Projects per year
Fingerprint Dive into the research topics where Oili M.E. Ylivaara is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 35 Similar Profiles
atomic layer epitaxy
Physics & Astronomy
Atomic layer deposition
Engineering & Materials Science
residual stress
Physics & Astronomy
thin films
Physics & Astronomy
Silicon
Chemical Compounds
wafers
Physics & Astronomy
aluminum oxides
Physics & Astronomy
Thin films
Engineering & Materials Science
Projects 2012 2021
PRYSTINE: Programmable Systems for Intelligence in Automobiles
Pensala, T., Ylivaara, O. M. E., Morits, D. & Kyynäräinen, J.
1/05/18 → 30/04/21
Project: Research
ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition
Ylivaara, O. M. E., Ahopelto, J., Puurunen, R. L. & Grigoras, K.
1/01/12 → 31/12/17
Project: Research
Research Output 2010 2019
77
Citations
(Scopus)
Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
Ylivaara, O. M. E., Liu, X., Kilpi, L., Lyytinen, J., Schneider, D., Laitinen, M., Julin, J., Ali, S., Sintonen, S., Berdova, M., Haimi, E., Sajavaara, T., Ronkainen, H., Lipsanen, H., Koskinen, J., Hannula, S. P. & Puurunen, R. L., 2014, In : Thin Solid Films. 552, p. 124-135 12 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
Atomic layer deposition
Aluminum Oxide
atomic layer epitaxy
residual stress
Residual stresses
9
Citations
(Scopus)
Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
Ylivaara, O. M. E., Kilpi, L., Liu, X., Sintonen, S., Ali, S., Laitinen, M., Julin, J., Haimi, E., Sajavaara, T., Lipsanen, H., Hannula, S-P., Ronkainen, H. & Puurunen, R. L., 2017, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 1, 14 p., 01B105.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
Atomic layer deposition
Aluminum Oxide
atomic layer epitaxy
titanium oxides
Titanium dioxide
Intercalation of Lithium Ions from Gaseous Precursors into β-MnO 2 Thin Films Deposited by Atomic Layer Deposition
Nieminen, H-E., Miikkulainen, V., Settipani, D., Simonelli, L., Hönicke, P., Zech, C., Kayser, Y., Beckhoff, B., Honkanen, A-P., Heikkilä, M. J., Mizohata, K., Meinander, K., Ylivaara, O. M. E., Huotari, S. & Ritala, M., 27 Jun 2019, In : Journal of Physical Chemistry C. 123, 25, p. 15802-15814 13 p.Research output: Contribution to journal › Article › Scientific › peer-review
Atomic layer deposition
Intercalation
atomic layer epitaxy
Lithium
intercalation
Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
Zhu, Z., Sippola, P., Ylivaara, O., Modanese, C., Di Sabatino, M., Mizohata, K., Merdes, S., Lipsanen, H. & Savin, H., 2019, In : Nanoscale Research Letters. 14, 8 p., 55.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
Atomic layer deposition
cold plasmas
atomic layer epitaxy
Carbon Dioxide
carbon dioxide
Microelectrode Array With Transparent ALD TiN Electrodes
Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
Microelectrodes
Electrodes
Electric Impedance
Noise
Neurons
Activities 2018 2018
- 2 Oral presentation
Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures
Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker), Riikka L. Puurunen (Speaker)31 Jul 2018
Activity: Talk or presentation types › Oral presentation
Stresses in ALD films: Aiming for zero stress thin films
Riina Ritasalo (Speaker), Oili M.E. Ylivaara (Speaker), Tero Pilvi (Speaker), Tommi Suni (Speaker)31 Jul 2018
Activity: Talk or presentation types › Oral presentation