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Markku Kainlauri

20082016
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Research Output 2008 2016

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Conference article in proceedings
2016

Roll-to-Roll Nanoimprinting of CNF Film

Mäkelä, T., Kainlauri, M., Willberg-Keyriläinen, P., Tammelin, T. & Forsström, U., 2016, 2016 TAPPI International Conference on Nanotechnology for Renewable Materials. TAPPI Press, Vol. 1. p. 73-83

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Lithography
Hot Temperature
2011
4 Citations (Scopus)

Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition

Puurunen, R., Häärä, A., Ritala, H., Dekker, J. R., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2011, Proceedings: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. Institute of Electrical and Electronic Engineers IEEE, p. 1887-1890

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

stiction
atomic layer epitaxy
microelectromechanical systems
cantilever beams
silicon