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Mikko Utriainen

20082019
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Atomic layer deposition Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
high aspect ratio Physics & Astronomy
Aspect ratio Engineering & Materials Science
Chemical sensors Engineering & Materials Science
Thin films Engineering & Materials Science
Silicon Engineering & Materials Science
Tin dioxide Engineering & Materials Science

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Research Output 2008 2019

Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy

Ylivaara, O. M. E., Hyttinen, P., Arts, K., Gao, F., Erwin Kessels, W. M. M., Puurunen, R. L. & Utriainen, M., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Open Access
high aspect ratio
microscopy
image analysis
atomic layer epitaxy
metrology

Comparison of milk analysis performance between NIR laboratory analyser and miniaturised NIR MEMS sensors

Uusitalo, S., Aernouts, B., Sumen, J., Hietala, E., Utriainen, M. & Pastell, M., 17 Jun 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Open Access
milk analysis
sensors (equipment)
wavelengths
farmed animal species
milk composition

Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures

Ylivaara, O. M. E., Yim, J., Ylilammi, M., Utriainen, M. & Puurunen, R. L., 27 Jun 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Depth spectroscopy analysis of La-doped HfO2 ALD thin films in 3D structures by HAXPES and ToF-SIMS

Kia, A. M., Mart, C., Haufe, N., Utriainen, M., Puurunen, R. L. & Weinreich, W., 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

atomic layer epitaxy
high aspect ratio
secondary ion mass spectrometry
thin films
spectroscopy

Dopant Concentration Analysis of ALD Thin Films in 3D Structures by ToF-SIMS

Kia, A. M., Weinreich, W., Utriainen, M., Puurunen, R. L. & Haufe, N., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS, p. 61-61 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Open Access