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Tuomas Pensala

D. Sc. (Tech) , Principal Scientist

  • Phone+358408203522
20022020

Research output per year

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Projects

Research Output

The impact of residual stress on resonating piezoelectric devices

Ross, G., Dong, H., Karuthedath, C., Thanniyil Sebastian, A., Pensala, T. & Paulasto-Krockel, M., Nov 2020, In : Materials and Design. 196, 8 p., 109126.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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  • 11 Downloads (Pure)

    Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

    Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J., Sillanpää, T. & Pensala, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2489-2492 4 p. 8925544

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 1 Citation (Scopus)

    Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

    Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers, p. 12-16 5 p. 8760353

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

    Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-Kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2592-2595 4 p. 8925964

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 1 Citation (Scopus)

    Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

    Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 1977-1980 4 p. 8925660

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 1 Citation (Scopus)