Panu Pekko

  • Phone+358408485029
20022019

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

Filter
Chapter or book article
2010

Low-Temperature Processes for MEMS Device Fabrication

Kiihamäki, J., Kattelus, H., Blomberg, M., Puurunen, R., Laamanen, M., Pekko, P., Saarilahti, J., Ritala, H. & Rissanen, A., 2010, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Gusev, E., Garfunkel, E. & Dideikin, A. (eds.). Springer, p. 167-178 (NATO Science for Peace and Security Series B: Physics and Biophysics).

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

6 Citations (Scopus)