Timo Aalto

D.Sc. (Tech.)

  • Phone+358408485037
19992020

Research output per year

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Research Output

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Article in a proceedings journal
2009

Smoothing of microfabricated silicon features by thermal annealing in reducing or inert atmospheres

Kolari, K., Vehmas, T., Svensk, O., Törmä, P. & Aalto, T., 2009, In : Physica Scripta. 2010, T141, 014017.

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review