Research Output per year
Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.
- 7 Similar Profiles
resonators
Physics & Astronomy
Resonators
Engineering & Materials Science
acoustics
Physics & Astronomy
thin films
Physics & Astronomy
microelectromechanical systems
Physics & Astronomy
Acoustic waves
Engineering & Materials Science
bulk acoustic wave devices
Physics & Astronomy
Thin films
Engineering & Materials Science
Network
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Research Output 2003 2018
1
Citation
(Scopus)
High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films
Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. Institute of Electrical and Electronic Engineers IEEE, 8580120Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
aluminum nitrides
thin films
wafers
scandium
coefficients
Laterally acoustically coupled BAW filters at 3.6 GHz
Pensala, T., Makkonen, T., Dekker, J. R. & Ylilammi, M., 2018, 2018 IEEE International Ultrasonics Symposium: IUS 2018. Institute of Electrical and Electronic Engineers IEEE, p. 1-4 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Aluminum nitride
Insertion losses
Bandwidth
Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications
Pensala, T., 2017.Research output: Contribution to conference › Conference article › Research › peer-review
PiezoMEMS at VTT: R&D and manufacturing services
Dekker, J. & Pensala, T., 2017. 42 p.Research output: Contribution to conference › Conference article › Research
silicon
manufacturing
sensor
substrate
cost
Design rules for temperature compensated degerately n-type-doped silicon MEMS resonators
Jaakkola, A., Prunnila, M., Pensala, T., Dekker, J. & Pekko, P., 2016, In : Journal of Microelectromechanical Systems. 24, 6, p. 1832-1839Research output: Contribution to journal › Article › Scientific › peer-review
MEMS
Resonators
Silicon
Doping (additives)
Elastic constants