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Projects
- 1 Active
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APECS-PL: Advanced Packaging and Heterogeneous Integration for Electronic Components and Systems Pilot Line
Pekko, P. (Manager), Morits, D. (Participant), Alastalo, A. (Owner), Vainio, M.-R. (Participant), Elomaa, S. (Participant) & Lahti, M. (Participant)
1/11/24 → 30/06/29
Project: EU project
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Capacitively controlled fabry-perot interferometer
Saari, H. (Inventor), Blomberg, M. (Inventor) & Elomaa, S. (Inventor), 24 Oct 2023, IPC No. G01J3/26, Patent No. US11796887 B2, 14 Sept 2021, Priority date 22 Sept 2020, Priority No. FI20200005917Research output: Patent › Patent
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MOEMS Fabry-Pérot interferometers with ALD TiO2 anti-stiction coating for pull-in failure prevention
Elomaa, S., Akujärvi, A. & Saari, H., 2023, Smart Photonic and Optoelectronic Integrated Circuits 2023. He, S. & Vivien, L. (eds.). International Society for Optics and Photonics SPIE, 124250G. (Proceedings of SPIE, Vol. 12425).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review