Projects per year
Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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SDG 3 Good Health and Well-being -
SDG 7 Affordable and Clean Energy -
SDG 9 Industry, Innovation, and Infrastructure
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Dive into the research topics where Oili M.E. Ylivaara is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
- 1 Similar Profiles
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GENESIS: GENerate in Europe a Sustainable Industry for Semiconductor
Ylivaara, O. M. E. (Manager), Saari, H. (Participant) & Kiihamäki, J. (CoI)
1/05/25 → 30/04/28
Project: EU project
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EPheS : Efficient Photonics for Sustainable Imaging and Sensing
Varpula, A. (Manager), Ylivaara, O. M. E. (Participant), Miranto, A. (Participant), Maurya, S. (Participant), Mannila, R. (Participant) & Tappura, K. (Participant)
1/01/25 → 31/12/27
Project: Business Finland project
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MiWear: Mid-infrared Wearable for Non-invasive biomarker monitoring
Ylivaara, O. M. E. (Manager)
1/01/24 → 31/12/26
Project: EU project
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PRYSTINE: Programmable Systems for Intelligence in Automobiles
Pensala, T. (Manager), Ylivaara, O. M. E. (Participant), Morits, D. (Participant) & Kyynäräinen, J. (Participant)
1/05/18 → 30/04/21
Project: EU project
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ALDCoE: Finnish Centre of Excellence in Atomic Layer Deposition
Ylivaara, O. M. E. (PI), Ahopelto, J. (Participant), Puurunen, R. L. (Participant) & Grigoras, K. (Participant)
1/01/12 → 31/12/17
Project: Research Council of Finland
Research output
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Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
Ylivaara, O. M. E., Liu, X., Kilpi, L., Lyytinen, J., Schneider, D., Laitinen, M., Julin, J., Ali, S., Sintonen, S., Berdova, M., Haimi, E., Sajavaara, T., Ronkainen, H., Lipsanen, H., Koskinen, J., Hannula, S. P. & Puurunen, R. L., 2014, In: Thin Solid Films. 552, p. 124-135Research output: Contribution to journal › Article › Scientific › peer-review
Open Access176 Link opens in a new tab Citations (Scopus) -
Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
Ylivaara, O. M. E., Kilpi, L., Liu, X., Sintonen, S., Ali, S., Laitinen, M., Julin, J., Haimi, E., Sajavaara, T., Lipsanen, H., Hannula, S.-P., Ronkainen, H. & Puurunen, R. L., 2017, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 1, 14 p., 01B105.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access44 Link opens in a new tab Citations (Scopus) -
Saturation profile based conformality analysis for atomic layer deposition: Aluminum oxide in lateral high-aspect-ratio channels
Yim, J., Ylivaara, O. M. E., Ylilammi, M., Korpelainen, V., Haimi, E., Verkama, E., Utriainen, M. & Puurunen, R. L., 21 Oct 2020, In: Physical Chemistry Chemical Physics. 22, 40, p. 23107-23120Research output: Contribution to journal › Article › Scientific › peer-review
Open Access38 Link opens in a new tab Citations (Scopus) -
Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition
Ylivaara, O. M. E., Langner, A., Liu, X., Schneider, D., Julin, J., Arstila, K., Sintonen, S., Ali, S., Lipsanen, H., Sajavaara, T., Hannula, S.-P. & Puurunen, R. L., 31 Aug 2021, In: Thin Solid Films. 732, 138758.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile40 Link opens in a new tab Citations (Scopus)211 Downloads (Pure) -
Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
Ylivaara, O. M. E., Langner, A., Ek, S., Malm, J., Julin, J., Laitinen, M., Ali, S., Sintonen, S., Lipsanen, H., Sajavaara, T. & Puurunen, R. L., 1 Dec 2022, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 40, 6, 062414.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile15 Link opens in a new tab Citations (Scopus)554 Downloads (Pure)
Activities
- 3 Conference presentation
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In-vitro Screening of Materials and Laminates by Atomic Layer Deposition for Medical Device Coatings
Ritasalo, R. (Speaker), Ylivaara, O. M. E. (Speaker), Sillanpää, T. (Speaker), Holmlund, P. (Speaker), Kärkkäinen, A. (Speaker) & Blomberg, T. (Speaker)
Jun 2020Activity: Talk or presentation types › Conference presentation
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Stresses in ALD films: Aiming for zero stress thin films
Ritasalo, R. (Speaker), Ylivaara, O. M. E. (Speaker), Pilvi, T. (Speaker) & Suni, T. (Speaker)
31 Jul 2018Activity: Talk or presentation types › Conference presentation
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Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures
Ylivaara, O. M. E. (Speaker), Korpelainen, V. (Speaker), Ylilammi, M. (Speaker) & Puurunen, R. L. (Speaker)
31 Jul 2018Activity: Talk or presentation types › Conference presentation