INIS
sound waves
100%
layers
88%
resonators
68%
piezoelectricity
62%
silicon
62%
devices
57%
ghz range
43%
thin films
40%
aluminium nitrides
40%
simulation
39%
filters
36%
electrodes
35%
surfaces
35%
excitation
30%
dispersions
27%
plasma
25%
coupling
25%
asdex tokamak
24%
films
24%
jets
24%
conversion
24%
signals
23%
curves
23%
power
22%
levels
21%
information
21%
impurities
20%
applications
18%
efficiency
17%
resonance
17%
deposition
17%
losses
17%
zinc oxides
16%
thickness
16%
acoustics
15%
cavities
15%
periodicity
15%
particles
14%
voltage
14%
peaks
14%
lambs
13%
lasers
13%
suppression
12%
modeling
12%
carbon 13
12%
extraction
12%
transport
12%
tungsten
12%
test particles
12%
erosion
12%
Keyphrases
Acoustic Wave Resonator
42%
Nanobeam
36%
Resonator
35%
Layer Thickness
34%
Piezoelectric Layer
30%
Nanocrystalline Silicon
28%
Optomechanics
28%
Surface Acoustic Wave
27%
Acoustic Wave Filter
24%
Counter Electrode
24%
NanoString
24%
Mechanical Excitation
24%
GHz Frequency
24%
ASDEX Upgrade
24%
Nitrided Layer
24%
Sidebands
24%
Frequency Response
24%
Material Parameters
24%
Dispersion Curves
21%
Electromechanical Coupling
18%
Technology Platform
16%
Silicon Nanobeam
16%
Film Bulk Acoustic Resonator
15%
Bulk Acoustic Wave
15%
Patent Family
13%
Physical Review
12%
Manufacturable
12%
Microacoustic
12%
BAW Filters
12%
Inductors
12%
Insertion Loss
12%
Filter Method
12%
Relative Bandwidth
12%
Nitrides
12%
Neutron Generator
12%
Weight Test
12%
Particle-in-cell Simulation
12%
Net Erosion
12%
Maxwellian
12%
Tungsten
12%
Optomechanical System
12%
Silicon Platform
12%
Deposition Pattern
12%
Neutron Source
12%
Neutron Detector
12%
FEM Modeling
12%
BAW Resonator
12%
Low Loss
12%
Room Temperature
12%
Acoustic Impedance
12%