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  • 26 Similar Profiles
silicon Physics & Astronomy
Silicon Chemical Compounds
membranes Physics & Astronomy
insulators Physics & Astronomy
electrons Physics & Astronomy
phonons Physics & Astronomy
cooling Physics & Astronomy
electrochemical capacitors Physics & Astronomy

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Projects 2018 2018

Research Output 2000 2019

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
Microelectrodes
Electrodes
Electric Impedance
Noise
Neurons

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. Institute of Electrical and Electronic Engineers IEEE, 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

Silicon
membranes
Detectors
Membranes
Phonon scattering

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018, Front. Cell. Neurosci. Conference Abstract: MEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays. Frontiers Media, (Frontiers in Cellular Neuroscience ).

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Open Access
Niobium
Parametric amplifiers
parametric amplifiers
spacers
Amplification

Fabrication and Studies of Silicide-Based Superconducting Nanowires

Lehtinen, J., Mykkänen, E., Kemppinen, A., Prunnila, M. & Manninen, A., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. Institute of Electrical and Electronic Engineers IEEE, 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

nanowires
fabrication
nanofabrication
crossovers
slip