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Mikko Utriainen

20162019
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Fingerprint Dive into the research topics where Mikko Utriainen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 3 Similar Profiles
Atomic layer deposition Engineering & Materials Science
Aspect ratio Engineering & Materials Science
Silicon Engineering & Materials Science
high aspect ratio Physics & Astronomy
Thin films Engineering & Materials Science
Natural resources Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
MEMS Engineering & Materials Science

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Research Output 2016 2019

  • 9 Conference Abstract
  • 3 Article
  • 2 Report
  • 1 Conference Poster

Sensorit tulevat maitotiloille

Utriainen, M., 2019, In : Nauta. 2019, 3, p. 36-39 4 p.

Research output: Contribution to journalArticleProfessional

Open Access

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3

Utriainen, M., Arts, K., Vandalon, V., Gao, F., Puurunen, R. L., Kessels, E. & Knoops, H., 22 Jan 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

1 Citation (Scopus)

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2 O3 extracted from their impact on film conformality

Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Erwin Kessels, W. M. M. & Knoops, H. C. M., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 37, 3, 030908.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition
atomic layer epitaxy
profiles
high aspect ratio
Temperature

3D Analysis of Thin Layers by ToF-SIMS

Utriainen, M., Puurunen, R. L., Kia, A. M., Esmaeli, S., Mart, C., Haufe, N. & Weinreich, W., 31 Aug 2018.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

3 Citations (Scopus)

Assistive device for orientation and mobility of the visually impaired based on millimeter wave radar technology—Clinical investigation results

Kiuru, T., Metso, M., Utriainen, M., Metsävainio, K., Jauhonen, H. M., Rajala, R., Savenius, R., Ström, M., Jylhä, T. N., Juntunen, R. & Sylberg, J., 1 Jan 2018, In : Cogent Engineering. 5, 1, 1450322.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Millimeter waves
Radar
Vibrations (mechanical)
Acoustic waves
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