Tauno Vähä-Heikkilä

20032019
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Research Output 2003 2018

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Chapter or book article

Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

Mueller, A., Neculoiu, D., Konstantinidis, G. & Vähä-Heikkilä, T., 2010, Advanced Materials and Technologies for Micro/Nano-Devices. Gusev, E., Garfunkel, E. & Dideikin, A. (eds.). The Netherlands: Springer, p. 75-87

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

Millimeter wave devices
Micromachining
Microwaves
Membranes
Millimeter waves