Panu Pekko

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2010
Low-Temperature Processes for MEMS Device Fabrication
Kiihamäki, J., Kattelus, H., Blomberg, M., Puurunen, R., Laamanen, M., Pekko, P., Saarilahti, J., Ritala, H. & Rissanen, A., 2010, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Gusev, E., Garfunkel, E. & Dideikin, A. (eds.). Springer, p. 167-178 (NATO Science for Peace and Security Series B: Physics and Biophysics).
Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review
6 Citations (Scopus)

Research output