Laura Keskiväli

20172018
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Ozone Chemical Compounds
Phenol Chemical Compounds
Phenols Engineering & Materials Science
Molecular modeling Chemical Compounds
Hydrogen peroxide Engineering & Materials Science
Film growth Chemical Compounds
Hydrogen Peroxide Chemical Compounds
ozone Physics & Astronomy

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Research Output 2017 2018

Molecular Layer Deposition Using Ring-Opening Reactions: Molecular Modeling of the Film Growth and the Effects of Hydrogen Peroxide

Keskiväli, L., Putkonen, M., Puhakka, E., Kenttä, E., Kint, J., Ramachandran, R. K., Detavernier, C. & Simell, P., 31 Jul 2018, In : ACS Omega. 3, 7, p. 7141-7149 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Molecular modeling
Ozone
Film growth
Phenol
Hydrogen peroxide
1 Citation (Scopus)

Low-temperature molecular layer deposition using monifunctional aromatic precursors and ozone-based ring-opening reactions

Svärd, L., Putkonen, M., Kenttä, E., Sajavaara, T., Krahl, F., Karppinen, M., Van de Kerckhove, K., Detavernier, C. & Simell, P., 2017, In : Langmuir. 33, 38, p. 9657-9665 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Ozone
ozone
rings
Phenol
Vapor pressure