Keyphrases
Anti-stiction
100%
Atomic Layer Deposited
100%
Fabry
100%
Failure Prevention
100%
Interferometer
100%
Metal Mirror
50%
Micro-opto-electro-mechanical Systems (MOEMS)
100%
Non-reversible
50%
Rutile
100%
Static Charge
100%
Sticking
100%
Thick Layer
50%
TiO2 Coating
50%
TiO2 Layer
50%
TiO2 Thin Film
100%
INIS
cavities
28%
charges
28%
coatings
100%
failures
100%
films
14%
interferometers
100%
layers
100%
lifetime
14%
mirrors
100%
performance
28%
thickness
28%
thin films
14%
titanium oxides
100%
Engineering
Atomic Layer
100%
Micro-Opto-Electromechanical System
100%
Static Charge
100%
Stiction
100%
Thick Layer
50%
Thin Layer
50%
Titanium Dioxide (Tio2)
50%