Kestutis Grigoras

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Kestutis Grigoras

PhD

  • Phone+358401733692
20122024

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  • 2017

    Review Article: Recommended reading list of early publications on atomic layer deposition: Outcome of the "Virtual Project on the History of ALD"

    Ahvenniemi, E., Akbashev, A., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D., Hwang, C. S., Jen, S.-H., Kallio, T. & Kanervo, J. & 42 others, Khmelnitskiy, I., Kim, D. H., Klibanov, L., Koshtyal, Y., Krause, O., Kuhs, J., Kärkkänen, I., Kääriäinen, M.-L., Kääriäinen, T., Lamagna, L., Lapicki, A., Leskelä, M., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Mennad, A., Militzer, C., Molarius, J., Norek, M., Özgit-Akgün, Ç., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R., Rampelberg, G., Ras, R. H. A., Rauwel, E., Roozeboom, F., Sajavaara, T., Salami, H., Savin, H., Schneider, N., Seidel, T. E., Sundqvist, J., Suyatin, D., Törndahl, T., van Ommen, J. R., Wiemer, C., Ylivaara, O. & Yurkevich, O., 1 Jan 2017, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 1, 13 p., 010801.

    Research output: Contribution to journal › Review Article › peer-review

    Open Access
    70 Citations (Scopus)