Tauno Vähä-Heikkilä

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20022018

Research output per year

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Research Output

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Article in a proceedings journal
2006

Amorphous metal alloy based MEMS for RF applications

Ylönen, M., Vähä-Heikkilä, T. & Kattelus, H., 2006, In : Sensors and Actuators A: Physical. 132, 1, p. 283-288 6 p.

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

10 Citations (Scopus)