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INIS
sensors
100%
transducers
59%
applications
52%
ultrasonics
50%
piezoelectricity
44%
sensitivity
31%
fabrication
29%
cavities
28%
devices
27%
monitoring
23%
surfaces
23%
silicon
23%
gases
20%
acoustics
19%
variations
18%
design
18%
resonance
17%
readout systems
17%
energy
17%
air flow
17%
gas flow
16%
layers
16%
patents
16%
membranes
15%
mirrors
15%
plugs
15%
valves
15%
leakage
15%
units
15%
emission
15%
apparatus
15%
power
15%
range
14%
space
13%
size
12%
substrates
12%
cost
11%
capacitance
11%
flowmeters
11%
acceleration
10%
aluminium nitrides
10%
Engineering
Transducer
58%
Ultrasonics
42%
Piezoelectric
37%
Capacitive
31%
Pressure Sensor
23%
Microelectromechanical System
22%
Patent Family
20%
Monitoring System
15%
Silicon on Insulator
15%
Acoustic Emission
15%
Flow Sensor
15%
Gas Flow
15%
Optical Link
15%
Sensor System
11%
Resonance Frequency
11%
Readout Circuit
11%
Full Scale
11%
Flowmeter
11%
Space Application
10%
Temperature Coefficient
10%
Keyphrases
Ultrasound Transmitter
28%
Ultrasound
23%
Piezoelectric Micromachined Ultrasonic Transducer (pMUT)
18%
Fine Pointing
15%
Optical Link
15%
Inter-satellite
15%
Airflow Measurement
15%
Ultrasound Sensor
15%
Micromechanical
15%
Passive Temperature Compensation
13%
Patent Family
13%
Space Applications
10%
Micromachining
10%
Pressure Variation
10%
Sound Pressure
10%
Field Velocity
10%
Acceleration Vibration
10%
Gasses
10%
