Panu Pekko

20022016
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MEMS Engineering & Materials Science
silicon Physics & Astronomy
Resonators Engineering & Materials Science
microelectromechanical systems Physics & Astronomy
Silicon Engineering & Materials Science
resonators Physics & Astronomy
SOI (semiconductors) Physics & Astronomy
insulators Physics & Astronomy

Research Output 2002 2016

  • 8 Article
  • 5 Conference article in proceedings
  • 1 Chapter or book article
4 Citations (Scopus)

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

MEMS
Resonators
Silicon
Doping (additives)
Elastic constants

Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability

Jaakkola, A., Pekko, P., Dekker, J. R., Prunnila, M. & Pensala, T., 2015, Frequency Control Symposium & the European Frequency and Time Forum (FCS): 2015 Joint Conference of the IEEE International. Institute of Electrical and Electronic Engineers IEEE, p. 420-422

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
temperature compensation
silicon
microelectromechanical systems
temperature
31 Citations (Scopus)

Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. R. & Pekko, P., 2014, In : IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 61, 7, p. 1063-1074

Research output: Contribution to journalArticleScientificpeer-review

Elastic constants
microelectromechanical systems
MEMS
Resonators
elastic properties

Long term stability and quality factors of degenerately n-type doped silicon resonators

Jaakkola, A., Gorelick, S., Prunnila, M., Dekker, J., Pensala, T. & Pekko, P., 2014, Proceedings: IEEE International Frequency Control Symposium, FCS 2014. Institute of Electrical and Electronic Engineers IEEE, 6859866

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Q factors
resonators
silicon
phosphorus
forks
2 Citations (Scopus)

Experimental determination of the temperature dependency of the elastic constants of degenerately doped silicon

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2013, Conference Proceeding: Joint European Frequency and Time Forum & International Frequency Control Symposium, EFTF/IFC 2013. Institute of Electrical and Electronic Engineers IEEE, p. 421-424

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

elastic properties
silicon
coefficients
arsenic
microelectromechanical systems