Research Output per year
Research Output 2012 2019
(Semi-)transparent ALD TiN microelectrodes
Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018.Research output: Contribution to conference › Conference Poster › Scientific › peer-review
Open Access
Atomic layer deposition of titanium nitride layer on porous silicon supercapacitor electrodes
Grigoras, K., Keskinen, J., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2014.Research output: Contribution to conference › Conference Poster › Scientific › peer-review
titanium nitrides
electrochemical capacitors
atomic layer epitaxy
porous silicon
electrodes
On the early history of atomic layer deposition: most significant works and applications
Aarik, J., Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Chubarov, M., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Hwang, C. S., Junige, M., Kallio, T., Kanervo, J., Khmelnitskiy, I., Koshtyal, Y., Krause, O. & 32 others, , 2016.Research output: Contribution to conference › Conference Poster › Scientific