Mika Prunnila

20002019
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Research Output 2000 2019

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Article
2019

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Microelectrodes
Electrodes
Electric Impedance
Noise
Neurons
2018
Niobium
Parametric amplifiers
parametric amplifiers
spacers
Amplification
2 Citations (Scopus)

Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Grosse, C., Ras, M. A., Varpula, A., Grigoras, K., May, D., Wunderle, B., Chapuis, P-O., Gomès, S. & Prunnila, M., 1 Aug 2018, In : Sensors and Actuators A: Physical. 278, p. 33-42 10 p.

Research output: Contribution to journalArticleScientificpeer-review

platforms
Glass
glass
sensors
Sensors

Photoresponse of Graphene-Gated Graphene-GaSe Heterojunction Devices

Kim, W., Arpiainen, S., Xue, H., Soikkeli, M., Qi, M., Sun, Z., Lipsanen, H., Chaves, F. A., Jiménez, D. & Prunnila, M., 31 Jul 2018, In : ACS Applied Nano Materials. 1, 8, p. 3895–3902 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
gallium selenides
heterojunction devices
photometers
heterojunctions
graphene

Sensors for Thermal Characterization of Solid and Liquid Samples by 3-Omega Method

Grigoras, K., Varpula, A., Grosse, C., May, D., Ras, M. A. & Prunnila, M., 28 Nov 2018, In : Proceedings. 2, 13, 5 p., 883.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Glass
Porous silicon
Sensors
Liquids
Silicon

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

Varpula, A., Grigoras, K., Tappura, K., Timofeev, A., Shchepetov, A., Hassel, J., Ahopelto, J. & Prunnila, M., 6 Dec 2018, In : Proceedings. 2, 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
bolometers
photometers
silicon
membranes
costs
4 Citations (Scopus)

Superconducting MoSi nanowires

Lehtinen, J. S., Kemppinen, A., Mykkänen, E., Prunnila, M. & Manninen, A. J., 1 Jan 2018, In : Superconductor Science and Technology. 31, 1, 015002.

Research output: Contribution to journalArticleScientificpeer-review

Nanowires
nanowires
wire
Wire
Rapid thermal annealing
2017
3 Citations (Scopus)

On-chip magnetic cooling of a nanoelectronic device

Bradley, D. I., Guénault, A. M., Gunnarsson, D., Haley, R. P., Holt, S., Jones, A. T., Pashkin, Y. A., Penttilä, J., Prance, J. R., Prunnila, M. & Roschier, L., 4 Apr 2017, In : Scientific Reports. 7, 45566.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
magnetic cooling
chips
demagnetization
electrons
electron energy
3 Citations (Scopus)

Predictable quantum efficient detector based on n-type silicon photodiodes

Dönsberg, T., Manoocheri, F., Sildoja, M., Juntunen, M., Savin, H., Tuovinen, E., Ronkainen, H., Prunnila, M., Merimaa, M., Tang, C. K., Gran, J., Müller, I., Werner, L., Rougié, B., Pons, A., Smîd, M., Gál, P., Lolli, L., Brida, G., Rastello, M. L. & 1 others, Ikonen, E., 4 Oct 2017, In : Metrologia. 54, 6, p. 821-836 16 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Photodiodes
Detectors
Silicon
Substrates
Atomic layer deposition
2 Citations (Scopus)

Side-wall spacer passivated sub-μm Josephson junction fabrication process

Grönberg, L., Kiviranta, M., Vesterinen, V., Lehtinen, J., Simbierowicz, S., Luomahaara, J., Prunnila, M. & Hassel, J., 16 Nov 2017, In : Superconductor Science and Technology. 30, 12, 6 p., 125016.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Josephson junctions
spacers
Lithography
Niobium
Parametric amplifiers
9 Citations (Scopus)

Ternary composite Si/TiN/MnO2 taper nanorod array for on-chip supercapacitor

Lu, P., Halvorsen, E., Ohlckers, P., Müller, L., Leopold, S., Hoffmann, M., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 10 Sep 2017, In : Electrochimica Acta. 248, p. 397-408 12 p.

Research output: Contribution to journalArticleScientificpeer-review

Nanorods
Silicon
Composite materials
Capacitance
Electrodes
13 Citations (Scopus)

Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M. & Prunnila, M., 26 Jun 2017, In : Applied Physics Letters. 110, 26, 262101.

Research output: Contribution to journalArticleScientificpeer-review

doped crystals
thermocouples
membranes
detectors
single crystals
4 Citations (Scopus)

Traceable Coulomb blockade thermometry

Hahtela, O., Mykkänen, E., Kemppinen, A., Meschke, M., Prunnila, M., Gunnarsson, D., Roschier, L., Penttilä, J. & Pekola, J., 1 Feb 2017, In : Metrologia. 54, 1, p. 69-76 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Coulomb blockade
Temperature
Digital voltmeters
Thermodynamics
Temperature scales
2016
45 Citations (Scopus)

Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Yli-Rantala, E., Laakso, S., Välimäki, H., Kauranen, P., Ahopelto, J. & Prunnila, M., 2016, In : Nano Energy. 26, p. 340-345

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Titanium nitride
Porous silicon
Nanostructured materials
Silicon
Energy storage
4 Citations (Scopus)

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

MEMS
Resonators
Silicon
Doping (additives)
Elastic constants
28 Citations (Scopus)

Graphene biosensor programming with genetically engineered fusion protein monolayers

Soikkeli, M., Kurppa, K., Kainlauri, M., Arpiainen, S., Paananen, A., Gunnarsson, D., Joensuu, J. J., Laaksonen, P., Prunnila, M., Linder, M. B. & Ahopelto, J., 2016, In : ACS applied materials & interfaces. 8, 12, p. 8257-8264

Research output: Contribution to journalArticleScientificpeer-review

Graphite
Biosensors
Graphene
Monolayers
Fusion reactions
7 Citations (Scopus)

Multilayer fabrication process for Josephson junction circuits cross-compatible over two foundries

Kiviranta, M., Brandel, O., Grönberg, L., Kuner, J., Linzen, S., Beev, N., May, T. & Prunnila, M., 2016, In : IEEE Transactions on Applied Superconductivity. 26, 6, 7438771.

Research output: Contribution to journalArticleScientificpeer-review

foundries
Foundries
Josephson junctions
layouts
Multilayers
12 Citations (Scopus)

Nanoelectronic primary thermometry below 4 mK

Bradley, D. I., George, R. E., Gunnarsson, D., Haley, R. P., Heikkinen, H., Pashkin, Y. A. A., Penttila, J., Prance, J. R., Prunnila, M., Roschier, L. & Sarsby, M., 2016, In : Nature Communications. 7, 10455.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Thermometry
Nanoelectronics
temperature measurement
Electrons
Coulomb blockade
23 Citations (Scopus)

Nano fabricated silicon nanorod array with titanium nitride coating for on-chip supercapacitors

Lu, P., Ohlckers, P. A., Müller, L., Leopold, S., Hoffmann, M. J. F., Grigoras, K., Ahopelto, J., Prunnila, M. & Chen, X., 2016, In : Electrochemistry Communications. 70, p. 51-55

Research output: Contribution to journalArticleScientificpeer-review

Titanium nitride
Silicon
Nanorods
Coatings
Electrodes
69 Citations (Scopus)

Nanophononics: state of the art and perspectives

Volz, S., Ordonez-Miranda, J., Shchepetov, A., Prunnila, M., Ahopelto, J., Pezeril, T., Vaudel, G., Gusev, V., Ruello, P., Weig, E. M., Schubert, M., Hettich, M., Grossman, M., Dekorsy, T., Alzina, F., Graczykowski, B., Chavez-Angel, E., Reparaz, S. J., Wagner, M. R., Sotomayor-Torres, C. M. & 3 others, Xiong, S., Neogi, S. & Donadio, D., 2016, In : European Physical Journal B. 89, 15, 20 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Phonons
phonons
Electron transport properties
Nanoelectronics
thermoelectric materials
5 Citations (Scopus)

New evaluation of T - T2000 from 0.02 K to 1 K by independent thermodynamics methods

Engert, J., Kirste, A., Shibahara, A., Casey, A., Levitin, L., Saunders, J., Hahtela, O., Kemppinen, A., Mykkänen, E., Prunnila, M., Gunnarsson, D., Roschier, L., Meschke, M. & Pekola, J., 2016, In : International Journal of Thermophysics. 37, 125

Research output: Contribution to journalArticleScientificpeer-review

thermometers
thermodynamics
evaluation
temperature scales
budgets
1 Citation (Scopus)

Optical response of strained- and unstrained-silicon cold-electron bolometers

Brien, T., Ade, P., Barry, P. S., Dunscombe, C. J., Leadley, D. R., Morozov, D. V., Myronov, M., Parker, E., Prest, M. J., Prunnila, M., Sudiwala, R. V., Whall, T. E. & Mauskopf, P. D., 2016, In : Journal of Low Temperature Physics. 184, 1-2, p. 231-237

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Bolometers
bolometers
Silicon
Electrons
silicon
3 Citations (Scopus)

Porous silicon for energy storage at microscale: Supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 1 Jan 2016, In : ECS Transactions. p. 97-104 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Porous silicon
Energy storage
Capacitors
Electrodes
Supercapacitor
2015

Comparison of electron-phonon and hole-phonon energy loss rates in silicon

Richardson-Bullock, J. S., Prest, M. J., Shah, V. A., Gunnarsson, D., Prunnila, M., Dobbie, A., Myronov, M., Morris, R. J. H., Whall, T. E., Parker, E. H. C. & Leadley, D. R., 2015, In : Solid-State Electronics. 103, p. 40-43

Research output: Contribution to journalArticleScientificpeer-review

Silicon
Energy dissipation
energy dissipation
Electrons
silicon
7 Citations (Scopus)

Interfacial engineering of semiconductor-superconductor junctions for high performance micro-coolers

Gunnarsson, D., Richardson-Bullock, J. S., Prest, M. J., Nguyen, H. Q., Timofeev, A., Shah, V. A., Whall, T. E., Parker, E. H. C., leadley, D. R., MYronov, M. & Prunnila, M., 2015, In : Scientific Reports. 5, 10 p., 17398.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
coolers
engineering
leakage
cooling
refrigerators
3 Citations (Scopus)

Large 256-pixel X-ray transition-edge sensor arrays with Mo/TiW/Cu trilayers

Palosaari, M. R. J., Grönberg, L., Kinnunen, K. M., Gunnarsson, D., Prunnila, M. & Maasilta, I. J., 2015, In : IEEE Transactions on Applied Superconductivity. 25, 3, 2100304.

Research output: Contribution to journalArticleScientificpeer-review

Sensor arrays
Pixels
pixels
X rays
sensors
62 Citations (Scopus)

Reconstructing phonon mean-free-path contributions to thermal conductivity using nanoscale membranes

Cuffe, J., Eliason, J. K., Maznev, A. A., Collins, K. C., Johnson, J. A., Shchepetov, A., Prunnila, M., Ahopelto, J., Sotomayor Torres, C. M., Chen, G. & Nelson, K. A., 2015, In : Physical Review B: Condensed Matter and Materials Physics. 91, 24, 245423.

Research output: Contribution to journalArticleScientificpeer-review

mean free path
Thermal conductivity
thermal conductivity
membranes
Membranes
18 Citations (Scopus)

Si, GaAs, and InP as cathode materials for photon-enhanced thermionic emission solar cells

Varpula, A., Tappura, K. & Prunnila, M., 2015, In : Solar Energy Materials and Solar Cells. 134, p. 351-358

Research output: Contribution to journalArticleScientificpeer-review

Thermionic emission
Solar cells
Cathodes
Photons
High temperature operations

Superconducting platinum silicide for electron cooling in silicon

Prest, M. J., Richardson-Bullock, J. S., Zhao, Q. T., Muhonen, J., Gunnarsson, D., Prunnila, M., Shah, V. A., Whall, T. E., Parker, E. H. C. & Leadley, D. R., 2015, In : Solid-State Electronics. 103, p. 15-18

Research output: Contribution to journalArticleScientificpeer-review

Silicon
Platinum
platinum
Cooling
cooling
63 Citations (Scopus)

Tuning thermal transport in ultrathin silicon membranes by surface nanoscale engineering

Neogi, S., Reparaz, J. S., Pereira, L. F. C., Graczykowski, B., Wagner, M. R., Sledzinska, M., Shchepetov, A., Prunnila, M., Ahopelto, J., Sotomayor-Torres, C. M. & Donadio, D., 2015, In : ACS Nano. 9, 4, p. 3820-3828

Research output: Contribution to journalArticleScientificpeer-review

Silicon
thermal conductivity
Tuning
tuning
engineering
2014
12 Citations (Scopus)

Acoustic phonon propagation in ultra-thin Si membranes under biaxial stress field

Graczykowski, B., Gomis-Bresco, J., Alzina, F., Reparaz, J., Shchepetov, A., Prunnila, M., Ahopelto, J. & Sotomayor Torres, C. M., 2014, In : New Journal of Physics. 16, 073024.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
stress distribution
membranes
propagation
acoustics
phonons
7 Citations (Scopus)

A strained silicon cold electron bolometer using Schottky contacts

Brien, T. L. R., Ade, P. A. R., Barry, P. S., Dunscombe, C., Leadley, D. R., Morozov, D. V., Myronov, M., Parker, E. H. C., Prest, M. J., Prunnila, M. & al, E., 2014, In : Applied Physics Letters. 105, 4, 043509.

Research output: Contribution to journalArticleScientificpeer-review

bolometers
electric contacts
silicon
electrons
absorbers
15 Citations (Scopus)

Coated porous Si for high performance on-chip supercapacitors

Grigoras, K., Keskinen, J., Grönberg, L., Ahopelto, J. & Prunnila, M., 2014, In : Journal of Physics: Conference Series. 557, Conference 1, 4 p., 012058.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
electrochemical capacitors
chips
electrodes
radiant flux density
atomic layer epitaxy
2 Citations (Scopus)

Contacting mode operation of work function energy harvester

Varpula, A., Laakso, S. J., Havia, T., Kyynäräinen, J. & Prunnila, M., 2014, In : Journal of Physics: Conference Series. 557, Conference 1, 012010.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
electrodes
charging
capacitors
energy
touch
30 Citations (Scopus)

Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. R. & Pekko, P., 2014, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 61, 7, p. 1063-1074

Research output: Contribution to journalArticleScientificpeer-review

Elastic constants
microelectromechanical systems
MEMS
Resonators
elastic properties
3 Citations (Scopus)

Flat single crystal Ge membranes for sensors and opto-electronic integrated circuitry

Shah, V. A., Myronov, M., Rhead, S. D., Halpin, J. E., Shchepetov, A., Prest, M. J., Prunnila, M., Whall, T. E., Parker, E. H. C. & Leadley, D. R., 2014, In : Solid-State Electronics. 98, August, p. 93-98 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Single crystals
membranes
Membranes
sensors
single crystals
13 Citations (Scopus)

Harvesting vibrational energy using material work functions

Varpula, A., Laakso, S., Havia, T., Kyynäräinen, J. & Prunnila, M., 2014, In : Scientific Reports. 4, 6799.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
energy
vibration
electrostatics
electrets
energy storage
1 Citation (Scopus)

Radiation detectors fabricated on high-purity GaAs epitaxial materials

Wu, X., Kostamo, P., Gädda, T., Nenonen, S., Riekkinen, T., Härkönen, J., Salonen, J., Andersson, H., Zhilyaev, Y., Fedorov, L., Eränen, S., Mattila, M., Lipsanen, H., Prunnila, M., Kalliopuska, J. & Oja, A., 2014, In : Journal of Instrumentation. 9, 9 p., C12024.

Research output: Contribution to journalArticleScientificpeer-review

Radiation Detectors
Radiation detectors
radiation detectors
Gallium Arsenide
purity
85 Citations (Scopus)

Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry

Chavez-Angel, E., Reparaz, J. S., Gomis-Bresco, J., Wagner, M. R., Cuffe, J., Graczykowski, B., Shchepetov, A., Jiang, H., Prunnila, M., Ahopelto, J., Alzina, F. & Sotomayor Torres, C. M., 2014, In : APL Materials. 2, 1

Research output: Contribution to journalArticleScientificpeer-review

Silicon
Thermal conductivity
Membranes
Crystalline materials
Scattering
4 Citations (Scopus)

Solid-State Memcapacitive Device Based on Memristive Switch

Flak, J., Lehtonen, E., Laiho, M., Rantala, A., Prunnila, M. & Haatainen, T., 2014, In : Semiconductor Science and Technology. 29, 10, 7 p.

Research output: Contribution to journalArticleScientificpeer-review

Memristors
Solid state devices
solid state devices
switches
Metals
2013
9 Citations (Scopus)

Dielectric losses in multi-layer Josephson junction qubits

Gunnarsson, D., Pirkkalainen, J-M., Li, J., Paraoanu, G. S., Hakonen, P., Sillanpää, M. & Prunnila, M., 2013, In : Superconductor Science and Technology. 26, 8, 085010.

Research output: Contribution to journalArticleScientificpeer-review

Dielectric losses
dielectric loss
Josephson junctions
life (durability)
Tunnel junctions
2 Citations (Scopus)

Interlayer heat transfer in bilayer carrier systems

Prunnila, M. & Laakso, S. J., 2013, In : New Journal of Physics. 15, 12 p., 033043.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
wireless communication
interlayers
heat transfer
graphene
heat
65 Citations (Scopus)

Lifetimes of confined acoustic phonons in ultrathin silicon membranes

Cuffe, J., Ristow, O., Chávez, E., Shchepetov, A., Chapuis, P-O., Alzina, F., Hettich, M., Prunnila, M., Ahopelto, J., Dekorsy, T. & Sotomayor Torres, C. M., 2013, In : Physical Review Letters. 110, 9, 5 p., 095503.

Research output: Contribution to journalArticleScientificpeer-review

phonons
membranes
life (durability)
acoustics
silicon
6 Citations (Scopus)

Primary thermometry in the intermediate Coulomb blockade regime

Feshchenko, A. V., Meschke, M., Gunnarsson, D., Prunnila, M., Roschier, L., Penttilä, J. S. & Pekola, J. P., 2013, In : Journal of Low Temperature Physics. 173, 1-2, p. 36-44 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Coulomb blockade
Thermometers
thermometers
temperature measurement
sensors
41 Citations (Scopus)

Ultra-thin free-standing single crystalline silicon membranes with strain control

Shchepetov, A., Prunnila, M., Alzina, F., Schneider, L., Cuffe, J., Jiang, H., Kauppinen, E. I., Sotomayor Torres, C. M. & Ahopelto, J., 2013, In : Applied Physics Letters. 102, 19, p. 192108-192111 3 p.

Research output: Contribution to journalArticleScientificpeer-review

membranes
silicon
buckling
mechanical properties
photonics
2012
33 Citations (Scopus)

Diffusion-emission theory of photon enhanced thermionic emission solar energy harvesters

Varpula, A. & Prunnila, M., 2012, In : Journal of Applied Physics. 112, 4, 044506.

Research output: Contribution to journalArticleScientificpeer-review

thermionic emission
solar energy
cathodes
photons
electron affinity
65 Citations (Scopus)

Phonons in slow motion: Dispersion relations in ultrathin Si membranes

Cuffe, J., Chavez, E., Shchepetov, A., Chapuis, P-O., El Boudouti, E. H., Alzina, F., Kehoe, T., Gomis-Bresco, J., Dudek, D., Pennec, Y., Djafari-Rouhani, B., Prunnila, M., Ahopelto, J. & Sotomayor Torres, C. M., 2012, In : Nano Letters. 12, 7, p. 3569-3573 4 p.

Research output: Contribution to journalArticleScientificpeer-review

NEMS
Phonons
microelectromechanical systems
MEMS
phonons
2011
14 Citations (Scopus)

Strain dependence of electron-phonon energy loss rate in many-valley semiconductors

Muhonen, J. T., Prest, M. J., Prunnila, M., David, G., Shah, V. A., Dobbie, A., Myronov, M., Morris, R. J. H., Whall, T. E., Parker, E. H. C. & Leadley, D. R., 2011, In : Applied Physics Letters. 98, 18, 3 p., 182103.

Research output: Contribution to journalArticleScientificpeer-review

valleys
energy dissipation
baths
electrons
temperature
12 Citations (Scopus)

Strain enhanced electron cooling in a degenerately doped semiconductor

Prest, M. J., Muhonen, J. T., Prunnila, M., Gunnarsson, D., Shah, V. A., Richardson-Bullock, J. S., Dobbie, A., Myronov, M., Morris, R. J. H., Whall, T. E., Parker, E. H. C. & Leadley, D. R., 2011, In : Applied Physics Letters. 99, 25, 4 p., 251908.

Research output: Contribution to journalArticleScientificpeer-review

cooling
tunnels
silicon
electrons
Joule heating
2010
24 Citations (Scopus)

Acoustic phonon tunneling and heat transport due to evanescent electric fields

Prunnila, M. & Meltaus, J., 2010, In : Physical Review Letters. 105, 12

Research output: Contribution to journalArticleScientificpeer-review

heat
vacuum
acoustics
electric fields
phonons