No photo of Mikko Utriainen

Mikko Utriainen

  • Phone+358407537415
20082019

Research output per year

If you made any changes in Pure these will be visible here soon.

Fingerprint Dive into the research topics where Mikko Utriainen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 34 Similar Profiles

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output

Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy

Ylivaara, O. M. E., Hyttinen, P., Arts, K., Gao, F., Erwin Kessels, W. M. M., Puurunen, R. L. & Utriainen, M., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Open Access
  • Comparison of milk analysis performance between NIR laboratory analyser and miniaturised NIR MEMS sensors

    Uusitalo, S., Aernouts, B., Sumen, J., Hietala, E., Utriainen, M. & Pastell, M., 17 Jun 2019.

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

    Open Access
  • Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures

    Ylivaara, O. M. E., Yim, J., Ylilammi, M., Utriainen, M. & Puurunen, R. L., 27 Jun 2019.

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    Depth spectroscopy analysis of La-doped HfO2 ALD thin films in 3D structures by HAXPES and ToF-SIMS

    Kia, A. M., Mart, C., Haufe, N., Utriainen, M., Puurunen, R. L. & Weinreich, W., 2019.

    Research output: Contribution to conferenceConference AbstractScientificpeer-review

  • Dopant Concentration Analysis of ALD Thin Films in 3D Structures by ToF-SIMS

    Kia, A. M., Weinreich, W., Utriainen, M., Puurunen, R. L. & Haufe, N., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS, p. 61-61 1 p.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Open Access