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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

20032021
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  • 7 Similar Profiles
resonators Physics & Astronomy
Resonators Engineering & Materials Science
acoustics Physics & Astronomy
thin films Physics & Astronomy
microelectromechanical systems Physics & Astronomy
aluminum nitrides Physics & Astronomy
Acoustic waves Engineering & Materials Science
MEMS Engineering & Materials Science

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Projects 2018 2021

Research Output 2003 2019

Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J., Sillanpää, T. & Pensala, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 2489-2492 4 p. 8925544

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
flow measurement
air flow
transducers
ultrasonics

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers , p. 12-16 8760353

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Encapsulation
MEMS
Mirrors
Copper
Temperature

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 2592-2595 4 p. 8925964

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
wafers
scandium
thin films
actuation

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers , p. 1977-1980 4 p. 8925660

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
field of view
mirrors
frequency scanning
aluminum nitrides
1 Citation (Scopus)

High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. IEEE Institute of Electrical and Electronic Engineers , 8580120

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
thin films
wafers
scandium
coefficients