Projects per year
Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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Collaborations and top research areas from the last five years
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Next Generation MEMS Timing for Advanced and Efficient Systems
Pensala, T. (Manager)
1/04/24 → 30/04/27
Project: Business Finland project
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Beetles: BEOL ecosystem for Telecommunication and Sensors
Salo, T. (Manager), Dekker, J. R. (Participant), Ailas, H. (Participant), Pensala, T. (Participant), Khan, W. (Participant), Pohjonen, H. (Participant), Arpiainen, S. (Manager), Pehto, E. (Participant), Eskelinen, P. (Participant), Soikkeli, M. (Participant), Rantakari, P. (Manager), Saijets, J. (Participant), Pusa, J. (Participant), Järvi, K. (Participant) & Marles, J. (Participant)
1/06/21 → 31/05/24
Project: Business Finland project
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PRYSTINE: Programmable Systems for Intelligence in Automobiles
Pensala, T. (Manager), Ylivaara, O. M. E. (Participant), Morits, D. (Participant) & Kyynäräinen, J. (Participant)
1/05/18 → 30/04/21
Project: EU project
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Piezoelectric ultrasonic transducer and system
Karuthedath, C. (Inventor), Abhilash, T. S. (Inventor), Sillanpää, T. (Inventor) & Pensala, T. (Inventor), 28 Dec 2023, Patent No. US20230415198 A1, 8 Nov 2021, Priority date 9 Nov 2020, Priority No. FI20200006130Research output: Patent › Patent application
Open Access -
High-fidelity patterning of AlN and ScAlN thin films with wet chemical etching
Airola, K. (Corresponding Author), Mertin, S., Likonen, J., Hartikainen, E., Mizohata, K., Dekker, J. R., Thanniyil Sebastian, A. & Pensala, T., May 2022, In: Materialia. 22, 10 p., 101403.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile11 Citations (Scopus)640 Downloads (Pure) -
Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)
Karuthedath, C. (Corresponding author), Abhilash, T. S., Sillanpää, T. & Pensala, T., 1 Dec 2022, IUS 2022 - IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
2 Citations (Scopus) -
Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabrication
Bespalova, K., Österlund, E., Ross, G., Paulasto-Kröckel, M., Thanniyil Sebastian, A., Karuthedath, C., Mertin, S. & Pensala, T., 16 Mar 2021, In: Journal of Microelectromechanical Systems. 30, 2, p. 290-298Research output: Contribution to journal › Article › Scientific › peer-review
Open Access14 Citations (Scopus) -
Loaded series resonators for adjusting frequency response of acoustic wave resonators
Makkonen, T. (Inventor), Ylilammi, M. (Inventor), Pensala, T. (Inventor) & Dekker, J. (Inventor), 11 Mar 2021, IPC No. H03H 9/ 60 A I, Patent No. US2021075392, Priority date 11 Sept 2019, Priority No. US201916567749Research output: Patent › Patent