Panu Pekko

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20022019

Research output per year

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Research Output

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Conference article in proceedings
2019

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 1977-1980 4 p. 8925660

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
2015

Second order temperature compensated piezoelectrically driven 23 MHz heavily doped silicon resonators with ±10 ppm temperature stability

Jaakkola, A., Pekko, P., Dekker, J. R., Prunnila, M. & Pensala, T., 2015, Frequency Control Symposium & the European Frequency and Time Forum (FCS): 2015 Joint Conference of the IEEE International. IEEE Institute of Electrical and Electronic Engineers, p. 420-422

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2014

Long term stability and quality factors of degenerately n-type doped silicon resonators

Jaakkola, A., Gorelick, S., Prunnila, M., Dekker, J., Pensala, T. & Pekko, P., 2014, Proceedings: IEEE International Frequency Control Symposium, FCS 2014. IEEE Institute of Electrical and Electronic Engineers, 6859866

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2013

Experimental determination of the temperature dependency of the elastic constants of degenerately doped silicon

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2013, Conference Proceeding: Joint European Frequency and Time Forum & International Frequency Control Symposium, EFTF/IFC 2013. IEEE Institute of Electrical and Electronic Engineers, p. 421-424

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)
2006

Monolithically integrated square-extensional 13.6 MHz MEMS resonator

Pekko, P., Kaajakari, V., Koort, M., Ronkainen, H. & Oja, A., 2006, MEMSWAVE 2006: Proceedings of the 7th International Conference on RF MEMS and RF Microsystems.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2005

Through-wafer polysilicon interconnect fabrication with in-situ boron doping

Luusua, I., Henttinen, K., Pekko, P., Vehmas, T. & Luoto, H., 2005, Symposium J - Micro- and Nanosystems - Materials and Devices. Materials Research Society, p. 77-81 J5.5. (MRS Online Proceedings , Vol. 872).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)
2004

Manufacturing and applications of surface-micromachined and SOI-based cMUTs

Saarilahti, J., Sillanpää, T., Pekko, P. & Kiihamäki, J., 2004, 4th International Workshop on Micromachined Ultrasonic Trasducers (MUT-2004): Florence, Italy, June 17-18, 2004.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Wideband microwave power sensor based on MEMS technology

Alastalo, A., Kyynäräinen, J., Seppä, H., Kärkkäinen, A., Pesonen, N., Lahdes, M., Vähä-Heikkilä, T., Pekko, P. & Dekker, J., 2004, 2004 Conference on Precision Electromagnetic Measurements Digest. IEEE Institute of Electrical and Electronic Engineers, p. 115-116

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2003

Capacitive RF MEMS power sensors

Vähä-Heikkilä, T., Kyynäräinen, J., Dekker, J., Pekko, P., Guillaume, N., Oja, A., Varis, J. & Seppä, H., 2003, Proceedings of 3rd ESA Workshop On Millimetre Wave Technology and Applications: Circuits, systems, and measurement techniques. Mallat, J., Räisänen, A. & Tuovinen, J. (eds.). European Space Agency ESA, p. 503-508 (ESA Conference Proceedings, Vol. 212).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Fabrication of photonic crystal waveguide elements on SOI

Yliniemi, S., Aalto, T., Heimala, P., Pekko, P., Jefimovs, K. & Uusitupa, T., 2003, Integrated Optical Devices: Fabrication and Testing. Righini, G. C. (ed.). International Society for Optics and Photonics SPIE, p. 23-31 (Proceedings of SPIE, Vol. 4944).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)

Modular integration of CMOS and SOI-MEMS using "plug-up" concept

Kiihamäki, J., Ronkainen, H., Pekko, P., Kattelus, H. & Theqvist, K., 2003, TRANSDUCERS 2003 - The 12th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE Institute of Electrical and Electronic Engineers, Vol. 2. p. 1647-1650

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

11 Citations (Scopus)

"Plug-up" - A new concept for fabricating SOI MEMS devices

Kiihamäki, J., Pekko, P., Kattelus, H., Sillanpää, T. & Mattila, T., 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. IEEE Institute of Electrical and Electronic Engineers, p. 229-233

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)
2002

Integrated bragg gratings in silicon-on-insulator waveguides

Aalto, T., Yliniemi, S., Heimala, P., Pekko, P., Simonen, J. & Kuittinen, M., 2002, Integrated Optics: Devices, Materials, and Technologies VI. International Society for Optics and Photonics SPIE, p. 117-124 (Proceedings of SPIE, Vol. 4640).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

9 Citations (Scopus)