Research output per year
Research output per year
- 14 results
Search results
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2024
Development and Characterization of PMUTs using Enchanced C-SOI Wafers
Karuthedath, C., Abhilash, T. S., Sillanpää, T., Larismaa, J. & Parkkinen, K., 2024, 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS). IEEE Institute of Electrical and Electronic Engineers, (IEEE International Symposium on Applications of Ferroelectrics (ISAF)).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific
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Integrated PMUTs on Elastic Substrate for Wearable Applications
Sillanpää, T., Abhilash, T. S., Kurkela, T., Airola, K., Helistö, P., Ollila, J., Karuthedath, C. & Behfar, M. H., 25 Jul 2024, FLEPS 2024 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings. IEEE Institute of Electrical and Electronic Engineers, 3 p. ( IEEE International Conference on Flexible and Printable Sensors and Systems, Vol. 2024).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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2023
Phase-Sensitive Air Flow Measurement Using PMUTs
Karuthedath, C., Sillanpää, T., Abhilash, T. S. & Gomes Martins, D., Nov 2023, 2023 IEEE International Ultrasonics Symposium (IUS). IEEE Institute of Electrical and Electronic Engineers, 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
1 Citation (Scopus) -
2022
Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)
Karuthedath, C., Abhilash, T. S., Sillanpää, T. & Pensala, T., 1 Dec 2022, IUS 2022 - IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
3 Citations (Scopus) -
2019
Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements
Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J., Sillanpää, T. & Pensala, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2489-2492 8925544Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific
17 Citations (Scopus) -
2018
Design and Verification of a Wireless Readout System for Integrated Motor Axle Condition Monitoring
McCaffrey, C., Vaajoki, A., Halme, J., Sillanpää, T., Revuelta, A. & Puukko, P., 26 Dec 2018, 2008 IEEE SENSORS. IEEE Institute of Electrical and Electronic Engineers, 4 p. 8589513. (Proceedings of IEEE Sensors, Vol. 2018-October).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
2 Citations (Scopus) -
2017
Live demonstration: Energy autonomous wireless valve leakage monitoring system with acoustic emission sensor
McCaffrey, C., Sillanpää, T., Huovila, H., Nikunen, J., Hakulinen, S. & Pursula, P., 21 Dec 2017, IEEE SENSORS 2017. IEEE Institute of Electrical and Electronic Engineers, 1 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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2014
A novel MEMS gas sensor based on ultrasonic resonance cavity
Koppinen, P. J., Sillanpää, T., Kärkkäinen, A., Saarilahti, J. & Seppä, H., 1 Jan 2014, IEEE International Ultrasonics Symposium, IUS. IEEE Institute of Electrical and Electronic Engineers, p. 655-658 6931795. (Proceedings - IEEE Ultrasonics Symposium).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
3 Citations (Scopus) -
2007
MEMS mirror for miniaturized Fourier transform spectrometer
Lamminpää, A., Holmlund, C., Mannila, R., Saari, H., Blomberg, M. & Sillanpää, T., 2007, 6th ESA Round Table on Micro & Nano Technologies for Space Applications. p. 303-312Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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2004
Manufacturing and applications of surface-micromachined and SOI-based cMUTs
Saarilahti, J., Sillanpää, T., Pekko, P. & Kiihamäki, J., 2004, 4th International Workshop on Micromachined Ultrasonic Trasducers (MUT-2004): Florence, Italy, June 17-18, 2004.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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2003
"Plug-up" - A new concept for fabricating SOI MEMS devices
Kiihamäki, J., Pekko, P., Kattelus, H., Sillanpää, T. & Mattila, T., 2003, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. IEEE Institute of Electrical and Electronic Engineers, p. 229-233Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
6 Citations (Scopus) -
2000
Air damping in resonant micromechanical capacitive sensors
Mattila, T., Kyynäräinen, J., Jaakkola, O., Kiihamäki, J., Oja, A., Seppä, H., Seppälä, P. & Sillanpää, T., 2000, Eurosensors XIV: the 14th European Conference on Solid-State Transducers: Proceedings. Technical University of Denmark DTU, p. 221-224Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Micromechanical silicon precision scale
Oja, A., Sillanpää, T., Seppä, H., Kiihamäki, J., Seppälä, P., Karttunen, J. & Riski, K., 2000, Design, Test, Integration and Packaging of MEMS/MOEMS. International Society for Optics and Photonics SPIE, p. 498-505 (Proceedings of SPIE, Vol. 4019).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
3 Citations (Scopus) -
Scanning micromechanical mirror for fine-pointing units of intersatellite optical links
Graeffe, J., Suhonen, M., Sipola, H. & Sillanpää, T., 2000, Design, Test, Integration, and Packaging of MEMS/MOEMS. International Society for Optics and Photonics SPIE, p. 372-378 (Proceedings of SPIE, Vol. 4019).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review