Tauno Vähä-Heikkilä

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20022018

Research output per year

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Research Output

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Chapter or book article
2010

Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

Mueller, A., Neculoiu, D., Konstantinidis, G. & Vähä-Heikkilä, T., 2010, Advanced Materials and Technologies for Micro/Nano-Devices. Gusev, E., Garfunkel, E. & Dideikin, A. (eds.). The Netherlands: Springer, p. 75-87

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

2002

Micromechanical radio frequency systems

Åberg, M., Jenu, M., Kattelus, H., Lenkkeri, J., Seppä, H., Sipola, H., Varpula, T. & Vähä-Heikkilä, T., 2002, Communications Technologies: The VTT Roadmaps. Espoo: VTT Technical Research Centre of Finland, p. 27 - 43 (VTT Tiedotteita - Research Notes; No. 2146).

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Open Access