No photo of Tuomas Pensala

Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

20032018
If you made any changes in Pure these will be visible here soon.

Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 7 Similar Profiles
resonators Physics & Astronomy
Resonators Engineering & Materials Science
acoustics Physics & Astronomy
thin films Physics & Astronomy
microelectromechanical systems Physics & Astronomy
Acoustic waves Engineering & Materials Science
bulk acoustic wave devices Physics & Astronomy
Thin films Engineering & Materials Science

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 2003 2018

  • 14 Article
  • 13 Conference article in proceedings
  • 2 Conference article
  • 2 Dissertation
1 Citation (Scopus)

High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. Institute of Electrical and Electronic Engineers IEEE, 8580120

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
thin films
wafers
scandium
coefficients

Laterally acoustically coupled BAW filters at 3.6 GHz

Pensala, T., Makkonen, T., Dekker, J. R. & Ylilammi, M., 2018, 2018 IEEE International Ultrasonics Symposium: IUS 2018. Institute of Electrical and Electronic Engineers IEEE, p. 1-4 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Aluminum nitride
Insertion losses
Bandwidth

Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications

Pensala, T., 2017.

Research output: Contribution to conferenceConference articleResearchpeer-review

PiezoMEMS at VTT: R&D and manufacturing services

Dekker, J. & Pensala, T., 2017. 42 p.

Research output: Contribution to conferenceConference articleResearch

silicon
manufacturing
sensor
substrate
cost
4 Citations (Scopus)

Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators

Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839

Research output: Contribution to journalArticleScientificpeer-review

MEMS
Resonators
Silicon
Doping (additives)
Elastic constants