Panu Pekko

  • Phone+358408485029
20022019

Research output per year

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Research Output

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Article in a proceedings journal
2007

Fabrication and characterization of IC compatible through-wafer polysilicon interconnects

Luusua, I., Henttinen, K., Pekko, P. & Vehmas, T., 2007, In : ECS Transactions. 2, 25, p. 27-31

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review