Research output per year
Research output per year
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Dive into the research topics where Sari Elomaa is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Research output
- 1 Conference article in proceedings
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MOEMS Fabry-Pérot interferometers with ALD TiO2 anti-stiction coating for pull-in failure prevention
Elomaa, S., Akujärvi, A. & Saari, H., 2023, Smart Photonic and Optoelectronic Integrated Circuits 2023. He, S. & Vivien, L. (eds.). International Society for Optics and Photonics SPIE, 124250G. (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 12425).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review