INIS
sensors
100%
transducers
70%
applications
62%
ultrasonics
59%
piezoelectricity
53%
sensitivity
37%
fabrication
35%
cavities
34%
devices
33%
monitoring
28%
surfaces
27%
silicon
27%
gases
23%
acoustics
23%
variations
22%
design
22%
resonance
21%
readout systems
20%
energy
20%
air flow
20%
gas flow
20%
layers
19%
membranes
18%
mirrors
18%
plugs
18%
valves
18%
leakage
18%
units
18%
emission
18%
power
18%
range
16%
space
15%
size
14%
substrates
14%
cost
13%
patents
13%
capacitance
13%
flowmeters
13%
acceleration
12%
aluminium nitrides
12%
voltage
11%
flow rate
10%
thickness
10%
Keyphrases
Piezoelectric Micromachined Ultrasonic Transducer (pMUT)
31%
Ultrasound Transmitter
30%
Monitoring System
22%
High Sensitivity
22%
Capacitive Micromachined Ultrasonic Transducer
22%
Surface Micromachining
20%
Fine Pointing
18%
Optical Link
18%
Inter-satellite
18%
Micromechanics
18%
Airflow Measurement
18%
Wireless
18%
MEMS Devices
18%
Leakage Monitoring
18%
Acoustic Emission Sensor
18%
Micromechanical Devices
18%
Silicon-on-insulator
18%
Valve Leakage
18%
Autonomous Power System
18%
Gas Flow Sensor
18%
Patent Family
17%
Passive Temperature Compensation
15%
Micromachining
15%
Wafer
13%
Space Application
12%
Pressure Variation
12%
Sound Pressure
12%
Field Velocity
12%
Acceleration Vibration
12%
Piezo
12%
Gasses
12%
Sensor Systems
11%
Condition Monitoring
11%
Flowmeter
11%
Frequency Matching
11%
Sensor-based
11%
Engineering
Transducer
72%
Ultrasonics
59%
Piezoelectric
44%
Capacitive
40%
Microelectromechanical System
36%
Patent Family
28%
Pressure Sensor
28%
Monitoring System
23%
Silicon on Insulator
18%
Acoustic Emission
18%
Sensor System
18%
Flow Sensor
18%
Gas Flow
18%
Optical Link
18%
Resonance Frequency
14%
Condition Monitoring
14%
Sound Pressure
14%
Readout Circuit
14%
Diaphragm
14%
Oscillator
14%
Full Scale
14%
Flowmeter
13%
Space Application
12%
Temperature Coefficient
12%
Phase Difference
10%