Markku Ylilammi

  • Phone+358505691056
1983 …2019

Research output per year

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Research Output

Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures

Ylivaara, O. M. E., Yim, J., Ylilammi, M., Utriainen, M. & Puurunen, R. L., 27 Jun 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M. & Puurunen, R. L., 15 Oct 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Laterally acoustically coupled BAW filters at 3.6 GHz

Pensala, T., Makkonen, T., Dekker, J. R. & Ylilammi, M., 2018, 2018 IEEE International Ultrasonics Symposium: IUS 2018. IEEE Institute of Electrical and Electronic Engineers, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 1 Citation (Scopus)

    Modeling growth kinetics of thin films made by atomic layer deposition in lateral high-aspect-ratio structures

    Ylilammi, M., Ylivaara, O. M. E. & Puurunen, R. L., 28 May 2018, In : Journal of Applied Physics. 123, 20, 205301.

    Research output: Contribution to journalArticleScientificpeer-review

  • 13 Citations (Scopus)

    PillarHall LHAR structure for thin film conformality measurements

    Korpelainen, V., Ylivaara, O., Ylilammi, M., Utriainen, M., Gao, F. & Puurunen, R. L., 14 May 2018.

    Research output: Contribution to conferenceConference AbstractScientificpeer-review


    • 1 Oral presentation

    Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

    Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker) & Riikka L. Puurunen (Speaker)

    31 Jul 2018

    Activity: Talk or presentation typesOral presentation