Projects per year
Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Dive into the research topics where Oili M.E. Ylivaara is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 1 Similar Profiles
Projects
- 2 Finished
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PRYSTINE: Programmable Systems for Intelligence in Automobiles
Pensala, T., Ylivaara, O. M. E., Morits, D. & Kyynäräinen, J.
1/05/18 → 30/04/21
Project: EU project
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ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition
Ylivaara, O. M. E., Ahopelto, J., Puurunen, R. L. & Grigoras, K.
1/01/12 → 31/12/17
Project: Academy of Finland project
Research output
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Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
Ylivaara, O. M. E., Liu, X., Kilpi, L., Lyytinen, J., Schneider, D., Laitinen, M., Julin, J., Ali, S., Sintonen, S., Berdova, M., Haimi, E., Sajavaara, T., Ronkainen, H., Lipsanen, H., Koskinen, J., Hannula, S. P. & Puurunen, R. L., 2014, In: Thin Solid Films. 552, p. 124-135Research output: Contribution to journal › Article › Scientific › peer-review
Open Access131 Citations (Scopus) -
Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
Ylivaara, O. M. E., Kilpi, L., Liu, X., Sintonen, S., Ali, S., Laitinen, M., Julin, J., Haimi, E., Sajavaara, T., Lipsanen, H., Hannula, S-P., Ronkainen, H. & Puurunen, R. L., 2017, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 1, 14 p., 01B105.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access28 Citations (Scopus) -
Saturation profile based conformality analysis for atomic layer deposition: Aluminum oxide in lateral high-aspect-ratio channels
Yim, J., Ylivaara, O. M. E., Ylilammi, M., Korpelainen, V., Haimi, E., Verkama, E., Utriainen, M. & Puurunen, R. L., 2020, In: Physical Chemistry Chemical Physics. 22, 40, p. 23107-23120Research output: Contribution to journal › Article › Scientific › peer-review
Open Access12 Citations (Scopus) -
Optical metrology of 3D thin film conformality by LHAR chip assisted method
Utriainen, M., Saastamoinen, K., Rekola, H., Ylivaara, O. M. E., Puurunen, R. L. & Hyttinen, P., 2022, Photonic Instrumentation Engineering IX. Busse, L. E., Soskind, Y. & Mock, P. C. (eds.). International Society for Optics and Photonics SPIE, 8 p. 120080D. (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 12008).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition
Ylivaara, O. M. E., Langner, A., Liu, X., Schneider, D., Julin, J., Arstila, K., Sintonen, S., Ali, S., Lipsanen, H., Sajavaara, T., Hannula, S. & Puurunen, R. L., 31 Aug 2021, In: Thin Solid Films. 732, 138758.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile5 Citations (Scopus)17 Downloads (Pure)
Activities
- 3 Conference presentation
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In-vitro Screening of Materials and Laminates by Atomic Layer Deposition for Medical Device Coatings
Riina Ritasalo (Speaker), Oili M.E. Ylivaara (Speaker), Teuvo Sillanpää (Speaker), Paula Holmlund (Speaker), Anu Kärkkäinen (Speaker) & Tom Blomberg (Speaker)
Jun 2020Activity: Talk or presentation types › Conference presentation
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Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures
Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker) & Riikka L. Puurunen (Speaker)
31 Jul 2018Activity: Talk or presentation types › Conference presentation
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Stresses in ALD films: Aiming for zero stress thin films
Riina Ritasalo (Speaker), Oili M.E. Ylivaara (Speaker), Tero Pilvi (Speaker) & Tommi Suni (Speaker)
31 Jul 2018Activity: Talk or presentation types › Conference presentation