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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

  • Phone+358408203522
20032021

Research output per year

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Projects

Research Output

Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J., Sillanpää, T. & Pensala, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 2489-2492 4 p. 8925544

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

    Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers , p. 12-16 5 p. 8760353

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

    Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-Kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 2592-2595 4 p. 8925964

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

    Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 1977-1980 4 p. 8925660

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 1 Citation (Scopus)

    High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

    Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Institute of Electrical and Electronic Engineers , 8580120

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 1 Citation (Scopus)