Tauno Vähä-Heikkilä

20032019
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Research Output 2003 2018

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Conference article in proceedings
2018

SIW Cavity Filters with Embedded Planar Resonators in LTCC Package for 5G Applications

Showail, J., Lahti, M., Kautio, K., Arabi, E., Rantakari, P., Huhtinen, I., Vähä-Heikkilä, T. & Shamim, A., 2018, 48th European Microwave Conference (EuMC). IEEE Institute of Electrical and Electronic Engineers , p. 757-760 4 p. 8541552

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Resonators
Insertion losses
Bandwidth
Strip telecommunication lines
Temperature
2015

An RF-MEMS based SP4T switched LNA MMIC used in a 24 GHz beam-steering antenna module

Malmqvist, R., Gustafsson, A., Simon, W., Campo, M. A., Baggen, L., Grandchamp, B., Seok, S., Fryziel, M., Rolland, N., Lahti, M., Rantakari, P. & Vaha-Heikkila, T., 3 Dec 2015, 10th European Microwave Integrated Circuits Conference (EuMIC). IEEE Institute of Electrical and Electronic Engineers , p. 329-332

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Antennas
Switches
Switching networks

Microsystem integration from RF to millimeter wave applications

Vähä-Heikkilä, T. & Lahti, M., 2015, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. International Society for Optics and Photonics SPIE, 95170R. (Proceedings of SPIE, Vol. 9517).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Microsystems
Millimeter waves
Packaging
Microwaves
Consumer products

Substrate integrated waveguide fed LTCC microstrip patch antenna for 94 GHz applications

Bunea, A. C., Neculoiu, D., Lahti, M. & Vaha-Heikkila, T., 17 Dec 2015, Semiconductor Conference (CAS), 2015 International. IEEE Institute of Electrical and Electronic Engineers , p. 127-130

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Substrate integrated waveguides
Antenna feeders
Microstrip antennas
Bandwidth
Tapes
2013

3D RF integration at VTT

Vähä-Heikkilä, T., 2013, Nanosensors, Biosensors, and Info-Tech Sensors and Systems . Varadan, V. K. (ed.). International Society for Optics and Photonics SPIE, 86910V. (Proceedings of SPIE, Vol. 8691).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Temperature

A 0-level packaged RF-MEMS switched wideband GaAs LNA MMIC

Gustafsson, A., Samuelsson, C., Malmqvist, R., Seok, S., Fryziel, M., Rolland, N., Grandchamp, B., Vähä-Heikkilä, T. & Baggen, R., 2013, Proceedings of 8th European Microwave Integrated Circuits Conference, EuMIC 2013. p. 432-435

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Noise figure
Networks (circuits)
9 Citations (Scopus)

A 60-GHz semipassive MMID transponder for backscattering communications

Kiuru, T., Pursula, P., Rajamäki, J. & Vähä-Heikkilä, T., 2013, Proceedings: IEEE MTT-S International Microwave Symposium Digest 2013, MTT 2013. IEEE Institute of Electrical and Electronic Engineers , 3 p. 6697382

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

transponders
backscattering
communication
diodes
laboratory equipment
5 Citations (Scopus)

Hermetic packaging for millimetre wave applications

Lahti, M., Kautio, K., Ollila, J., Vähä-Heikkilä, T. & Kaunisto, M., 2013, Proceedings: European Microelectronics and Packaging Conference, EMPC 2013 . IEEE Institute of Electrical and Electronic Engineers , 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Millimeter waves
Packaging
Ceramic materials
Soldering alloys
Melting point
1 Citation (Scopus)

Innovative MEMS-MMIC components for agile antenna frontends

Baggen, L., simon, W., Arias Compo, M., Malmqvist, R., Vähä-Heikkilä, T., Grandchamp, B. & Rolland, P., 2013, Proceedings: 7th European Conference on Antennas and Propagation, EuCAP 2013. IEEE Institute of Electrical and Electronic Engineers , p. 1572-1575

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Antennas
Switches
Networks (circuits)
3 Citations (Scopus)

LTCC Microstrip parasitic patch antenna for 77 GHz automotive applications

Bunea, A-C., Neculoiu, D., Lahti, M. & Vähä-Heikkilä, T., 2013, 2013 IEEE International Conference on Microwaves, Communications, Antennas and Electronic Systems (COMCAS 2013). IEEE Institute of Electrical and Electronic Engineers , 6685305

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Microstrip antennas
Radiation
Antenna feeders
Antennas
Temperature
1 Citation (Scopus)

RF-MEMS reconfigurable GaAs MMICs and antennas for microwave/MM-wave applications

Malmqvist, R., Jonsson, R., Samuelsson, C., Gustafsson, A., Reyaz, S., Dancila, D., Rydberg, A., Grandchamp, B., Seok, S., Fryziel, M., Rolland, P-A., Rantakari, P., Lahti, M., Vähä-Heikkilä, T. & Baggen, R., 2013, CAS 2013 Proceedings : 36th International Semiconductor Conference. IEEE Institute of Electrical and Electronic Engineers , Vol. 2. p. 83-88

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Microwaves
Antennas
Switching circuits
30 Citations (Scopus)

The development and evaluation of RF TSV for 3D IPD applications

Ebefors, T., Fredlund, J., Perttu, D., van Dijk, R., Cifola, L., Kaunisto, M., Rantakari, P. & Vähä-Heikkilä, T., 2013, 2013 IEEE International 3D Systems Integration Conference (3DIC). IEEE Institute of Electrical and Electronic Engineers , Article number 6702382

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Silicon
Fabrication
Plating
Aspect ratio
Coplanar waveguides
2012
2 Citations (Scopus)

160 GHz Silicon Micromachined Folded Slot Antenna Array

Bunea, A-C., Neculoiu, D., Avram, A., Kiuru, T., Vähä-Heikkilä, T., Takacs, A. & Calmon, P., 2012, Proceedings of APMC 2012: Asia Pacific Microwave Conference . IEEE Institute of Electrical and Electronic Engineers , p. 896-898

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Slot antennas
Antenna arrays
Silicon
Reactive ion etching
Micromachining
1 Citation (Scopus)

94 GHz substrate integrated waveguide fed antenna in LTCC technology

Bunea, A-C., Neculoiu, D., Lahti, M. & Vähä-Heikkilä, T., 2012, Proceedings: IEEE Asia-Pacific Conference on Antennas and Propagation, APCAP 2012. IEEE Institute of Electrical and Electronic Engineers , p. 283-284

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Substrate integrated waveguides
Antenna feeders
Antenna arrays
Antennas
Tapes
7 Citations (Scopus)

A K-band single-chip reconfigurable/multi-functional RF-MEMS switched dual-LNA MMIC

Malmqvist, R., Samuelsson, C., Gustafsson, A., Maher, H., Vähä-Heikkilä, T. & Baggen, R., 2012, Proceedings : IEEE/MTT-S International Microwave Symposium Digest. IEEE Institute of Electrical and Electronic Engineers , 3 p. 6259517

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Noise figure
Networks (circuits)
Switches

MEMS-4-MMIC: The next step in combined GaAs MEMS-MMIC technology

Baggen, L., Simon, W., Malmqvist, R., Vähä-Heikkilä, T., Maher, H. & Seok, S., 2012, Proceedings: 15th International Symposium on Antenna Technology and Applied Electromagnetics, ANTEM 2012. IEEE Institute of Electrical and Electronic Engineers , 6262342

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Switches
Cognitive systems
Foundries
8 Citations (Scopus)

Self-Actuation Tests of Ohmic Contact and Capacitive RF-MEMS Switches for Wideband RF Power Limiter Circuits

Malmqvist, R., Jonsson, R., Samuelsson, C., Reyaz, S., ouacha, A., Rantakari, P., Vähä-Heikkilä, T., Varis, J. & Rydberg, J., 2012, Proceedings of the 2012 International Semiconductor Conference, CAS 2012. IEEE Institute of Electrical and Electronic Engineers , p. 217-220

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Ohmic contacts
Limiters
MEMS
Switches
Networks (circuits)
2011
3 Citations (Scopus)

An experimental study of standard packaged/unpackaged GaAs MMIC based RF-MEMS limiter test circuits

Jonsson, R., Samuelsson, C., Reyaz, S., Malmqvist, R., Smith, D., Richard, M., Rantakari, P., Vähä-Heikkilä, T. & Baggen, R., 2011, CAS 2011 Proceedings : International Semiconductor Conference. IEEE Institute of Electrical and Electronic Engineers , p. 203-206

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Limiters
Monolithic microwave integrated circuits
MEMS
Networks (circuits)
Switches
7 Citations (Scopus)

Design and experiments of 77 GHz antennas in LTCC technology

Neculoiu, D., Lahti, M., Stefanescu, A., Muller, A. A. & Vähä-Heikkilä, T., 2011, Proceedings of the 5th European Conference on Antennas and Propagation, EUCAP 2011. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 253-257

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Microstrip antennas
Antennas
Electromagnetic waves
Experiments
Bandwidth
1 Citation (Scopus)

Design and experiments of a 77 GHz receiver in LTCC technology

Neculoiu, D., Lahti, M., Bunea, A. C., Stefanescu, A. & Vähä-Heikkilä, T., 2011, Asia-Pacific Microwave Conference Proceedings, APMC. IEEE Institute of Electrical and Electronic Engineers , p. 453-456

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Microstrip antennas
Nonlinear analysis
Millimeter waves
Electromagnetic waves
Diodes
6 Citations (Scopus)

Investigation of substrate integrated waveguide in LTCC technology for mm-wave applications

Bunea, A-C., Lahti, M., Neculoiu, D., Stefanescu, A. & Vähä-Heikkilä, T., 2011, Proceedings of the Asia-Pacific Microwave Conference, APMC 2011. IEEE Institute of Electrical and Electronic Engineers , p. 395-398

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Substrate integrated waveguides
Coplanar waveguides
Studios
Software packages
Temperature
1 Citation (Scopus)

LTCC packaging from RF to millimeter waves

Lahti, M., Kautio, K., Kondratyev, V., Kaunisto, M. & Vähä-Heikkilä, T., 2011, IMAPS Nordic Annual Conference 2011. Kutilainen, J. (ed.). Finland: Curran Associates Inc., p. 96-101

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Millimeter waves
Packaging
Microwaves
Telecommunication systems
Mobile phones
2 Citations (Scopus)

MEMS-4-MMIC: Design of Antenna Array Front End at 24 GHz

Campo, M. A., Litschke, O., Vähä-Heikkilä, T., Lahti, M. & Baggen, R., 2011, Proceedings: 5th European Conference on Antennas and Propagation, EuCAP 2011. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 1907-1911

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
Insertion losses
Antenna arrays
Semiconductor switches
Phase shifters
6 Citations (Scopus)

Monolithic integration of millimeter-wave RF-MEMS switch circuits and LNAs using a GaAs MMIC foundry process technology

Malmqvist, R., Samuelsson, C., Gustafsson, A., Smith, D., Vähä-Heikkilä, T. & Baggen, R., 2011, Proceedings: IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies, IMWS 2011. IEEE Institute of Electrical and Electronic Engineers , p. 148-151

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
Foundries
Millimeter waves
MEMS
Switches
5 Citations (Scopus)

Reconfigurable wideband LNAs using ohmic contact and capacitive RF-MEMS switching circuits

Malmqvist, R., Samuelsson, C., Simon, W., Smith, D., Rantakari, P., Vähä-Heikkilä, T., Reyaz, S., Varis, J. & Baggen, R., 2011, Proceedings of the 6th European Microwave Integrated Circuits Conference. p. 160-163

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Switching circuits
Ohmic contacts
MEMS
Switches
Networks (circuits)
1 Citation (Scopus)

System-in-package LTCC platform for 3D RF to millimeter wave

Vähä-Heikkilä, T. & Lahti, M., 2011, Proceedings of SPIE : Nanosensors, Biosensors, and Info-Tech Sensors and Systems . International Society for Optics and Photonics SPIE, 79800W. (Proceedings of SPIE, Vol. 7980).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Millimeter waves
Metallizing
Antenna arrays
Temperature
Microwaves
2010
19 Citations (Scopus)

Design, packaging and reliability aspects of RF MEMS circuits fabricated using a GaAs MMIC foundry process technology

Malmqvist, C., Samuelsson, C., Simon, W., Rantakari, P., Smith, D., Lahdes, M., Lahti, M., Vähä-Heikkilä, T., Varis, J. & Baggen, R., 2010, The 40th European Microwave Conference. IEEE Institute of Electrical and Electronic Engineers , p. 85-88

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
Foundries
MEMS
Packaging
Switches
3 Citations (Scopus)

Electromagnetic design of W-band circuits in LTCC technology

Neculoiu, D., Muller, A. A., Stefanescu, A., Vähä-Heikkilä, T., Petrini, I. & Buiculescu, C., 2010, Proceedings: International Semiconductor Conference, CAS 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 287-290

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Networks (circuits)
Millimeter waves
Electric lines
Temperature

High quality factor integrated passive devices for microwave and millimeter wave applications

Vähä-Heikkilä, T., Marttila, I. & Heikkinen, H., 2010, Proceedings of 5th ESA Workshop on Millimetre Wave Technology and Applications. Noordwijk: European Space Agency ESA, p. 247-251

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Millimeter waves
Microwaves
Fabrication
Consumer electronics
Bandpass filters
9 Citations (Scopus)

Ka-band RF MEMS phase shifters for energy starved millimetre-wave radar sensors

Malmqvist, R., Samuelsson, C., Carlegrim, B., Rantakari, P., Vähä-Heikkilä, T., Rydberg, A. & Varis, J., 2010, Proceedings of the 2010 International Semiconductor Conference, CAS 2010. Sinaia, Romania: IEEE Institute of Electrical and Electronic Engineers , p. 261-264

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Phase shifters
Millimeter waves
MEMS
Radar
Sensors
10 Citations (Scopus)

Low-temperature CMOS-compatible 3D-integration of monocrystalline-silicon based PZT RF MEMS switch actuators on rf substrates

Saharil, F., Wright, R. V., Rantakari, P., Kirby, P. B., Vähä-Heikkilä, T., Niklaus, F., Stemme, G. & Oberhammer, J., 2010, Proceedings: 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 47-50

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
CMOS
switches
actuators
wafers

MEMS-4-MMIC: Merging RF-MEMS switches & MMIC

Baggen, R., Malmqvist, R., Smith, D., Vähä-Heikkilä, T. & Simon, W., 2010, Proceedings of the 5th ESA Workshop on Millimetre Wave Technology and Applications and 31st ESA Antenna Workshop - ESTEC. Noordwijk: European Space Agency ESA, p. 321-327

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
Merging
Switches
Cognitive radio
Wireless local area networks (WLAN)
1 Citation (Scopus)

MEMS-4-MMIC: Advances in combined GaAs MEMS-MMIC technology

Baggen, L., Simon, W., Malmqvist, R., Vähä-Heikkilä, T. & Smith, D., 2010, Proceedings: 14th International Symposium on Antenna Technology and Applied Electromagnetics and the American Electromagnetics Conference, ANTEM/AMEREM 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , 4 p. 5552490

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Switches
Foundries
Merging
15 Citations (Scopus)

RF MEMS and MMIC based Reconfigurable Matching Networks for Adaptive Multi-Band RF Front-Ends

Malmqvist, R., Samuelsson, C., Rantakari, P., Vähä-Heikkilä, T., Smith, D., Varis, J. & Baggen, R., 2010, Proceedings of the IEEE International Microwave Workshop Series on RF Front-Ends for Software Defined and Cognitive Radio Solutions, IMWS 2010. IEEE Institute of Electrical and Electronic Engineers , 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Tuning
Noise figure
Quartz
1 Citation (Scopus)

Switched LNAs using GaAs MMIC based RF MEMS switches

Malmqvist, R., Samuelsson, C., Smith, D., Vähä-Heikkilä, T. & Baggen, R., 2010, Proceedings: International Semiconductor Conference, CAS 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 283-286

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Switches
Networks (circuits)
Switching networks
1 Citation (Scopus)

Theory and applications of millimeter wave identification

Pursula, P., Viikari, V. & Vähä-Heikkilä, T., 2010, Proceedings of International Semiconductor Conference, CAS 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 53-56

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Open Access
Transponders
Millimeter waves
Communication
Backscattering
Radio frequency identification (RFID)
2009

60 GHz receiver with double folded slot antennas fabricated on thin GaAs membrane

Neculoiu, D., Konstantinidis, G., Vähä-Heikkilä, T., Kantanen, M., Muller, A., Stavinidris, A., Vasilache, D., Chatzopoulos, Z., Muller, A., Dragoman, M. & Dascalu, D., 2009, Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009. Trento, p. 33-36

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Slot antennas
Diodes
Antennas
Membranes
Micromachining

A 20 GHz Antenna Integrated RF MEMS Based Router and Switching Networks Made on Quartz

Malmqvist, R., Cheng, S., Rantakari, P., Samuelsson, C., Carlegrim, B., Vähä-Heikkilä, T., Sagberg, H., Holter, B., Hanke, U., Rydberg, A. & Varis, J., 2009, Smart Systems Integrations, 10 – 11 March 2009, Brussels, Belgium. Brussels

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Open Access
Switching networks
Routers
MEMS
Quartz
Antennas

BST Varactors for Tunable RF Circuits

Saijets, J., Vähä-Heikkilä, T., Riekkinen, T. & Mattila, T., 2009, Proceedigns of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009. p. 19-22

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Varactors
Resonators
Tuning
Networks (circuits)
Ferroelectric materials

Comparison of DMTL Phase Shifter Designs

Saijets, J., Rantakari, P., Tuohiniemi, M. & Vähä-Heikkilä, T., 2009, Proceedigns of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009. p. 37-40

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

transmission lines
microelectromechanical systems
insertion loss
figure of merit
phase shift

High quality factor integrated passive devices for microwave and millimeter wave applications

Vähä-Heikkilä, T., 2009, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009. International Society for Optics and Photonics SPIE, 6 p. 72910E . (Proceedings of SPIE; No. 7291).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Millimeter waves
Microwaves
Fabrication
Consumer electronics
Bandpass filters
1 Citation (Scopus)

MEMS-4-MMIC: Innovative RF-MEMS MMIC components for agile RF-frontends

Baggen, R., Malmqvist, R., Frijlink, P., Vähä-Heikkilä, T. & Gustafsson, A., 2009, Proceedings of the International Conference on Electromagnetics in Advanced Applications, ICEAA 2009. Piscataway, NJ: IEEE Institute of Electrical and Electronic Engineers , p. 311-314

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
Switches
Telecommunication systems
Merging
Radar
12 Citations (Scopus)

RF MEMS Based Impedance Matching Networks for Tunable Multi-Band Microwave Low Noise Amplifiers

Malmqvist, R., Rantakari, P., Samuelsson, C., Lahti, M., Cheng, S., Saijets, J., Vähä-Heikkilä, T., Rydberg, A. & Varis, J., 2009, Proceedings of the International Semiconductor Conference, 2009 - CAS 2009. IEEE Institute of Electrical and Electronic Engineers , p. 303-306

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Open Access
Microwave amplifiers
Low noise amplifiers
MEMS
Tuning
Millimeter waves
3 Citations (Scopus)

RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications

Malmqvist, R., Samuelsson, C., Rantakari, P., Frijlink, P., Smith, D., Simon, W., Saijets, J., Vähä-Heikkilä, T. & Baggen, R., 2009, Proceedings: European Microwave Integrated Circuits Conference, EuMIC 2009. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers , p. 363-366

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
MEMS
Switches
Ohmic contacts
Foundries

RF-PLATFORM Solutions from Technologies

Vähä-Heikkilä, T., 2009, Proceedings of the RF-MST Cluster Workshop at MEMSWAVE 2009 10th International Symposium on RF MEMS and RF Microsystems. Trento

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

System Analysis of a Ka-band Multi-Functional Radar Sensor based on RF MEMS Phase Shifters

Malmqvist, R., Saijets, J., Rantakari, P., Boman, T., Samuelsson, C., Gustafsson, A., Vähä-Heikkilä, T. & Varis, J., 2009, Proceedings of the 10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2009. Trento, p. 147-150

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Phase shifters
MEMS
Radar
Systems analysis
Sensors
2008
3 Citations (Scopus)

GaAs membrane-supported 60 GHz receiver with double folded slot antennas

Neculoiu, D., Konstantinidis, G., Vähä-Heikkilä, T., Muller, A., Stavinidris, A., Kantanen, M., Vasilache, D., Chatzopoulos, Z. & Dragoman, M., 2008, Proceedings of the 2008 Asia Pacific Microwave Conference, APMC 2008. Piscataway: IEEE Institute of Electrical and Electronic Engineers , 4 p. 4957892

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Slot antennas
Wireless local area networks (WLAN)
Membranes
Telecommunication systems
Networks (circuits)

Packaging of RF MEMS switches in LTCC

Lahti, M., Lenkkeri, J., Kautio, K., Lahdes, M. & Vähä-Heikkilä, T., 2008, Proceedings of the Ceramic Interconnects and Ceramic Microsystems Technologies Conference. p. 167-170

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

2005

A Nordic approach to novel micro and nanotechnology

Tuovinen, J., Ahopelto, J., Aikio, J., Karioja, P., Kattelus, H., Kololuoma, T., Kopola, H., Oja, A. & Vähä-Heikkilä, T., 2005, Proceedings of 5th ESA/ESTEC. European Space Agency ESA, 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Nanotechnology
Superconducting materials
MEMS
Tuners
ROM
2004

Amorphous metals for RF-MEMS

Kattelus, H., Ylönen, M. & Vähä-Heikkilä, T., 2004, URSI/IEEE XXIX Convention on Radio Science. Espoo: VTT Technical Research Centre of Finland, p. 13-13 (VTT Symposium; No. 235).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Open Access
MEMS
Metals
Metalloids
Micromachining
Silicon