Mika Prunnila

20002018
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silicon Physics & Astronomy
Silicon Chemical Compounds
membranes Physics & Astronomy
insulators Physics & Astronomy
electrons Physics & Astronomy
phonons Physics & Astronomy
cooling Physics & Astronomy
Porous silicon Engineering & Materials Science

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Projects 2018 2018

Research Output 2000 2018

(Semi-)transparent ALD TiN microelectrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 27 Jul 2018, Front. Cell. Neurosci. Conference Abstract: MEA Meeting 2018, 11th International Meeting on Substrate Integrated Microelectrode Arrays. Frontiers Media, (Frontiers in Cellular Neuroscience ).

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

Open Access
Niobium
Parametric amplifiers
parametric amplifiers
spacers
Amplification

Fabrication and Studies of Silicide-Based Superconducting Nanowires

Lehtinen, J., Mykkänen, E., Kemppinen, A., Prunnila, M. & Manninen, A., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. Institute of Electrical and Electronic Engineers IEEE, 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

nanowires
fabrication
nanofabrication
crossovers
slip

Methods for Electrical Cooling and Thermometry of a Suspended Silicon Chip

Kemppinen, A., Mykkänen, E., Lehtinen, J., Shchepetov, A., Timofeev, A., Gunnarsson, D., Grönberg, L., Manninen, A. & Prunnila, M., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. Institute of Electrical and Electronic Engineers IEEE, 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

coolers
tunnel junctions
conductive heat transfer
temperature measurement
heat flux

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticleResearchpeer-review

platforms
Glass
glass
sensors
Sensors