Panu Pekko

  • Phone+358408485029
20022019

Research output per year

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Research Output

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Article
2016

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
2014
39 Citations (Scopus)
2011

High-Q micromechanical resonators for mass sensing in dissipative media

Tappura, K., Pekko, P. & Seppä, H., 2011, In : Journal of Micromechanics and Microengineering. 21, 6, 7 p., 065002.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
12 Citations (Scopus)
2008

A 3D micromechanical compass

Kyynäräinen, J., Saarilahti, J., Kattelus, H., Kärkkäinen, A., Meinander, T., Oja, A., Pekko, P., Seppä, H., Suhonen, M., Kuisma, H., Ruotsalainen, S. & Tilli, M., 10 Apr 2008, In : Sensors and Actuators A: Physical. 142, 2, p. 561-568 8 p.

Research output: Contribution to journalArticleScientificpeer-review

70 Citations (Scopus)
2007

3D micromechanical compass

Kyynäräinen, J., Saarilahti, J., Kattelus, H., Meinander, T., Suhonen, M., Oja, A., Seppä, H., Pekko, P., Kuisma, H., Ruotsalainen, S. & Tilli, M., 1 Mar 2007, In : Sensor Letters. 5, 1, p. 126-129

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)
2005

Optimized design and process for making a DC voltage reference based on MEMS

Kärkkäinen, A., Awan, S. A., Kyynäräinen, J., Pekko, P., Oja, A. & Seppä, H., 2005, In : IEEE Transactions on Instrumentation and Measurement. 54, 2, p. 563 - 566 4 p.

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)

Stable SOI micromachined electrostatic AC voltage reference

Kärkkäinen, A., Pekko, P., Dekker, J., Pesonen, N., Suhonen, M., Oja, A., Kyynäräinen, J. & Seppä, H., 2005, In : Microsystem Technologies. 12, 1-2, p. 169 - 172 4 p.

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
2004

"Plug-up": A new concept for fabricating SOI MEMS devices

Kiihamäki, J., Dekker, J., Pekko, P., Kattelus, H., Sillanpää, T. & Mattila, T., 2004, In : Microsystem Technologies. 10, 5, p. 346 - 350 5 p.

Research output: Contribution to journalArticleScientificpeer-review

10 Citations (Scopus)