Projects per year
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Dive into the research topics where Tuomas Pensala is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Projects
- 1 Finished
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PRYSTINE: Programmable Systems for Intelligence in Automobiles
Pensala, T., Ylivaara, O. M. E., Morits, D. & Kyynäräinen, J.
1/05/18 → 30/04/21
Project: EU project
Research output
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Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabrication
Bespalova, K., Österlund, E., Ross, G., Paulasto-Kröckel, M., Abhilash, T. S., Karuthedath, C., Mertin, S. & Pensala, T., Apr 2021, In: Journal of Microelectromechanical Systems. 30, 2, p. 290-298 9 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
Stability and residual stresses of sputtered wurtzite AlScN thin films
Österlund, E., Ross, G., Caro, M. A., Paulasto-Kröckel, M., Hollmann, A., Klaus, M., Meixner, M., Genzel, C., Koppinen, P., Pensala, T., Žukauskaitė, A. & Trebala, M., Mar 2021, In: Physical Review Materials. 5, 3, 035001.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films
Wang, J., Park, M., Mertin, S., Pensala, T., Ayazi, F. & Ansari, A., Oct 2020, In: Journal of Microelectromechanical Systems. 29, 5, p. 741-747 7 p., 9169713.Research output: Contribution to journal › Article › Scientific › peer-review
11 Citations (Scopus) -
A High-kt2 Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator
Wang, J., Park, M., Mertin, S., Pensala, T., Ayazi, F. & Ansari, A., 22 Oct 2020, IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings. IEEE Institute of Electrical and Electronic Engineers, 3 p. 9234831. (IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
3 Citations (Scopus) -
Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration
Bespalova, K., Ross, G., Paulasto-Kröckel, M., Abhilash, T. S., Karuthedath, C., Mertin, S. & Pensala, T., 7 Sep 2020, 2020 IEEE International Ultrasonics Symposium (IUS). IEEE Institute of Electrical and Electronic Engineers, 4 p. (IEEE International Ultrasonics Symposium).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review