Oili M.E. Ylivaara

Research Scientist

20102021
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Research Output 2010 2019

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Conference abstract in proceedings
2018

Properties of ALD grown Al2O3-TiO2 laminates investigated by high temperature XRD/XRR and in situ wafer curvature measurements

Heikkilä, M. J., Ylivaara, O., Atosuo, E., Puurunen, R. L., Ritala, M. & Leskelä, M., 19 Sep 2018, 2018 E-MRS Fall book of abstracts.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

rutile
laminates
microelectromechanical systems
aluminum oxides
curvature
2016

Effect of precursor chemistry on residual stress of ALD Al2O3 and TiO2 films

Miikkulainen, V., Nieminen, H., Ylivaara, O., Mizohata, K., Puurunen, R. L. & Ritala, M., 2016, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

residual stress
chemistry
stress measurement
oxygen
buckling

Highly conformal TiN by atomic layer deposition: growth and characterization

Grigoras, K., Ylivaara, O., Gao, F., Heikkilä, M. J., Mizohata, K., Prunnila, M., Räisänen, J., Ritala, M., Leskelä, M., Ahopelto, J. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

atomic layer epitaxy
cycles
residual stress
wafers
electrical resistivity

In-situ high temperature x-ray scattering studies of some atomic layer deposited layers of metals and metal oxides

Heikkilä, M. J., Kukli, K., Atosuo, E., Ylivaara, O., Puurunen, R. L., Ritala, M. & Leskelä, M., 2016, Synchrotron Radiation to study Atomic Layer Deposition: SR-ALD Workshop: Book of abstracts.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Open Access

Residual stress in SiO2 thin films on silicon

Ylivaara, O., Putkonen, M., Pfeiffer, K., Szeghalmi, A. & Puurunen, R., 2016, Stress Evolution in Thin Films and Coatings Book of Abstracts. American Vacuum Society AVS, 17

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

residual stress
atomic layer epitaxy
silicon dioxide
oxides
vapor deposition

Residual stress in thin films made by atomic layer deposition

Ylivaara, O. & Puurunen, R., 2016, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

atomic layer epitaxy
residual stress
thin films
wafers
ozone
2015

Mechanical property mapping of ALD thin films

Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., Julin, J., Kilpi, L., Laitinen, M., Liu, X., Lyytinen, J., Malm, J., Pyymaki-Perros, A., Rontu, V., Sintonen, S., Ylivaara, O., Sajavaara, T., Lipsanen, H., Franssila, S., Koskinen, J. & 3 others, Ronkainen, H., Hannula, S-P. & Kiihamäki, J., 2015, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Thin film stress measurement and error determination: ALD Al2O3 films with different wafer sizes

Heikkinen, H., Ylivaara, O., Grönberg, L. & Puurunen, R. L., 2015, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

2014

Characterization of ALD materials for optical applications in the ultraviolet range

Langner, A., Färm, E., Ylivaara, O., Ritala, M., Leskelä, M. & Puurunen, R. L., 2014, BALD2014 Abstract book.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Influence of post-ALD annealing and thermal cycling to the residual stress, elastic modulus and hardness of ALD Al2O3

Ylivaara, O., Liu, X., Sintonen, S., Ali, S., Julin, J., Langner, A., Haimi, E., Sajavaara, T., Lipsanen, H., Hannula, S-P. & Puurunen, R. L., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Mechanical properties of ALD TiN films made from TiCl4 and NH3

Puurunen, R. L., Ylivaara, O., Liu, X., Julin, J., Sintonen, S., Marchand, B., Jalkanen, P., Haimi, E., Tuominen, M., Räisänen, J., Sajavaara, T., Lipsanen, H. & Hannula, S-P., 2014, BALD2014 Abstract book.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

On the early history of ALD: molecular layering

Aarik, J., Akbashev, A., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., Molarius, J. & 16 others, Ozgit-Akgun, C., Pedersen, H., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Tallarida, M., van Ommen, J. R., Wächtler, T., Wiemer, C. & Ylivaara, O., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Overview of early publications on atomic layer deposition

Aarik, J., Akbashev, A. R., Bechelany, M., Berdova, M., Cameron, D., Chekurov, N., Drozd, V., Elliott, S., Gottardi, G., Grigoras, K., Junige, M., Kallio, T., Kanervo, J., Koshtyal, Y., Kääriäinen, M-L., Kääriäinen, T., Lamagna, L., Malkov, A., Malygin, A., Molarius, J. & 16 others, Ozgit-Akgun, C., Pedersen, H., Puurunen, R. L., Pyymaki-Perros, A., Ras, R. H. A., Roozeboom, F., Sajavaara, T., Savin, H., Seidel, T. E., Sundberg, P., Sundqvist, J., Tallarida, M., van Ommen, J. R., Wächtler, T., Wiemer, C. & Ylivaara, O., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Residual stresses in atomic layer-deposited tantalum oxide thin films

Härkönen, E., Ylivaara, O., Puurunen, R. L., Heikkilä, M. J. & Ritala, M., 2014, BALD2014 Abstract book.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon

Ylivaara, O., Liu, X., Kilpi, L., Schneider, D., Laitinen, M., Julin, J., Ali, S., Sintonen, S., Haimi, E., Sajavaara, T., Lipsanen, H., Ronkainen, H., Hannula, S-P. & Puurunen, R. L., 2014, BALD2014 Abstract book.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Titanium nitride by atomic layer deposition: mechanical properties

Puurunen, R. L., Ylivaara, O., Liu, X., Schneider, D., Julin, J., Sintonen, S., Marchand, B., Jalkanen, P., Haimi, E., Tuominen, M., Räisänen, J., Sajavaara, T., Lipsanen, H. & Hannula, S-P., 2014, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Tribological Performance of ALD Al2O3, TiO2 and ATO nanolaminate coatings

Kilpi, L., Vaajoki, A., Varjus, S., Ylivaara, O., Puurunen, R. L. & Ronkainen, H., 2014, BALD2014 Abstract book.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

2013

Al2O3/TiO2 Nanolaminates by Atomic Layer Deposition: A Study on the Laminate Structure and Mechanical Property

Liu, X., Sintonen, S., Haimi, E., Laitinen, M., Ali, S., Julin, J., Ylivaara, O., Lipsanen, H., Sajavaara, T., Puurunen, R. L. & Hannula, S-P., 2013, International Workshop on the Mechanical Behavior of Nanoscale Multilayers.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

atomic layer epitaxy
laminates
mechanical properties
modulus of elasticity
hardness

ALD Al2O3 from TMA and water on Si: residual stress, elastic modulus, hardness and adhesion: residual stress, elastic modulus, hardness and adhesion

Ylivaara, O., Liu, X., Kilpi, L., Lyytinen, J., Schneider, D., Laitinen, M., Julin, J., Ali, S., Sintonen, S., Berdova, M., Haimi, E., Sajavaara, T., Ronkainen, H., Lipsanen, H., Koskinen, J., Hannula, S-P. & Puurunen, R. L., 2013, Technical Program & Abstracts, published abstract of a poster. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

atomic layer epitaxy
residual stress
modulus of elasticity
adhesion
hardness

Properties of low temperature PEALD SiO2

Putkonen, M., Puurunen, R. L., Ylivaara, O., Bosund, M., Sajavaara, T. & Vähä-Nissi, M., 2013, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Contact angle
Hydrogen
Temperature
Impurities
Carbon

Screening of ALD thin films for Cu diffusion barrier applications

Puurunen, R. L., Salonen, J., Nurmela, A., Ylivaara, O., Viljanen, H., Molarius, J., Monnoyer, P., Yliniemi, S., Pudas, M., Lehto, T., Lehto, T. & Li, W-M., 2013, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

XRR characterization of ALD TiO2/Al2O3 nanolaminates with ultra-thin bilayers

Sintonen, S., Ali, S., Ylivaara, O., Puurunen, R. L. & Lipsanen, H., 2013, Technical Program & Abstracts, published abstract of a poster. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

reflectance
x rays
target thickness
sharpness
laminates
2012

Adhesion performance and tribological properties of atomic layer deposited aluminum oxide films

Ronkainen, H., Kilpi, L., Vaajoki, A., Varjus, S., Ylivaara, O. & Puurunen, R. L., 2012, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

oxide films
adhesion
aluminum oxides
coatings
friction

On the nanoindentation characterization of Al2O3 thin films grown on Si-wafer by atomic layer deposition

Liu, X., Haimi, E., Hannula, S-P., Puurunen, R. L. & Ylivaara, O., 2012, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

unloading
atomic layer epitaxy
nanoindentation
wafers
coatings

Stress in atomic layer deposited aluminium oxide and titanium dioxide thin films

Ylivaara, O., Puurunen, R. L., Laitinen, M., Sintonen, S., Ali, S., Sajavaara, T., Lipsanen, H. & Kiihamäki, J., 2012, Technical Program and Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

dioxides
titanium oxides
aluminum oxides
thin films
temperature
2010

Direct wafer bonding of ALD Al2O3

Suni, T., Puurunen, R. L., Ylivaara, O., Henttinen, K., Ishida, T. & Fujita, H., 19 Jan 2010, IEEE Workshop on Low Temperature Bonding for 3D Integration Book of Abstracts. p. 211-223

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

atomic layer epitaxy
wafers
argon plasma
annealing
scanning