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Oili M.E. Ylivaara
Senior Scientist
,
BA6212 Optical microsystems
https://orcid.org/0000-0001-7197-9066
Phone
+358405797032
2010
2022
Research activity per year
Overview
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Network
Projects
(2)
Research output
(80)
Activities
(3)
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(12)
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Engineering
Applications
14%
Atomic Layer Deposition
100%
Coating
12%
Conformality
23%
Density
11%
Deposition Temperature
21%
Hardness
13%
High Aspect Ratio
23%
Measurement
24%
Microelectromechanical System
12%
Properties
10%
Residual Stress
10%
Substrates
19%
Temperature
10%
Thickness
22%
Thin Films
45%
Titanium Dioxide
12%
Chemistry
Analytical Method
11%
Application
10%
Atomic Layer Epitaxy
78%
Coating Agent
10%
Density
10%
Hydrogen
10%
Liquid Film
14%
Procedure
37%
Residual Stress
19%
Saturation
11%
Structure
17%
Thickness
24%
Titanium Dioxide
24%
Physics
Atomic Layer Epitaxy
88%
Coating
15%
Growth
10%
Hardness
11%
Hydrogen
11%
Microelectromechanical System
10%
Silicon
14%
Substrates
15%
Thin Films
37%
Utilization
11%
Value
12%
Wafer
25%