Oili M.E. Ylivaara

Research Scientist

20102021
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Fingerprint Dive into the research topics where Oili M.E. Ylivaara is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Physics & Astronomy

Chemistry and Materials

atomic layer epitaxy
aluminum oxides
silicon
hardness
adhesion
mechanical properties
modulus of elasticity
titanium oxides

Engineering

residual stress
microelectromechanical systems
coatings

General

thin films
wafers
nanoindentation

Engineering & Materials Science

Atomic layer deposition
Silicon
Thin films
Substrates
MEMS
Oxides
Residual stresses
Aluminum
Plasmas
Wafer bonding

Chemical Compounds

Atomic layer deposition
Silicon
Aluminum Oxide
Thin films
Plasma Gases
Residual stresses
Plasmas