contribution to conference › Conference Poster › Scientific › peer-review

Kestutis Grigoras

Research output

Search results

(Semi-)transparent ALD TiN microelectrodes

On the early history of atomic layer deposition: most significant works and applications

Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes