Tomi Mattila

Research activity per year

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2021
Dry electrode for biometric measurement on a skin and a method of manufacturing same
Ruotsalainen, T., Mattila, T., Sandberg, H., Kim, W., Arpiainen, S. & McCaffrey, C., 15 Apr 2021, IPC No. H01M 4/ 04 A I, Patent No. FI20205059, Priority date 21 Jan 2020, Priority No. FI20200005059
Research output: Patent › Patent
2012
Method of manufacturing laterally coupled BAW thin films
Meltaus, J., Pensala, T., Ylilammi, M., Riekkinen, T. & Mattila, T., 12 Apr 2012, IPC No. H01L 41/ 22 A I, Patent No. US2012086523, Priority date 13 Oct 2011, Priority No. US201113272390
Research output: Patent › Patent
Non-linear resonating sensor and a method
Allen, M., Viikari, V., Varpula, T., Mattila, T., Alastalo, A. & Seppä, H., 20 Sep 2012, IPC No. H01Q 15/ 00 A I, Patent No. US2012235847, Priority date 29 Mar 2012, Priority No. US201213433315
Research output: Patent › Patent
2010
Parallel-plate structure fabrication method and parallel-plate structure arrangement
Riekkinen, T. & Mattila, T., 18 Mar 2010, IPC No. H01L 41/ 39 A I, Patent No. US2010067167, Priority date 14 Sep 2007, Priority No. WO2007FI00232
Research output: Patent › Patent
2009
Micromechanical Sensor, Sensor Array and Method
Seppa, H., Tappura, K., Tuppurainen, J., Mattila, T., Alastalo, A., Helle, H. & Oja, A., 12 Nov 2009, IPC No. G01N 29/ 036 A I, Patent No. US2009277271, Priority date 4 Jul 2006, Priority No. WO2006FI00240
Research output: Patent › Patent

Research output