Kestutis Grigoras

PhD

Senior Scientist, BA1403 Nanoelectronics

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Research Output 2012 2019

16 Article
10 Conference article in proceedings
6 Conference abstract in proceedings
4 Conference Abstract
10 More

3 results
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(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

Open Access

Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes

Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

titanium nitrides

electrochemical capacitors

atomic layer epitaxy

porous silicon

electrodes

On the early history of atomic layer deposition: most significant works and applications

Aarik, J., Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Chubarov, M., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Hwang, C. S., Junige, M., Kallio, T., Kanervo, J., Khmelnitskiy, I., Koshtyal, Y., Krause, O. & 32 others, Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Molarius, J., Norek, M., Ozgit-Akgun, C., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Suyatin, D., Tallarida, M., Törndahl, T., Utriainen, M., van Ommen, J. R., Wächtler, T., Wiemer, C., Ylivaara, O. M. E. & Yurkevich, O., 2016.

Research output: Contribution to conference › Conference Poster › Scientific