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Beetles: BEOL ecosystem for Telecommunication and Sensors
Salo, T., Dekker, J. R., Ailas, H., Pensala, T., Khan, W., Pohjonen, H., Arpiainen, S., Pehto, E., Eskelinen, P., Soikkeli, M., Rantakari, P., Saijets, J., Pusa, J., Järvi, K. & Marles, J.
1/06/21 → 31/05/24
Project: Business Finland project
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PRYSTINE: Programmable Systems for Intelligence in Automobiles
Pensala, T., Ylivaara, O. M. E., Morits, D. & Kyynäräinen, J.
1/05/18 → 30/04/21
Project: EU project
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High-fidelity patterning of AlN and ScAlN thin films with wet chemical etching
Airola, K., Mertin, S., Likonen, J., Hartikainen, E., Mizohata, K., Dekker, J. R., Thanniyil Sebastian, A. & Pensala, T., May 2022, In: Materialia. 22, 10 p., 101403.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile1 Citation (Scopus)90 Downloads (Pure) -
Passive Temperature Compensation of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)
Karuthedath, C., Abhilash, T. S., Sillanpää, T. & Pensala, T., 1 Dec 2022, IUS 2022 - IEEE International Ultrasonics Symposium. IEEE Institute of Electrical and Electronic Engineers, 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabrication
Bespalova, K., Österlund, E., Ross, G., Paulasto-Kröckel, M., Thanniyil Sebastian, A., Karuthedath, C., Mertin, S. & Pensala, T., Apr 2021, In: Journal of Microelectromechanical Systems. 30, 2, p. 290-298Research output: Contribution to journal › Article › Scientific › peer-review
Open Access7 Citations (Scopus) -
Loaded series resonators for adjusting frequency response of acoustic wave resonators
Makkonen, T., Ylilammi, M., Pensala, T. & Dekker, J., 11 Mar 2021, IPC No. H03H 9/ 60 A I, Patent No. US2021075392, Priority date 11 Sep 2019, Priority No. US201916567749Research output: Patent › Patent
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Stability and residual stresses of sputtered wurtzite AlScN thin films
Österlund, E., Ross, G., Caro, M. A., Paulasto-Kröckel, M., Hollmann, A., Klaus, M., Meixner, M., Genzel, C., Koppinen, P., Pensala, T., Žukauskaitė, A. & Trebala, M., Mar 2021, In: Physical Review Materials. 5, 3, 035001.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access7 Citations (Scopus)