Keyphrases
Actuator
93%
Resonant Micromirror
73%
Beam Steering
60%
MEMS Mirror
53%
Digital Control
53%
Feedback Device
46%
Actuation
46%
Piezoelectric Element
46%
Sensing Element
46%
Micro-opto-electro-mechanical Systems (MOEMS)
40%
Loop Controller
40%
PiezoMEMS
40%
Resonator
40%
Light Detection
40%
Phase-locked Loop
40%
Ranging System
40%
Thin-film Actuators
40%
Systems-based
40%
Detection System
40%
Refresh Rate
40%
AlN Thin Film
40%
Control Method
40%
AIN Thin Films
40%
Piezoelectric Actuation
33%
Low Voltage
33%
Minimal Power
33%
Mechanically Coupled
33%
Scan Pattern
33%
Lissajous Pattern
33%
Nitrides
33%
Digital Control System
33%
Aluminum Nitride Thin Film
33%
Frequency Control
33%
Piezoelectric Actuator
26%
Beam Structure
26%
Phase Frequencies
20%
Digital Systems
20%
Tilt Angle
20%
Phase Control
20%
System Requirements
20%
Lissajous
20%
Differential Pair
20%
Mechanical Tilt
20%
Biaxial
20%
Symmetrical Beam
20%
Silicon-on-insulator Wafer
20%
Micromirror
20%
High Quality Factor
20%
Device Design
20%
Phase Amplitude
20%
Engineering
Micromirrors
93%
Digital Control
86%
Thin Films
80%
Piezoelectric
80%
Nitride
80%
Actuation
66%
Feedback Signal
60%
Microelectromechanical System
53%
Sensing Element
53%
Piezoelectric Element
53%
Phase Locked Loop
40%
Light Detection and Ranging
40%
Refresh Rate
40%
Resonator
40%
Digital Control System
40%
Beam Structure
40%
Piezoelectric Actuator
40%
Field Programmable Gate Arrays
26%
Silicon on Insulator
20%
Differential Pair
20%
Phase Control
20%
Control Systems
20%
Operation Mode
20%
Q Factor
20%
Operation Phase
20%
High Quality Factor
20%
System Requirement
20%
Phase Ratio
20%
Digital Domain
20%
Nonlinearity
20%
Electrical Signal
13%
Optical Signal
13%
Angular Position
13%
Electric Power Utilization
13%
Time Domain
13%
System Behavior
13%
Lookup Table
13%
Size System
13%
Phase Delay
13%
Control Loop
13%
Steering System
13%
Sensor Fusion
13%
Feedback Loop
13%
INIS
mirrors
100%
control
86%
thin films
80%
piezoelectricity
76%
actuators
66%
beams
63%
amplitudes
53%
aluminium nitrides
53%
signals
36%
feedback
36%
voltage
30%
design
30%
control systems
23%
operation
23%
lasers
20%
interfaces
20%
detection
20%
resonators
20%
apertures
16%
devices
16%
power
16%
adjustments
13%
information
13%
efficiency
13%
sensors
13%
reflection
13%
levels
13%
quality factor
10%
silicon
10%
digital systems
10%