Timo Aalto

D.Sc. (Tech.)

  • Phone+358408485037

Research output per year

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Research Output

Chapter or book article

Optical Modeling of MEMS

Aalto, T. & Olkkonen, J., 2010, Handbook of Silicon Based MEMS Materials & Technologies: A volume in Micro and Nano Technologies. Lindroos, V., Tilli, M., Lehto, A. & Motooka, T. (eds.). Norwich, NY, USA, p. 239-258

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review