Panu Pekko

  • Phone+358408485029
20022019

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

2019

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 1977-1980 4 p. 8925660

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
2016

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
2015

Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability

Jaakkola, A., Pekko, P., Dekker, J. R., Prunnila, M. & Pensala, T., 2015, Frequency Control Symposium & the European Frequency and Time Forum (FCS): 2015 Joint Conference of the IEEE International. IEEE Institute of Electrical and Electronic Engineers, p. 420-422

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2014
39 Citations (Scopus)

Long term stability and quality factors of degenerately n-type doped silicon resonators

Jaakkola, A., Gorelick, S., Prunnila, M., Dekker, J., Pensala, T. & Pekko, P., 2014, Proceedings: IEEE International Frequency Control Symposium, FCS 2014. IEEE Institute of Electrical and Electronic Engineers, 6859866

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2013

Experimental determination of the temperature dependency of the elastic constants of degenerately doped silicon

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2013, Conference Proceeding: Joint European Frequency and Time Forum & International Frequency Control Symposium, EFTF/IFC 2013. IEEE Institute of Electrical and Electronic Engineers, p. 421-424

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)
2011

High-Q micromechanical resonators for mass sensing in dissipative media

Tappura, K., Pekko, P. & Seppä, H., 2011, In : Journal of Micromechanics and Microengineering. 21, 6, 7 p., 065002.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
12 Citations (Scopus)
2010

Low-Temperature Processes for MEMS Device Fabrication

Kiihamäki, J., Kattelus, H., Blomberg, M., Puurunen, R., Laamanen, M., Pekko, P., Saarilahti, J., Ritala, H. & Rissanen, A., 2010, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Gusev, E., Garfunkel, E. & Dideikin, A. (eds.). Springer, p. 167-178 (NATO Science for Peace and Security Series B: Physics and Biophysics).

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

6 Citations (Scopus)
2008

A 3D micromechanical compass

Kyynäräinen, J., Saarilahti, J., Kattelus, H., Kärkkäinen, A., Meinander, T., Oja, A., Pekko, P., Seppä, H., Suhonen, M., Kuisma, H., Ruotsalainen, S. & Tilli, M., 10 Apr 2008, In : Sensors and Actuators A: Physical. 142, 2, p. 561-568 8 p.

Research output: Contribution to journalArticleScientificpeer-review

70 Citations (Scopus)
2007

3D micromechanical compass

Kyynäräinen, J., Saarilahti, J., Kattelus, H., Meinander, T., Suhonen, M., Oja, A., Seppä, H., Pekko, P., Kuisma, H., Ruotsalainen, S. & Tilli, M., 1 Mar 2007, In : Sensor Letters. 5, 1, p. 126-129

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Fabrication and characterization of IC compatible through-wafer polysilicon interconnects

Luusua, I., Henttinen, K., Pekko, P. & Vehmas, T., 2007, In : ECS Transactions. 2, 25, p. 27-31

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

2006

Monolithically integrated square-extensional 13.6 MHz MEMS resonator

Pekko, P., Kaajakari, V., Koort, M., Ronkainen, H. & Oja, A., 2006, MEMSWAVE 2006: Proceedings of the 7th International Conference on RF MEMS and RF Microsystems.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2005

Optimized design and process for making a DC voltage reference based on MEMS

Kärkkäinen, A., Awan, S. A., Kyynäräinen, J., Pekko, P., Oja, A. & Seppä, H., 2005, In : IEEE Transactions on Instrumentation and Measurement. 54, 2, p. 563 - 566 4 p.

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Stable SOI micromachined electrostatic AC voltage reference

Kärkkäinen, A., Pekko, P., Dekker, J., Pesonen, N., Suhonen, M., Oja, A., Kyynäräinen, J. & Seppä, H., 2005, In : Microsystem Technologies. 12, 1-2, p. 169 - 172 4 p.

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Through-wafer polysilicon interconnect fabrication with in-situ boron doping

Luusua, I., Henttinen, K., Pekko, P., Vehmas, T. & Luoto, H., 2005, Symposium J - Micro- and Nanosystems - Materials and Devices. Materials Research Society, p. 77-81 J5.5. (MRS Online Proceedings , Vol. 872).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)
2004

Manufacturing and applications of surface-micromachined and SOI-based cMUTs

Saarilahti, J., Sillanpää, T., Pekko, P. & Kiihamäki, J., 2004, 4th International Workshop on Micromachined Ultrasonic Trasducers (MUT-2004): Florence, Italy, June 17-18, 2004.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

"Plug-up": A new concept for fabricating SOI MEMS devices

Kiihamäki, J., Dekker, J., Pekko, P., Kattelus, H., Sillanpää, T. & Mattila, T., 2004, In : Microsystem Technologies. 10, 5, p. 346 - 350 5 p.

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Wideband microwave power sensor based on MEMS technology

Alastalo, A., Kyynäräinen, J., Seppä, H., Kärkkäinen, A., Pesonen, N., Lahdes, M., Vähä-Heikkilä, T., Pekko, P. & Dekker, J., 2004, 2004 Conference on Precision Electromagnetic Measurements Digest. IEEE Institute of Electrical and Electronic Engineers, p. 115-116

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2003

Capacitive RF MEMS power sensors

Vähä-Heikkilä, T., Kyynäräinen, J., Dekker, J., Pekko, P., Guillaume, N., Oja, A., Varis, J. & Seppä, H., 2003, Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications: Circuits, systems, and measurement techniques. Mallat, J., Räisänen, A. & Tuovinen, J. (eds.). European Space Agency ESA, p. 503-508 (ESA Conference Proceedings, Vol. 212).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Fabrication of photonic crystal waveguide elements on SOI

Yliniemi, S., Aalto, T., Heimala, P., Pekko, P., Jefimovs, K. & Uusitupa, T., 2003, Integrated Optical Devices: Fabrication and Testing. Righini, G. C. (ed.). International Society for Optics and Photonics SPIE, p. 23-31 (Proceedings of SPIE, Vol. 4944).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)

Modular integration of CMOS and SOI-MEMS using "plug-up" concept

Kiihamäki, J., Ronkainen, H., Pekko, P., Kattelus, H. & Theqvist, K., 2003, TRANSDUCERS 2003 - The 12th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE Institute of Electrical and Electronic Engineers, Vol. 2. p. 1647-1650

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

11 Citations (Scopus)

"Plug-up" - A new concept for fabricating SOI MEMS devices

Kiihamäki, J., Pekko, P., Kattelus, H., Sillanpää, T. & Mattila, T., 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. IEEE Institute of Electrical and Electronic Engineers, p. 229-233

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)
2002

Integrated bragg gratings in silicon-on-insulator waveguides

Aalto, T., Yliniemi, S., Heimala, P., Pekko, P., Simonen, J. & Kuittinen, M., 2002, Integrated Optics: Devices, Materials, and Technologies VI. International Society for Optics and Photonics SPIE, p. 117-124 (Proceedings of SPIE, Vol. 4640).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

9 Citations (Scopus)

Micromechanical acoustic emission sensor

Sillanpää, T., Pekko, P., Oja, A., Heikkinen, M., Kiihamäki, J., Halme, J. & Seppä, H., 2002, Eurosensors XVI Book of Abstracts. Czech Technical University, Vol. Part 1. p. 205-206

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Micromechanical acoustic emission sensors for condition monitoring

Halme, J., Sillanpää, T., Pekko, P., Heikkinen, M. & Oja, A., 2002. 8 p.

Research output: Contribution to conferenceConference articleScientific