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Teija Häkkinen

19991999
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Resist Mathematics
Chemistry Mathematics
baths Physics & Astronomy
chemistry Physics & Astronomy
x ray fluorescence Physics & Astronomy
stripping Physics & Astronomy
chemical analysis Physics & Astronomy
cleaning Physics & Astronomy

Research Output 1999 1999

Characterization of wet chemistry resist and resist residues removal processes

Muukkonen, E., Häkkinen, T., Riihisaari, T., Eränen, S., Luusua, I., Kiviranta, A. & Savolahti, P., 1999, In : Physica Scripta. T79, p. 255-258 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Resist
Chemistry
baths
chemistry
x ray fluorescence