Mika Prunnila

20002019
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Research Output 2000 2019

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Conference article in proceedings
2019

Silicon Membranes for Nanophononics

Varpula, A., Shchepetov, A., Grigoras, K., Hassel, J., Prunnila, M. & Ahopelto, J., 24 Jan 2019, 18th International Conference on Nanotechnology, NANO 2018. Institute of Electrical and Electronic Engineers IEEE, 2 p. 8626348. (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Silicon
membranes
Detectors
Membranes
Phonon scattering
2018

Fabrication and Studies of Silicide-Based Superconducting Nanowires

Lehtinen, J., Mykkänen, E., Kemppinen, A., Prunnila, M. & Manninen, A., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. Institute of Electrical and Electronic Engineers IEEE, 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

nanowires
fabrication
nanofabrication
crossovers
slip

Methods for Electrical Cooling and Thermometry of a Suspended Silicon Chip

Kemppinen, A., Mykkänen, E., Lehtinen, J., Shchepetov, A., Timofeev, A., Gunnarsson, D., Grönberg, L., Manninen, A. & Prunnila, M., 2018, CPEM 2018 - Conference on Precision Electromagnetic Measurements. Institute of Electrical and Electronic Engineers IEEE, 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

coolers
tunnel junctions
conductive heat transfer
temperature measurement
heat flux

Rapid Thermal Characterization of Materials with Ultra-High Resolution of Droplet Size Specimens using the Three-Omega Method

Grosse, C., Ras, M. A., Grigoras, K., May, D., Varpula, A., Elabshihy, K., Wunderle, B. & Prunnila, M., 24 Jul 2018, Proceedings of the 17th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2018. Institute of Electrical and Electronic Engineers IEEE, p. 562-566 5 p. 8419617

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Thermal conductivity
Ointments
Hot Temperature
Atomic layer deposition
Thermal diffusivity

Thermal characterization of thermal interface materials using the three-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M. & Wunderle, B., 2018, 2018 7th Electronic System-Integration Technology Conference (ESTC). Institute of Electrical and Electronic Engineers IEEE, 8546370

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

thermal conductivity
fillers
2017

Development, design and fabrication of a measurement chip for thermal material characterization based on the 3-omega method

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Prunnila, M., Wunderle, B. & Gomès, S., 21 Dec 2017, THERMINIC 2017 - 23rd International Workshop on Thermal Investigations of ICs and Systems. Institute of Electrical and Electronic Engineers IEEE, p. 1-5 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Material Characterization
Fabrication
Chip
Thermodynamic properties
Thermal Properties

Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print

Grigoras, K., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Porous Silicon
Porous silicon
electrochemical capacitors
Capacitance
porous silicon

Silicon grass based nano functional electrodes for MEMS supercapacitors of improved energy density

Lu, P., Du, K., Ohlckers, P., Halvorsen, E., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 26 Jul 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). Institute of Electrical and Electronic Engineers IEEE, p. 1828-1831 4 p. 7994425

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

grasses
electrochemical capacitors
Silicon
microelectromechanical systems
MEMS

Thermoelectric bolometers based on silicon membranes

Varpula, A., Timofeev, A. V., Shchepetov, A., Grigoras, K., Ahopelto, J. & Prunnila, M., 1 Jan 2017, Smart Sensors, Actuators, and MEMS VIII. Prunnila, M., Fonseca, L. & Peiner, E. (eds.). International Society for Optics and Photonics SPIE, Vol. 10246. 102460L. (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Bolometer
Bolometers
bolometers
Silicon
Membrane
2016

Optical characterisation of a strained-silicon cold-electron bolometer at 160 GHz

Brien, T. L. R., Ade, P. A. R., Barry, P. S., Dunscombe, C. J., Leadley, D. R., Morozov, D. V., Myronov, M., Parked, E. H. C., Prest, M. J., Prunnila, M., Sudiwala, R. V., Whall, T. E. & Mauskopf, P. D., 28 Apr 2016, Millimeter Waves and THz Technology Workshop (UCMMT), 2015 8th UK, Europe, China. Institute of Electrical and Electronic Engineers IEEE, p. 1 - 4 7460630

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

bolometers
silicon
detectors
electrons
amplifiers
2015

Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability

Jaakkola, A., Pekko, P., Dekker, J. R., Prunnila, M. & Pensala, T., 2015, Frequency Control Symposium & the European Frequency and Time Forum (FCS): 2015 Joint Conference of the IEEE International. Institute of Electrical and Electronic Engineers IEEE, p. 420-422

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
temperature compensation
silicon
microelectromechanical systems
temperature
2014

Implementation of a Memristor-Based Solid-State Memcapacitive Device

Flak, J., Rantala, A., Haatainen, T., Prunnila, M. & Laiho, M., 2014, Proceedings: 14th International Workshop on Cellular Nanoscale Networks and their Applications, CNNA 2014. Institute of Electrical and Electronic Engineers IEEE, 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Memristors
Solid state devices
Data storage equipment
Analog circuits
Capacitors

Long term stability and quality factors of degenerately n-type doped silicon resonators

Jaakkola, A., Gorelick, S., Prunnila, M., Dekker, J., Pensala, T. & Pekko, P., 2014, Proceedings: IEEE International Frequency Control Symposium, FCS 2014. Institute of Electrical and Electronic Engineers IEEE, 6859866

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Q factors
resonators
silicon
phosphorus
forks

Photon-enhanced thermionic emission solar cells based on Si, GaAs, and InP

Varpula, A. & Prunnila, M., 2014, Proceedings of the 29th European Photovoltaic Solar Energy Conference and Exhibition. p. 331-333

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

thermionic emission
solar cells
photons
cathodes
energy conversion
2 Citations (Scopus)

Porous silicon electrodes for high performance integrated supercapacitors

Grigoras, K., Keskinen, J., Ahopelto, J. & Prunnila, M., 2014, Proceedings of the 5th Electronics System-integration Technology Conference, ESTC 2014. Institute of Electrical and Electronic Engineers IEEE, 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

electrochemical capacitors
porous silicon
electrodes
atomic layer epitaxy
high aspect ratio
2013

Cooltronics: A new low-temperature tunneling-technology based on Silicon

Whall, T. E., Prest, M. J., Richardson-Bullock, J. S., Shah, V. A., Myronov, M., Parker, E. H. C., Leadley, D. R., Prunnila, M., Gunnarsson, D., Brien, T., Morozov, D. & Mauskopf, P., 2013, Conference proceedings: International Conference on Ultimate Integration on Silicon, ULIS 2013. Institute of Electrical and Electronic Engineers IEEE, p. 1-4

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

thermometers
bolometers
silicon
tunnel junctions
electrons
32 Citations (Scopus)

Emission and absorption entropy generation in semiconductors

Reck, K., Varpula, A., Prunnila, M. & Hansen, O., 2013, Proceedings of the 28th European Photovoltaic Solar Energy Conference and Exhibition. p. 20-23

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

entropy
solar cells
electromagnetic absorption
electromagnetic radiation
2 Citations (Scopus)

Experimental determination of the temperature dependency of the elastic constants of degenerately doped silicon

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2013, Conference Proceeding: Joint European Frequency and Time Forum & International Frequency Control Symposium, EFTF/IFC 2013. Institute of Electrical and Electronic Engineers IEEE, p. 421-424

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

elastic properties
silicon
coefficients
arsenic
microelectromechanical systems
3 Citations (Scopus)

Hole-phonon energy loss rate in boron doped silicon

Richardson-Bullock, J. S., Prest, M. J., Prunnila, M., Gunnarsson, D., Shah, V. A., Dobble, A., Myronov, M., MOrris, R. J. H., Whall, T. E., Parker, E. H. C. & Leadley, D. R., 2013, Conference proceedings: 14th International Conference on Ultimate Integration on Silicon, ULIS 2013. Institute of Electrical and Electronic Engineers IEEE, p. 213 - 215

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

boron
energy dissipation
silicon
temperature
electrons
3 Citations (Scopus)

Investigation of uncertainty components in Coulomb blockade thermometry

Hahtela, O. M., Meschke, M., Savin, A., Gunnarsson, D., Prunnila, M., Penttilä, J. S., Roschier, L., Heinonen, M., Manninen, A. & Pekola, J. P., 2013, Temperature: Its Measurement and Control in Science and Industry, Volume 8: Proceedings of the Ninth International Temperature Symposium. Meyer, C. W. (ed.). American Institute of Physics AIP, Vol. 1552. p. 142-147 (AIP Conference Proceedings, Vol. 1552).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

temperature measurement
cryogenic temperature
tunnel junctions
charging
thermodynamics

Nanoscale thermal transport and phonon dynamics in ultra-thin Si based nanostructures

Wagner, M. R., Chavez-Angel, E., Gomis-Bresco, J., Reparaz, J. S., Shchepetov, A., Prunnila, M., Ahopelto, J., Alzina, F. & Sotomayor-Torres, C. M., 2013, Proceedings: 19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013. Institute of Electrical and Electronic Engineers IEEE, p. 10-12

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

life (durability)
acoustics
phonons
membranes
reflectance

Thermal conductivity reduction in Si free-standing membranes investigated using Raman thermometry

Reparaz, J. S., Chavez-Angel, E., Gomis-Bresco, J., Wagner, M. R., Shchepetov, A., Prunnila, M., Ahopelto, J., Alzina, F. & Sotomayor Torres, C. M., 2013, Proceedings: 19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013. Institute of Electrical and Electronic Engineers IEEE, p. 95-96

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

temperature measurement
thermal conductivity
membranes
absorptivity
room temperature
1 Citation (Scopus)

Using platinum silicide as a superconductor for silicon electron coolers

Prest, M. J., Zhao, Q. T., Muhonen, J. T., Shah, V. A., Richardson-Bullock, J. S., Prunnila, M., Gunnarsson, D., Whall, T. E., Parker, E. H. C. & Leadley, D. R., 2013, Conference proceedings: 14th International Conference on Ultimate Integration on Silicon, ULIS 2013. Institute of Electrical and Electronic Engineers IEEE, p. 201-204

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

coolers
platinum
cooling
silicon
electrons
2012

Bulk acoustic wave propagation characteristics in degenerately n-doped Si

Pensala, T., Prunnila, M. & Jaakkola, A., 2012, Proceedings : International Frequency Control Symposium, IFCS 2012. Institute of Electrical and Electronic Engineers IEEE, p. 442-445

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

wave propagation
acoustics
temperature
shear
coefficients

Effect of phonon confinement on the dispersion relation and heat capacity in nanoscale Si membranes

Cuffe, J., Chávez, E., Shchepetov, A., Chapuis, P-O., El Boudouti, E. H., Alzina, F., Pennec, Y., Djafari-Rouhani, B., Prunnila, M., Ahopelto, J. & Sotomayor Torres, C. M., 2012, ASME 2012 International Mechanical Engineering Congress and Exposition: Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B. American Society of Mechanical Engineers ASME, Vol. 9. p. 1081-1088

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

specific heat
membranes
thermal conductivity
phase velocity
group velocity
14 Citations (Scopus)

Temperature compensated resonance modes of degenerately n-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M. & Pensala, T., 2012, Proceedings IFCS 2012: International Frequency Control Symposium . Institute of Electrical and Electronic Engineers IEEE, p. 77-81

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
resonators
silicon
temperature
sensitivity analysis
2011

Dispersion of confined acoustic phonons in ultra-thin silicon membranes

Prunnila, M., Ahopelto, J., Cuffe, J., Chavez, E., Chapuis, P-O., El Boudoti, E. H., Alzina, F., Dudek, D., Pennec, Y., Djafari-Rouhani, B., Shchepetov, A. & Sotomayor Torres, C. M., 2011, EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings. Universidad de Granada, p. 125-126

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

phonons
membranes
acoustics
silicon
light scattering

Electron-hole bi-layers in ultra-thin SOI-devices

Laakso, S., Prunnila, M. & Ahopelto, J., 2011, EUROSOI 2011 VII Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits: Conference Proceedings. University of Granada, p. 123-124

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

SOI (semiconductors)
drag
temperature
electrons
39 Citations (Scopus)

Temperature compensation of silicon MEMS Resonators by Heavy Doping

Pensala, T., Jaakkola, A., Prunnila, M. & Dekker, J. R., 2011, 2011 IEEE International Ultrasonics Symposium. Institute of Electrical and Electronic Engineers IEEE, p. 1952-1955 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

temperature compensation
microelectromechanical systems
resonators
silicon
coefficients