Kiihamäki, J.,
Kattelus, H.,
Blomberg, M.,
Puurunen, R.,
Laamanen, M.,
Pekko, P.,
Saarilahti, J.,
Ritala, H. &
Rissanen, A.,
2010,
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Gusev, E., Garfunkel, E. & Dideikin, A. (eds.).
Springer,
p. 167-178 (NATO Science for Peace and Security Series B: Physics and Biophysics).
Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review