Kestutis Grigoras

PhD

  • Phone+358401733692
20122020

Research output per year

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Research Output

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Article

Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

Liu, Z., Iltanen, K., Chekurov, N., Grigoras, K. & Tittonen, I., 2013, In : Nanotechnology. 24, 17, 6 p., 175304.

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)

Characterization of thin film adhesion by MEMS shaft-loading blister testing

Berdova, M., Lyytinen, J., Grigoras, K., Baby, A., Kilpi, L., Ronkainen, H., Franssila, S. & Koskinen, J., 2013, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 31, 3, 5 p., 031102.

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)

Coated porous Si for high performance on-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 2014, In : Journal of Physics: Conference Series. 557, Conference 1, 4 p., 012058.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
16 Citations (Scopus)

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2016, In : Nano Energy. 26, p. 340-345

Research output: Contribution to journalArticleScientificpeer-review

Open Access
51 Citations (Scopus)

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Lu, P., Ohlckers, P. A., Müller, L., Leopold, S., Hoffmann, M. J. F., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 2016, In : Electrochemistry Communications. 70, p. 51-55

Research output: Contribution to journalArticleScientificpeer-review

29 Citations (Scopus)

Nanometer-thick textured ZnO films: Preparation, characterization and interaction with ethanol vapor

Naumenko, D., Snitka, V., Ulcinas, A., Naumenko, I. & Grigoras, K., 2013, In : Theoretical and Experimental Chemistry. 49, 2, p. 96-102 6 p.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Nondestructive inspection of buried channels and cavities in silicon

Kassamakov, I., Grigoras, K., Heikkinen, V., Hanhijärvi, K., Aaltonen, J., Franssila, S. & Haeggstrom, E., 2013, In : Journal of Microelectromechanical Systems. 22, 2, p. 438-442 5 p.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Porous silicon for energy storage at microscale: Supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2016, In : ECS Transactions. p. 97-104 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
5 Citations (Scopus)

Single-walled carbon nanotube network field effect transistor as a humidity sensor

Mudimela Prasantha, R., Grigoras, K., Anoshkin, I. V., Varpula, A., Ermolov, V., Anisimov, A. S., Nasibulin, A. G., Novikov, S. & Kauppinen, E. I., 2012, In : Journal of Sensors. 2012, 7 p., 496546.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
6 Citations (Scopus)

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Hanhijärvi, H., Kassamakov, I., Heikkinen, V., Aaltonen, J., Sainiemi, L., Grigoras, K., Franssila, S. & Haeggström, E., 2012, In : Optics Letters. 37, 10, p. 1703-1705 3 p.

Research output: Contribution to journalArticleScientificpeer-review

19 Citations (Scopus)

Ternary composite Si/TiN/MnO2 taper nanorod array for on-chip supercapacitor

Lu, P., Halvorsen, E., Ohlckers, P., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 10 Sep 2017, In : Electrochimica Acta. 248, p. 397-408 12 p.

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 26 Jun 2017, In : Applied Physics Letters. 110, 26, 262101.

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)