Panu Pekko

20022019
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  • 49 Similar Profiles
MEMS Engineering & Materials Science
silicon Physics & Astronomy
microelectromechanical systems Physics & Astronomy
Resonators Engineering & Materials Science
Silicon Engineering & Materials Science
resonators Physics & Astronomy
SOI (semiconductors) Physics & Astronomy
insulators Physics & Astronomy

Research Output 2002 2019

  • 8 Article
  • 6 Conference article in proceedings
  • 1 Chapter or book article
  • 1 Article in a proceedings journal

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 1977-1980 4 p. 8925660

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
field of view
mirrors
frequency scanning
aluminum nitrides
6 Citations (Scopus)

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

MEMS
Resonators
Silicon
Doping (additives)
Elastic constants

Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability

Jaakkola, A., Pekko, P., Dekker, J. R., Prunnila, M. & Pensala, T., 2015, Frequency Control Symposium & the European Frequency and Time Forum (FCS): 2015 Joint Conference of the IEEE International. IEEE Institute of Electrical and Electronic Engineers , p. 420-422

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
temperature compensation
silicon
microelectromechanical systems
temperature
33 Citations (Scopus)
Elastic constants
microelectromechanical systems
MEMS
Resonators
elastic properties

Long term stability and quality factors of degenerately n-type doped silicon resonators

Jaakkola, A., Gorelick, S., Prunnila, M., Dekker, J., Pensala, T. & Pekko, P., 2014, Proceedings: IEEE International Frequency Control Symposium, FCS 2014. IEEE Institute of Electrical and Electronic Engineers , 6859866

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Q factors
resonators
silicon
phosphorus
forks